[Scan]
initial_time=2016-02-16T02:41:15
final_time=2016-02-16T02:41:34
ip_count=19
run=1030
dataset=6
scan=491
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=5.89108E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=2.69496E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.79949E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.1645E-10
mult1=-9.70427E-9
mult2=-2.7745E-9
rf_tmon=-4.74675E-3
rf_agc=3.27688E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=3.63457E-10
bslens_vset=-6.2E0
bslens_vmon=-6.75266E0
bslens_imon=2.89104E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.05694E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=2.22136E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37136E0
lens1_imon=2.51973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=3.00216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.61501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=3.0209E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.73983E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11634E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.28191E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.28868E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.85918E-10
tplens_vset=1.4E-1
tplens_vmon=1.57294E0
tplens_imon=5.03345E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=2.03102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.37304E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00882E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.21444E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63186E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.86413E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.30155E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.13843E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.86175E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.00713E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.92931E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=8.21195E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93764E3
defgrida_imon=6.78078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.14291E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=4.92038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3951E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66531E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.00961E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62288E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66905E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77265E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-1.99923E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22456E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.11549E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16488E-1	-7.98154E-1	-9.13193E0	-9.14161E0	5.29289E-3	9.30548E-2	2.73729E1	-3.26283E1	-3.2644E1	2.68001E1	1.73605E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.00363E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16512E-1	-7.97582E-1	-9.13174E0	-9.14199E0	5.17368E-3	9.32455E-2	2.72837E1	-3.26976E1	-3.25942E1	2.67814E1	1.73605E-7	2.52384E-3	2.52384E-3	6.28592E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16607E-1	-7.97534E-1	-9.13186E0	-9.14187E0	5.4121E-3	9.33409E-2	2.72974E1	-3.26767E1	-3.26472E1	2.67827E1	1.73681E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16417E-1	-7.98106E-1	-9.13148E0	-9.14202E0	5.19753E-3	9.33886E-2	2.73021E1	-3.26891E1	-3.26344E1	2.68124E1	1.73605E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16369E-1	-7.97677E-1	-9.1316E0	-9.14211E0	5.31673E-3	9.30786E-2	2.73045E1	-3.26476E1	-3.26549E1	2.67818E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16607E-1	-7.97868E-1	-9.13143E0	-9.14195E0	5.17368E-3	9.31025E-2	2.72967E1	-3.26771E1	-3.26296E1	2.67938E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9911E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16941E-1	-7.97939E-1	-9.13146E0	-9.14164E0	5.29289E-3	9.31263E-2	2.72833E1	-3.26649E1	-3.26478E1	2.68028E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16464E-1	-7.98273E-1	-9.1316E0	-9.14171E0	5.05447E-3	9.31978E-2	2.72997E1	-3.26939E1	-3.26032E1	2.67884E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16321E-1	-7.98011E-1	-9.13143E0	-9.14176E0	5.14984E-3	9.30786E-2	2.731E1	-3.26585E1	-3.26689E1	2.67848E1	1.73454E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16536E-1	-7.98225E-1	-9.13143E0	-9.14183E0	4.91142E-3	9.32217E-2	2.72862E1	-3.26826E1	-3.26284E1	2.67914E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16512E-1	-7.98082E-1	-9.13165E0	-9.1418E0	5.31673E-3	9.36508E-2	2.72588E1	-3.26711E1	-3.26248E1	2.67686E1	1.73529E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.1625E-1	-7.98368E-1	-9.13162E0	-9.1419E0	5.29289E-3	9.33886E-2	2.72925E1	-3.26218E1	-3.26524E1	2.68046E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98075E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16417E-1	-7.98011E-1	-9.13146E0	-9.1419E0	5.29289E-3	9.3174E-2	2.72903E1	-3.27428E1	-3.26077E1	2.68082E1	1.73383E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00192E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16417E-1	-7.97796E-1	-9.1316E0	-9.14204E0	5.126E-3	9.28879E-2	2.73033E1	-3.2664E1	-3.26156E1	2.67845E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9883E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.16393E-1	-7.97915E-1	-9.13155E0	-9.14183E0	5.53131E-3	9.3174E-2	2.73051E1	-3.26639E1	-3.25737E1	2.6836E1	1.73605E-7	2.51611E-3	2.51611E-3	6.3245E-3	1.98625E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16202E-1	-7.97844E-1	-9.13157E0	-9.14214E0	5.14984E-3	9.32455E-2	2.73051E1	-3.26747E1	-3.2629E1	2.67776E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00021E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16226E-1	-7.97868E-1	-9.13143E0	-9.14216E0	5.26905E-3	9.34601E-2	2.73493E1	-3.26762E1	-3.26154E1	2.68233E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16464E-1	-7.98059E-1	-9.13119E0	-9.1419E0	5.126E-3	9.34601E-2	2.72486E1	-3.25263E1	-3.25918E1	2.68058E1	1.73379E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16488E-1	-7.97915E-1	-9.13131E0	-9.14207E0	5.22137E-3	9.32455E-2	2.73269E1	-3.26408E1	-3.26413E1	2.6831E1	1.73605E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16035E-1	-7.97749E-1	-9.1315E0	-9.14183E0	4.88758E-3	9.32932E-2	2.72925E1	-3.26723E1	-3.26092E1	2.67944E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1