[Scan]
initial_time=2016-02-16T02:44:32
final_time=2016-02-16T02:44:52
ip_count=19
run=1030
dataset=7
scan=498
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.84924E-6
ql1_vset=
ql1_vmon=-8.79984E1
ql1_imon=-1.72317E-9
ql2_vset=
ql2_vmon=5.72205E-4
ql2_imon=4.47011E-10
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-4.96598E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.07818E-9
mult1=-1.03003E-8
mult2=-2.849E-9
rf_tmon=-5.02806E-3
rf_agc=3.19298E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.91822E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.68837E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19588E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.0746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05737E1
cs_ea1_imon=2.20277E-5
lens1_vset=-2.7E0
lens1_vmon=-2.87787E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04811E1
cs_ea2_imon=1.58125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=4.2938E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14627E1
os_ea1_imon=1.90652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.51106E0
cs_ionrep_imon=1.29385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91835E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.28687E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=8.10158E-10
tplens_vset=1.4E-1
tplens_vmon=1.59424E0
tplens_imon=-2.63527E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26654E1
iondef2_imon=1.59576E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.42374E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=2.00881E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.99407E-1
os_ea2_imon=-1.85626E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70843E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.08822E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=2.88071E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.36051E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.28389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73005E1
iondef1_imon=1.07122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68476E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.92198E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.82149E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=8.07889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.15157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61816E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=4.96243E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66164E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.01064E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.25151E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75592E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.96243E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3362E4	1.7E1	1.47E2	4.1E1	-7.43285E-2	-8.79981E1	3.33786E-4	-8.80013E1	4.29153E-4	5.53131E-3	9.32693E-2	2.73165E1	-3.26609E1	-3.26416E1	2.68004E1	1.73454E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.00499E-1
2.0E0	5.734E3	5.0E0	3.16E2	1.6E2	-7.43285E-2	-8.79979E1	4.76837E-4	-8.80013E1	4.29153E-4	5.10216E-3	9.34124E-2	2.73314E1	-3.26658E1	-3.26285E1	2.67788E1	1.73379E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00673E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.79978E1	4.76837E-4	-8.80014E1	2.38419E-4	5.29289E-3	9.32693E-2	2.73341E1	-3.26527E1	-3.26301E1	2.67769E1	1.73374E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.79979E1	3.09944E-4	-8.80011E1	2.38419E-4	5.126E-3	9.33886E-2	2.73033E1	-3.26434E1	-3.26152E1	2.67824E1	1.73459E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.79978E1	2.38419E-4	-8.80013E1	2.38419E-4	5.24521E-3	9.32455E-2	2.72985E1	-3.26651E1	-3.2605E1	2.67962E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98419E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.79977E1	1.43051E-4	-8.80015E1	9.53674E-5	5.53131E-3	9.34362E-2	2.72889E1	-3.26603E1	-3.25966E1	2.68022E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.79977E1	3.09944E-4	-8.80012E1	4.05312E-4	5.19753E-3	9.33409E-2	2.72671E1	-3.26462E1	-3.26493E1	2.67992E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.79979E1	1.43051E-4	-8.80012E1	2.38419E-4	5.45979E-3	9.31978E-2	2.73293E1	-3.26797E1	-3.26602E1	2.68106E1	1.73528E-7	2.51025E-3	2.51025E-3	6.31299E-3	1.99754E-1
1.2E1	3.38E2	1.0E0	4.85E2	3.23E2	-7.19325E-2	-8.79979E1	1.19209E-4	-8.80012E1	3.57628E-4	5.34058E-3	9.31978E-2	2.73351E1	-3.26849E1	-3.26176E1	2.68448E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.79978E1	2.6226E-4	-8.8001E1	3.09944E-4	5.48363E-3	9.34601E-2	2.72931E1	-3.26308E1	-3.26434E1	2.67992E1	1.73454E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9963E-1
1.4E1	7.36E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.79982E1	5.24521E-4	-8.80014E1	4.29153E-4	5.48363E-3	9.3174E-2	2.73222E1	-3.26514E1	-3.26478E1	2.67908E1	1.73567E-7	2.51647E-3	2.51647E-3	6.32099E-3	1.99913E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.79983E1	3.09944E-4	-8.80014E1	4.52995E-4	5.53131E-3	9.32693E-2	2.73129E1	-3.27095E1	-3.26506E1	2.67782E1					
1.6E1	3.131E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.79981E1	4.05312E-4	-8.80011E1	3.8147E-4	5.26905E-3	9.32693E-2	2.73173E1	-3.26358E1	-3.26138E1	2.66676E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
1.7E1	3.8504E4	2.1E1	6.87E2	4.7E2	-7.27053E-2	-8.79981E1	2.6226E-4	-8.80011E1	2.6226E-4	5.48363E-3	9.32932E-2	2.72774E1	-3.26649E1	-3.26325E1	2.6825E1	1.73451E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.99577E-1
1.8E1	1.70961E5	1.0E2	7.27E2	5.0E2	-7.17779E-2	-8.79982E1	2.6226E-4	-8.80014E1	2.86102E-4	5.34058E-3	9.32217E-2	2.73135E1	-3.26639E1	-3.26524E1	2.67926E1	1.73383E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9883E-1
1.9E1	2.3E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.79984E1	1.19209E-4	-8.80013E1	4.29153E-4	5.19753E-3	9.33886E-2	2.72787E1	-3.26464E1	-3.26188E1	2.68184E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.99283E-1
2.0E1	3.16E2	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.79983E1	5.24521E-4	-8.80009E1	5.48363E-4	5.29289E-3	9.35316E-2	2.73003E1	-3.26693E1	-3.26603E1	2.67646E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.79984E1	3.33786E-4	-8.80011E1	4.76837E-5	5.14984E-3	9.33886E-2	2.73057E1	-3.26195E1	-3.26154E1	2.68165E1	1.73529E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98592E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.79986E1	5.48363E-4	-8.80009E1	3.33786E-4	5.57899E-3	9.32455E-2	2.7263E1	-3.26434E1	-3.26392E1	2.67812E1	1.73383E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9883E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.79984E1	5.72205E-4	-8.80009E1	2.6226E-4	5.50747E-3	9.31501E-2	2.73005E1	-3.26654E1	-3.26225E1	2.68476E1	1.73457E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98661E-1