[Scan]
initial_time=2016-02-16T02:43:28
final_time=2016-02-16T02:43:48
ip_count=19
run=1030
dataset=6
scan=496
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=5.70357E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=2.85137E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=4.93205E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=5.19872E-10
mult1=-1.01377E-8
mult2=-2.76057E-9
rf_tmon=-4.10534E-3
rf_agc=3.4216E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.80063E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=2.0074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.06956E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04689E2
lens23_imon=1.02496E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04569E1
cs_ea1_imon=2.17799E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45515E0
lens1_imon=2.83703E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03413E1
cs_ea2_imon=1.58196E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.67141E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=2.8753E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1609E1
os_ea1_imon=1.89732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.10055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17482E0
cs_ionrep_imon=1.25846E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.9371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.94358E-10
tplens_vset=1.4E-1
tplens_vmon=1.59306E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26731E1
iondef2_imon=1.59612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98583E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.60096E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=2.02651E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.44546E-1
os_ea2_imon=-4.19227E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00863E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58674E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30751E-1
os_ef2bup_imon=-5.03416E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.88647E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.29074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73088E1
iondef1_imon=1.11122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67331E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.85438E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=2.33138E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.48781E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.30211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.33562E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=6.51801E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=5.2147E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=1.00936E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.19745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76098E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22438E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.9568E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.91437E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16035E-1	-7.97915E-1	-9.13153E0	-9.14178E0	5.03063E-3	9.30548E-2	2.73141E1	-3.26326E1	-3.26032E1	2.68184E1	1.73383E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9883E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16083E-1	-7.98154E-1	-9.13155E0	-9.14178E0	5.62668E-3	9.30548E-2	2.734E1	-3.26572E1	-3.26113E1	2.67541E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.96361E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15845E-1	-7.97939E-1	-9.13141E0	-9.14202E0	5.45979E-3	9.3174E-2	2.72958E1	-3.26324E1	-3.26463E1	2.67821E1	1.73605E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.97294E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.15892E-1	-7.98106E-1	-9.13181E0	-9.14204E0	6.05583E-3	9.31501E-2	2.72955E1	-3.27143E1	-3.25954E1	2.67986E1	1.73459E-7	2.51287E-3	2.51287E-3	6.3074E-3	1.96904E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16178E-1	-7.98059E-1	-9.13167E0	-9.14207E0	5.38826E-3	9.32217E-2	2.73171E1	-3.26687E1	-3.26482E1	2.6783E1	1.73529E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.97731E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16274E-1	-7.97844E-1	-9.13143E0	-9.14195E0	5.43594E-3	9.34362E-2	2.73045E1	-3.26482E1	-3.26308E1	2.67872E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97388E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.15845E-1	-7.97582E-1	-9.13141E0	-9.14221E0	5.36442E-3	9.34601E-2	2.72961E1	-3.26891E1	-3.26026E1	2.68292E1	1.73454E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.97388E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.16202E-1	-7.98106E-1	-9.13167E0	-9.1419E0	5.65052E-3	9.31263E-2	2.73045E1	-3.26494E1	-3.25852E1	2.6804E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.15797E-1	-7.9844E-1	-9.13141E0	-9.14197E0	5.29289E-3	9.3317E-2	2.73086E1	-3.26372E1	-3.26242E1	2.67986E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1594E-1	-7.9844E-1	-9.13148E0	-9.14216E0	5.26905E-3	9.2864E-2	2.72817E1	-3.26825E1	-3.2635E1	2.67659E1	1.73457E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16536E-1	-7.98464E-1	-9.13136E0	-9.14211E0	5.05447E-3	9.34362E-2	2.73163E1	-3.26272E1	-3.26284E1	2.67968E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16488E-1	-7.98321E-1	-9.13122E0	-9.14211E0	5.126E-3	9.31978E-2	2.73177E1	-3.26482E1	-3.26242E1	2.68136E1	1.73383E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.98491E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16345E-1	-7.97701E-1	-9.13131E0	-9.14223E0	5.126E-3	9.3174E-2	2.73141E1	-3.26609E1	-3.26675E1	2.68232E1	1.73303E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16059E-1	-7.98082E-1	-9.13126E0	-9.14202E0	5.07832E-3	9.32217E-2	2.73243E1	-3.26422E1	-3.2644E1	2.6801E1	1.73454E-7	2.50898E-3	2.50898E-3	6.31288E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16488E-1	-7.97963E-1	-9.13153E0	-9.14216E0	5.4121E-3	9.30071E-2	2.73496E1	-3.26452E1	-3.26182E1	2.68082E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98764E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16393E-1	-7.97915E-1	-9.13138E0	-9.14226E0	5.38826E-3	9.34362E-2	2.73153E1	-3.26795E1	-3.26488E1	2.6789E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16488E-1	-7.97939E-1	-9.13181E0	-9.14176E0	5.53131E-3	9.32932E-2	2.73195E1	-3.27197E1	-3.2629E1	2.67926E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16369E-1	-7.97939E-1	-9.13162E0	-9.14209E0	5.24521E-3	9.32693E-2	2.74585E1	-3.28331E1	-3.25381E1	2.67856E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.1594E-1	-7.97772E-1	-9.13146E0	-9.14228E0	4.95911E-3	9.36508E-2	2.73075E1	-3.26815E1	-3.26296E1	2.68052E1	1.73457E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.96638E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15773E-1	-7.97749E-1	-9.13153E0	-9.14207E0	5.60284E-3	9.32217E-2	2.73088E1	-3.26731E1	-3.26621E1	2.67331E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9568E-1