[Scan]
initial_time=2016-02-16T02:40:22
final_time=2016-02-16T02:40:41
ip_count=19
run=1030
dataset=6
scan=489
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08713E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=5.78904E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.44749E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.58066E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.85313E-10
mult1=-9.78855E-9
mult2=-2.84636E-9
rf_tmon=-4.12189E-3
rf_agc=3.39224E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.58713E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20283E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.08469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=2.17594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.57968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.58677E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.89152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=1.89187E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=1.29056E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.30886E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.40333E-10
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2617E1
iondef2_imon=1.59374E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98605E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.6397E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=2.01876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.97987E-1
os_ea2_imon=-3.71445E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6414E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.32632E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.3066E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.85412E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.41864E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.5234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.85649E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.80602E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.5717E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.31081E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50322E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=1.00858E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66879E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50454E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22553E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.97815E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.89635E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=187
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16774E-1	-7.97749E-1	-9.13155E0	-9.14166E0	5.19753E-3	9.31978E-2	2.73231E1	-3.2635E1	-3.2632E1	2.67848E1	1.73605E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.97294E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16631E-1	-7.9782E-1	-9.13174E0	-9.14207E0	5.65052E-3	9.31263E-2	2.73124E1	-3.26493E1	-3.26621E1	2.68244E1	1.73753E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16727E-1	-7.98154E-1	-9.13179E0	-9.14204E0	5.17368E-3	9.29832E-2	2.72761E1	-3.26446E1	-3.26283E1	2.67752E1	1.73605E-7	2.51581E-3	2.51581E-3	6.34661E-3	1.97818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16798E-1	-7.97892E-1	-9.13174E0	-9.14195E0	5.03063E-3	9.33886E-2	2.73261E1	-3.26711E1	-3.25978E1	2.6792E1	1.73605E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16798E-1	-7.97987E-1	-9.13165E0	-9.14202E0	5.00679E-3	9.3174E-2	2.73464E1	-3.26844E1	-3.26301E1	2.68192E1	1.73679E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16703E-1	-7.97343E-1	-9.13184E0	-9.14187E0	5.24521E-3	9.31025E-2	2.73547E1	-3.26401E1	-3.26193E1	2.67986E1	1.73605E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16464E-1	-7.98225E-1	-9.13191E0	-9.14156E0	5.36442E-3	9.29594E-2	2.73134E1	-3.26585E1	-3.26225E1	2.67794E1	1.73755E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16226E-1	-7.97963E-1	-9.13198E0	-9.14199E0	5.05447E-3	9.27448E-2	2.73057E1	-3.26248E1	-3.25984E1	2.68124E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16107E-1	-7.97844E-1	-9.1316E0	-9.1418E0	5.36442E-3	9.29594E-2	2.73193E1	-3.26738E1	-3.26467E1	2.68004E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16393E-1	-7.9844E-1	-9.13162E0	-9.14209E0	5.34058E-3	9.27448E-2	2.72985E1	-3.26633E1	-3.26218E1	2.68046E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16226E-1	-7.98702E-1	-9.13177E0	-9.14204E0	5.10216E-3	9.29117E-2	2.73075E1	-3.2678E1	-3.26603E1	2.68526E1	1.7368E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16607E-1	-7.98583E-1	-9.13174E0	-9.14183E0	5.53131E-3	9.32217E-2	2.72991E1	-3.26615E1	-3.26386E1	2.67553E1	1.73605E-7	2.50914E-3	2.50914E-3	6.30182E-3	1.98696E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16536E-1	-7.98082E-1	-9.13181E0	-9.14161E0	5.53131E-3	9.2721E-2	2.7275E1	-3.26726E1	-3.26555E1	2.68148E1	1.73605E-7	2.51096E-3	2.51096E-3	6.28592E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16607E-1	-7.97844E-1	-9.13179E0	-9.14176E0	5.38826E-3	9.30786E-2	2.72648E1	-3.26597E1	-3.2644E1	2.67788E1	1.7368E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16369E-1	-7.97844E-1	-9.13134E0	-9.14161E0	5.36442E-3	9.31501E-2	2.72883E1	-3.26633E1	-3.26278E1	2.68148E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16464E-1	-7.97987E-1	-9.13162E0	-9.14211E0	5.4121E-3	9.32455E-2	2.73375E1	-3.26224E1	-3.26627E1	2.67595E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16536E-1	-7.97844E-1	-9.13167E0	-9.14202E0	5.31673E-3	9.32455E-2	2.73092E1	-3.26136E1	-3.26325E1	2.67879E1	1.73755E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16488E-1	-7.98178E-1	-9.13124E0	-9.14202E0	5.26905E-3	9.30548E-2	2.73204E1	-3.27581E1	-3.27062E1	2.68106E1	1.73605E-7	2.51393E-3	2.51393E-3	6.31798E-3	1.97731E-1
2.2E1	0.0E0	1.0E0	8.89E2	6.17E2	-2.09526E0	-8.15892E-1	-7.98035E-1	-9.13155E0	-9.14192E0	5.24521E-3	9.32932E-2	2.73213E1	-3.26428E1	-3.2629E1	2.68146E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.97045E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16369E-1	-7.98273E-1	-9.13131E0	-9.14197E0	5.24521E-3	9.29832E-2	2.73183E1	-3.2617E1	-3.2638E1	2.67818E1	1.73679E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.97815E-1