[Scan]
initial_time=2016-02-16T02:39:02
final_time=2016-02-16T02:39:21
ip_count=19
run=1030
dataset=6
scan=486
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=5.83863E-10
ql2_vset=
ql2_vmon=-7.97391E-1
ql2_imon=2.78425E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.10681E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.02765E-10
mult1=-9.01795E-9
mult2=-2.69466E-9
rf_tmon=-4.50642E-3
rf_agc=3.42168E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.99697E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67788E0
bslens_imon=2.88924E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.96063E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05444E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.06141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.01843E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=2.23247E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40327E0
lens1_imon=2.33304E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04333E1
cs_ea2_imon=1.62935E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83994E1
cs_ef1a_imon=3.02805E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.10652E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11193E1
os_restr1_imon=2.86714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15242E1
os_ea1_imon=1.86677E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.10832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2324E0
cs_ionrep_imon=1.28972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.9325E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01676E1
cs_anode1_imon=3.27479E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=7.28607E-10
tplens_vset=1.4E-1
tplens_vmon=1.61362E0
tplens_imon=2.05605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.47083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.63109E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.70753E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24688E0
ionrepsh_imon=2.04962E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.17581E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12084E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.67753E-1
os_ea2_imon=-1.17682E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00366E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.20563E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63493E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57845E-1
os_ef2bup_imon=-5.16017E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.87653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.33231E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.27878E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.06551E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.9073E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=2.93732E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5604E1
einzel_imon=7.64614E-6
window_vset=0.0E0
window_vmon=1.69032E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39362E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.73159E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=7.26578E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=6.92511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49061E0
defgridb_imon=5.70149E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=4.7331E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64073E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66678E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.00841E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36943E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5869E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22454E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.64622E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16488E-1	-7.97677E-1	-9.13153E0	-9.14195E0	5.45979E-3	9.3174E-2	2.73484E1	-3.26482E1	-3.26206E1	2.68319E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.99227E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16393E-1	-7.98059E-1	-9.13148E0	-9.14164E0	5.05447E-3	9.31978E-2	2.7302E1	-3.26756E1	-3.26272E1	2.6845E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16584E-1	-7.97701E-1	-9.13153E0	-9.14199E0	4.98295E-3	9.28164E-2	2.7308E1	-3.26486E1	-3.2633E1	2.67868E1	1.73683E-7	2.51952E-3	2.51952E-3	6.29603E-3	1.99343E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16727E-1	-7.98202E-1	-9.13162E0	-9.14228E0	4.69685E-3	9.2864E-2	2.72408E1	-3.27005E1	-3.259E1	2.68136E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16584E-1	-7.98321E-1	-9.13136E0	-9.14228E0	4.69685E-3	9.29594E-2	2.73069E1	-3.26458E1	-3.265E1	2.67577E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.16488E-1	-7.9813E-1	-9.13141E0	-9.14202E0	4.81606E-3	9.30309E-2	2.72997E1	-3.26927E1	-3.26248E1	2.67301E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.16584E-1	-7.98011E-1	-9.13162E0	-9.14226E0	4.95911E-3	9.30548E-2	2.72949E1	-3.26729E1	-3.2596E1	2.68052E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.1625E-1	-7.98154E-1	-9.1315E0	-9.14185E0	4.95911E-3	9.32217E-2	2.73057E1	-3.26633E1	-3.26278E1	2.67758E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16178E-1	-7.97606E-1	-9.13155E0	-9.14204E0	5.38826E-3	9.30548E-2	2.7298E1	-3.2649E1	-3.26278E1	2.6834E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16464E-1	-7.97892E-1	-9.13155E0	-9.14204E0	5.03063E-3	9.34124E-2	2.72971E1	-3.26523E1	-3.26425E1	2.67499E1	1.73605E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9985E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16417E-1	-7.98035E-1	-9.13138E0	-9.14209E0	5.26905E-3	9.35078E-2	2.73201E1	-3.26573E1	-3.26188E1	2.67866E1	1.73605E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99577E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16226E-1	-7.98202E-1	-9.13174E0	-9.14211E0	4.88758E-3	9.30786E-2	2.73069E1	-3.26146E1	-3.26627E1	2.68142E1	1.7368E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16154E-1	-7.98345E-1	-9.13146E0	-9.14185E0	5.126E-3	9.34362E-2	2.72833E1	-3.26655E1	-3.26278E1	2.68208E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.98661E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16274E-1	-7.97939E-1	-9.13098E0	-9.14209E0	5.43594E-3	9.32693E-2	2.73393E1	-3.26621E1	-3.26314E1	2.68124E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16131E-1	-7.97701E-1	-9.13126E0	-9.1419E0	5.19753E-3	9.31978E-2	2.73219E1	-3.26392E1	-3.26416E1	2.67956E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16345E-1	-7.9751E-1	-9.13103E0	-9.14195E0	4.93526E-3	9.3174E-2	2.72714E1	-3.26689E1	-3.26187E1	2.68178E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16011E-1	-7.97772E-1	-9.13093E0	-9.14199E0	4.64916E-3	9.31263E-2	2.7298E1	-3.26319E1	-3.26508E1	2.67836E1	1.7368E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16274E-1	-7.97796E-1	-9.13112E0	-9.1418E0	5.07832E-3	9.33647E-2	2.74847E1	-3.28099E1	-3.25725E1	2.67671E1	1.73755E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.15725E-1	-7.98154E-1	-9.13122E0	-9.14207E0	5.126E-3	9.33409E-2	2.73352E1	-3.26521E1	-3.26747E1	2.68142E1	1.73753E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16226E-1	-7.97391E-1	-9.13129E0	-9.14204E0	4.95911E-3	9.37462E-2	2.73213E1	-3.26639E1	-3.2638E1	2.678E1	1.73457E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9985E-1