[Scan]
initial_time=2016-02-16T02:45:25
final_time=2016-02-16T02:45:45
ip_count=19
run=1030
dataset=7
scan=500
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.8044E-6
ql1_vset=
ql1_vmon=-8.79987E1
ql1_imon=-1.11007E-9
ql2_vset=
ql2_vmon=1.66893E-4
ql2_imon=4.13179E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-3.45365E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=9.67896E-10
mult1=-1.05503E-8
mult2=-2.85803E-9
rf_tmon=-4.29405E-3
rf_agc=3.3429E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=4.48143E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.87242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20149E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54277E1
cs_ef1b_imon=3.07821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04351E1
cs_ea1_imon=2.1787E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03832E0
lens1_imon=1.65841E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6393E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04221E1
cs_ea2_imon=1.54975E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84827E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=4.14264E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10739E1
os_restr1_imon=2.86809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14657E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63966E1
os_ef1bup_imon=3.10956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.29668E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01503E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.31814E-10
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-4.97094E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.54409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26872E1
iondef2_imon=1.5855E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.10903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32112E0
ionrepsh_imon=1.99925E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.22047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.1456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71092E-1
os_ea2_imon=-8.43956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.25911E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10547E1
os_restr2_imon=2.89729E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23126E2
cs_ionfoca_imon=6.32547E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.29218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7307E1
iondef1_imon=1.14449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.11657E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.94575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=4.32467E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-2.30235E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47641E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.38871E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-5.97678E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-3.88648E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.71787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93755E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.61004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=5.28078E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66585E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.0096E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66818E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28667E-3
inlet_lpb_pmon=1.99447E-1
chamber_ion_pmon=1.73747E-7
chamber_cvt_pmon=2.51265E-3
foreline_cvt_pmon=2.51265E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.58091E-1
res40_imon=-2.85737E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3621E4	1.3E1	1.47E2	4.1E1	-7.24736E-2	-8.79988E1	3.33786E-4	-8.80009E1	3.33786E-4	5.36442E-3	9.37462E-2	2.72933E1	-3.26484E1	-3.26496E1	2.67375E1	1.73457E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.99E-1
2.0E0	5.809E3	3.0E0	3.16E2	1.6E2	-7.15461E-2	-8.79987E1	6.19888E-4	-8.8001E1	2.86102E-4	5.24521E-3	9.34839E-2	2.72769E1	-3.26603E1	-3.26199E1	2.67708E1	1.73457E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.7999E1	2.6226E-4	-8.80007E1	7.15256E-5	5.45979E-3	9.34601E-2	2.73004E1	-3.26585E1	-3.2652E1	2.68227E1	1.73528E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00996E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.79988E1	7.39098E-4	-8.80008E1	5.48363E-4	5.34058E-3	9.34124E-2	2.72898E1	-3.27045E1	-3.25841E1	2.67986E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79988E1	6.19888E-4	-8.80011E1	4.29153E-4	5.22137E-3	9.33647E-2	2.72953E1	-3.26872E1	-3.26291E1	2.68208E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.79986E1	5.00679E-4	-8.80011E1	3.09944E-4	5.53131E-3	9.35793E-2	2.73623E1	-3.26602E1	-3.25883E1	2.68172E1	1.73605E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99754E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.79988E1	6.91414E-4	-8.8001E1	5.00679E-4	5.05447E-3	9.33886E-2	2.73201E1	-3.26392E1	-3.26567E1	2.6825E1	1.73605E-7	2.5208E-3	2.5208E-3	6.31012E-3	1.99999E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.79989E1	2.86102E-4	-8.80011E1	3.33786E-4	5.05447E-3	9.33647E-2	2.726E1	-3.27047E1	-3.25455E1	2.6828E1					
1.2E1	3.36E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79988E1	1.90735E-4	-8.80011E1	2.86102E-4	5.50747E-3	9.34601E-2	2.72561E1	-3.26725E1	-3.26352E1	2.67986E1	1.73529E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99977E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.7999E1	7.15256E-5	-8.80012E1	4.76837E-4	5.07832E-3	9.33886E-2	2.72943E1	-3.26398E1	-3.26266E1	2.68136E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00151E-1
1.4E1	6.81E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.7999E1	2.38419E-4	-8.80011E1	5.00679E-4	5.03063E-3	9.33886E-2	2.73015E1	-3.26801E1	-3.26026E1	2.67932E1	1.73529E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00151E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.79989E1	1.43051E-4	-8.80012E1	5.72205E-4	5.14984E-3	9.34839E-2	2.72988E1	-3.2675E1	-3.26123E1	2.68177E1	1.73529E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.00151E-1
1.6E1	3.172E3	3.0E0	6.47E2	4.41E2	-7.14689E-2	-8.79989E1	1.19209E-4	-8.80011E1	5.24521E-4	5.17368E-3	9.30071E-2	2.73276E1	-3.2679E1	-3.26316E1	2.66882E1	1.73605E-7	2.52301E-3	2.52301E-3	6.3126E-3	2.00105E-1
1.7E1	3.8758E4	2.5E1	6.87E2	4.7E2	-7.15461E-2	-8.79991E1	2.14577E-4	-8.80008E1	4.05312E-4	5.38826E-3	9.35555E-2	2.73159E1	-3.26819E1	-3.2629E1	2.68112E1	1.73605E-7	2.51411E-3	2.51411E-3	6.34231E-3	2.01125E-1
1.8E1	1.7223E5	8.9E1	7.27E2	5.0E2	-7.286E-2	-8.79991E1	7.15256E-5	-8.8001E1	5.24521E-4	5.29289E-3	9.3317E-2	2.73165E1	-3.26693E1	-3.26506E1	2.6768E1	1.73529E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.00151E-1
1.9E1	2.344E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.79992E1	3.8147E-4	-8.80011E1	4.05312E-4	5.38826E-3	9.33886E-2	2.73183E1	-3.26693E1	-3.25978E1	2.67998E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99803E-1
2.0E1	3.52E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.79991E1	2.38419E-5	-8.80009E1	3.57628E-4	5.60284E-3	9.3317E-2	2.72799E1	-3.26573E1	-3.26567E1	2.68076E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99456E-1
2.1E1	1.0E0	1.0E0	8.49E2	5.88E2	-7.201E-2	-8.79991E1	1.66893E-4	-8.80005E1	5.48363E-4	5.38826E-3	9.33886E-2	2.72974E1	-3.26042E1	-3.26514E1	2.67788E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9968E-1
2.2E1	5.8E1	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.79993E1	0.0E0	-8.80008E1	1.90735E-4	5.31673E-3	9.32932E-2	2.72744E1	-3.26596E1	-3.26493E1	2.67989E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.00673E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.79987E1	1.66893E-4	-8.80005E1	5.48363E-4	5.26905E-3	9.35316E-2	2.7307E1	-3.26872E1	-3.26372E1	2.67956E1	1.73747E-7	2.51265E-3	2.51265E-3	6.28667E-3	1.99447E-1