[Scan]
initial_time=2016-02-16T02:42:08
final_time=2016-02-16T02:42:28
ip_count=19
run=1030
dataset=6
scan=493
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=5.87881E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.94137E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=5.10108E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.848E-10
mult1=-1.07398E-8
mult2=-2.63478E-9
rf_tmon=-4.07382E-3
rf_agc=3.46073E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.7564E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.7901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=2.01804E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.07208E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.18026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.58761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.02955E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=3.72028E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=1.91422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.10668E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.24658E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.26417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=6.61135E-10
tplens_vset=1.4E-1
tplens_vmon=1.60779E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.52056E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.49641E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30677E0
ionrepsh_imon=2.02345E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.14668E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61337E-1
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62939E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10475E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6781E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.86938E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.61295E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=2.19145E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.84928E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.53925E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33937E1
os_fil1_imon=4.4819E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44316E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=1.00913E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54192E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22367E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83629E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15964E-1	-7.97391E-1	-9.13181E0	-9.14204E0	5.48363E-3	9.35078E-2	2.73104E1	-3.26579E1	-3.26419E1	2.67908E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9951E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.15725E-1	-7.97772E-1	-9.13184E0	-9.14211E0	4.8399E-3	9.33886E-2	2.72727E1	-3.26713E1	-3.26395E1	2.6771E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1594E-1	-7.9813E-1	-9.13157E0	-9.14202E0	5.05447E-3	9.33647E-2	2.73576E1	-3.26077E1	-3.27015E1	2.68632E1	1.73605E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.1625E-1	-7.97725E-1	-9.1315E0	-9.1419E0	5.22137E-3	9.3317E-2	2.73181E1	-3.26938E1	-3.25888E1	2.67601E1	1.73716E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16059E-1	-7.97868E-1	-9.13146E0	-9.14214E0	5.10216E-3	9.32932E-2	2.72909E1	-3.26166E1	-3.26496E1	2.67836E1					
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16154E-1	-7.98011E-1	-9.13184E0	-9.14178E0	5.38826E-3	9.30786E-2	2.72727E1	-3.26685E1	-3.26579E1	2.68041E1	1.7368E-7	2.50898E-3	2.50898E-3	6.32936E-3	1.97559E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16441E-1	-7.98273E-1	-9.13167E0	-9.14178E0	5.03063E-3	9.35555E-2	2.7359E1	-3.26291E1	-3.26015E1	2.67938E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9731E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16035E-1	-7.98225E-1	-9.13186E0	-9.14221E0	5.03063E-3	9.3317E-2	2.72582E1	-3.26873E1	-3.259E1	2.68172E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.97559E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16107E-1	-7.97915E-1	-9.1316E0	-9.1418E0	4.79221E-3	9.33409E-2	2.73057E1	-3.26779E1	-3.26266E1	2.68052E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97388E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16369E-1	-7.9782E-1	-9.13205E0	-9.14171E0	5.126E-3	9.32932E-2	2.73069E1	-3.26542E1	-3.26884E1	2.68346E1	1.73605E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.9951E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16107E-1	-7.98273E-1	-9.13174E0	-9.14171E0	4.98295E-3	9.34601E-2	2.73004E1	-3.26284E1	-3.26413E1	2.67577E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.99048E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.1625E-1	-7.97987E-1	-9.13177E0	-9.14185E0	5.00679E-3	9.30071E-2	2.72494E1	-3.26542E1	-3.26211E1	2.67889E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1594E-1	-7.97558E-1	-9.13172E0	-9.14197E0	4.79221E-3	9.35316E-2	2.72444E1	-3.26266E1	-3.26549E1	2.67716E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.97731E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1594E-1	-7.98082E-1	-9.13169E0	-9.14192E0	5.29289E-3	9.34601E-2	2.72781E1	-3.26609E1	-3.26362E1	2.68118E1	1.73379E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.97731E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.15868E-1	-7.97963E-1	-9.13193E0	-9.14204E0	4.76837E-3	9.34839E-2	2.73333E1	-3.26837E1	-3.26164E1	2.68106E1	1.73153E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.15892E-1	-7.9813E-1	-9.13191E0	-9.14192E0	5.00679E-3	9.32693E-2	2.73093E1	-3.26801E1	-3.26044E1	2.67677E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.97903E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15916E-1	-7.97892E-1	-9.13177E0	-9.14202E0	5.17368E-3	9.32932E-2	2.73517E1	-3.26644E1	-3.26154E1	2.67794E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16107E-1	-7.98202E-1	-9.13174E0	-9.14187E0	4.74453E-3	9.27925E-2	2.73351E1	-3.25828E1	-3.24668E1	2.68082E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16131E-1	-7.98297E-1	-9.13174E0	-9.14195E0	5.07832E-3	9.30309E-2	2.72933E1	-3.26561E1	-3.26484E1	2.68136E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98491E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16345E-1	-7.98035E-1	-9.13167E0	-9.14204E0	5.126E-3	9.31263E-2	2.73123E1	-3.26633E1	-3.26386E1	2.6781E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9883E-1