[Scan]
initial_time=2016-02-16T02:38:35
final_time=2016-02-16T02:38:54
ip_count=19
run=1030
dataset=6
scan=485
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=5.97477E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.68877E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.29158E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.09024E-10
mult1=-1.01377E-8
mult2=-2.86233E-9
rf_tmon=-4.32617E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.54564E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.07352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05499E1
cs_ea1_imon=2.18206E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04153E1
cs_ea2_imon=1.58833E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.59654E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=2.87746E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=1.89619E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.26136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.29769E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.08103E-10
tplens_vset=1.4E-1
tplens_vmon=1.62882E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98663E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.33023E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=2.0065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.20153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.78761E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.20182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67264E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60183E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=2.86557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.33209E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.28966E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67523E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.85266E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.27189E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=8.0194E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.46572E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60006E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33906E1
os_fil1_imon=4.27167E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64738E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=1.00959E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67598E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73827E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16274E-1	-7.97963E-1	-9.13122E0	-9.14214E0	5.45979E-3	9.31501E-2	2.72791E1	-3.26614E1	-3.26319E1	2.67968E1	1.7368E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98419E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16417E-1	-7.97582E-1	-9.13136E0	-9.14183E0	5.50747E-3	9.29356E-2	2.73106E1	-3.26719E1	-3.26505E1	2.67668E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16822E-1	-7.97963E-1	-9.13103E0	-9.14187E0	5.38826E-3	9.31025E-2	2.73045E1	-3.2662E1	-3.26101E1	2.6819E1	1.73758E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16298E-1	-7.97987E-1	-9.13129E0	-9.14187E0	5.34058E-3	9.30071E-2	2.72648E1	-3.26615E1	-3.25978E1	2.67956E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16512E-1	-7.97677E-1	-9.13143E0	-9.14197E0	5.05447E-3	9.30309E-2	2.72755E1	-3.26681E1	-3.26254E1	2.67573E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16059E-1	-7.97558E-1	-9.13126E0	-9.14176E0	4.93526E-3	9.30071E-2	2.73113E1	-3.26647E1	-3.26404E1	2.68007E1	1.73605E-7	2.51783E-3	2.51783E-3	6.29703E-3	1.99776E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.15988E-1	-7.97701E-1	-9.13155E0	-9.14166E0	5.38826E-3	9.31263E-2	2.73466E1	-3.26741E1	-3.26224E1	2.68106E1	1.73605E-7	2.51611E-3	2.51611E-3	6.3074E-3	1.99343E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.15988E-1	-7.97677E-1	-9.13115E0	-9.14192E0	5.22137E-3	9.31263E-2	2.73135E1	-3.26609E1	-3.26729E1	2.67499E1	1.73755E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16107E-1	-7.98035E-1	-9.13091E0	-9.1418E0	5.17368E-3	9.30309E-2	2.73105E1	-3.26506E1	-3.26164E1	2.67878E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16321E-1	-7.97534E-1	-9.1311E0	-9.1419E0	5.36442E-3	9.32932E-2	2.73016E1	-3.26685E1	-3.26178E1	2.67619E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.9911E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.15988E-1	-7.97844E-1	-9.13129E0	-9.14185E0	5.57899E-3	9.32693E-2	2.72889E1	-3.26452E1	-3.26272E1	2.67992E1	1.73679E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9985E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16178E-1	-7.97725E-1	-9.13157E0	-9.14173E0	5.50747E-3	9.31978E-2	2.73105E1	-3.26669E1	-3.26723E1	2.67914E1	1.73831E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16751E-1	-7.97892E-1	-9.1316E0	-9.14176E0	5.14984E-3	9.32932E-2	2.73198E1	-3.26732E1	-3.26172E1	2.67746E1	1.7368E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16369E-1	-7.97439E-1	-9.13143E0	-9.14195E0	5.53131E-3	9.34601E-2	2.72757E1	-3.26338E1	-3.26314E1	2.67944E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32896E-3	1.9951E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16631E-1	-7.97534E-1	-9.13122E0	-9.14209E0	5.50747E-3	9.31025E-2	2.72991E1	-3.26639E1	-3.26603E1	2.67758E1	1.73605E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16131E-1	-7.98059E-1	-9.13143E0	-9.14185E0	5.19753E-3	9.31263E-2	2.73289E1	-3.26677E1	-3.26434E1	2.67955E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16679E-1	-7.97796E-1	-9.13155E0	-9.14173E0	5.17368E-3	9.32455E-2	2.73251E1	-3.26897E1	-3.25961E1	2.67914E1	1.7375E-7	2.51393E-3	2.51393E-3	6.3445E-3	1.99394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16178E-1	-7.98321E-1	-9.13138E0	-9.14149E0	5.74589E-3	9.3317E-2	2.74697E1	-3.27953E1	-3.25965E1	2.67583E1	1.7384E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.00064E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16822E-1	-7.97844E-1	-9.13179E0	-9.14202E0	5.72205E-3	9.30786E-2	2.72402E1	-3.26832E1	-3.26366E1	2.67914E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16202E-1	-7.98011E-1	-9.13155E0	-9.14214E0	5.55515E-3	9.32693E-2	2.73363E1	-3.26567E1	-3.26591E1	2.67523E1	1.73827E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9883E-1