[Scan]
initial_time=2016-02-16T02:45:52
final_time=2016-02-16T02:46:12
ip_count=19
run=1030
dataset=7
scan=501
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.74335E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-1.05461E-9
ql2_vset=
ql2_vmon=4.52995E-4
ql2_imon=3.81982E-10
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.25044E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.86011E-10
mult1=-1.0185E-8
mult2=-2.95843E-9
rf_tmon=-3.48305E-3
rf_agc=3.42883E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.01735E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.0532E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52733E1
cs_ef1b_imon=3.06451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=2.18897E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02829E0
lens1_imon=1.4425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.55647E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.86035E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=1.8959E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64218E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.2666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=3.25408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.75611E-10
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.16601E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.85839E-1
os_ea2_imon=-3.51978E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00754E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70771E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65222E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.84791E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.33432E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.28425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72856E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.87507E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.09432E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.46999E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=8.07346E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-8.42748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.67021E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.28253E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=4.6681E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66507E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=1.00881E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66357E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.80044E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80654E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.01047E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.50882E-3
foreline_cvt_pmon=2.50882E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.51193E-1
res40_imon=-2.12216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.383E4	1.1E1	1.47E2	4.1E1	-7.27828E-2	-8.7999E1	-2.38419E-5	-8.80007E1	3.57628E-4	5.43594E-3	9.30786E-2	2.73039E1	-3.26313E1	-3.26649E1	2.67624E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98419E-1
2.0E0	5.968E3	3.0E0	3.16E2	1.6E2	-7.25507E-2	-8.79993E1	1.66893E-4	-8.80007E1	3.8147E-4	5.48363E-3	9.32217E-2	2.73265E1	-3.26572E1	-3.26229E1	2.6797E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9968E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79993E1	-9.53674E-5	-8.80012E1	6.4373E-4	5.36442E-3	9.34124E-2	2.73069E1	-3.26649E1	-3.26372E1	2.67995E1	1.73605E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.00285E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.79994E1	-3.8147E-4	-8.80007E1	4.52995E-4	5.29289E-3	9.30071E-2	2.72821E1	-3.26773E1	-3.2685E1	2.67856E1	1.73459E-7	2.52342E-3	2.52342E-3	6.34982E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79992E1	-4.76837E-5	-8.80007E1	3.8147E-4	5.24521E-3	9.35078E-2	2.73027E1	-3.26585E1	-3.2653E1	2.6798E1	1.73457E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.79992E1	3.09944E-4	-8.80008E1	5.24521E-4	5.45979E-3	9.31263E-2	2.72986E1	-3.26832E1	-3.26012E1	2.67932E1	1.7368E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.79993E1	1.90735E-4	-8.80009E1	2.14577E-4	5.4121E-3	9.31263E-2	2.72632E1	-3.26071E1	-3.26101E1	2.67938E1	1.73605E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79992E1	-3.57628E-4	-8.80007E1	1.19209E-4	5.48363E-3	9.3174E-2	2.73124E1	-3.26976E1	-3.26027E1	2.68166E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00325E-1
1.2E1	3.26E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.79994E1	3.09944E-4	-8.80007E1	1.66893E-4	5.79357E-3	9.32693E-2	2.73496E1	-3.26741E1	-3.26056E1	2.67932E1	1.73379E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.01197E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79993E1	2.14577E-4	-8.80006E1	6.67572E-4	5.67436E-3	9.31501E-2	2.73087E1	-3.26795E1	-3.26404E1	2.67926E1	1.73528E-7	2.5225E-3	2.5225E-3	6.29624E-3	1.99754E-1
1.4E1	7.39E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79992E1	2.6226E-4	-8.80007E1	5.24521E-4	5.19753E-3	9.30786E-2	2.73255E1	-3.26681E1	-3.26164E1	2.68286E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99283E-1
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.7999E1	1.66893E-4	-8.80007E1	5.72205E-4	5.76973E-3	9.31025E-2	2.73351E1	-3.26603E1	-3.26038E1	2.68016E1	1.73379E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.98419E-1
1.6E1	3.159E3	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.79992E1	2.86102E-4	-8.8001E1	5.96046E-4	5.45979E-3	9.31501E-2	2.73159E1	-3.26314E1	-3.2644E1	2.68268E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98491E-1
1.7E1	3.9053E4	1.2E1	6.87E2	4.7E2	-7.35556E-2	-8.79993E1	1.66893E-4	-8.80009E1	3.57628E-4	5.05447E-3	9.31263E-2	2.73255E1	-3.26579E1	-3.26266E1	2.67902E1	1.73374E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.98872E-1
1.8E1	1.70784E5	1.03E2	7.27E2	5.0E2	-7.27828E-2	-8.79994E1	3.8147E-4	-8.8001E1	4.76837E-4	5.34058E-3	9.3174E-2	2.73039E1	-3.26785E1	-3.26543E1	2.67878E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9968E-1
1.9E1	2.311E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.79993E1	0.0E0	-8.80006E1	5.24521E-4	5.22137E-3	9.32693E-2	2.73255E1	-3.26458E1	-3.2644E1	2.68166E1	1.73454E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99456E-1
2.0E1	3.67E2	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.79991E1	-2.14577E-4	-8.80007E1	9.53674E-5	4.81606E-3	9.36031E-2	2.73424E1	-3.26783E1	-3.2602E1	2.68163E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98764E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.79995E1	3.09944E-4	-8.80011E1	4.76837E-4	5.26905E-3	9.34839E-2	2.73027E1	-3.26272E1	-3.25894E1	2.67842E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9883E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.79993E1	3.33786E-4	-8.8001E1	2.6226E-4	5.4121E-3	9.32932E-2	2.73417E1	-3.26573E1	-3.26567E1	2.67788E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.9911E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.79994E1	4.52995E-4	-8.80011E1	4.05312E-4	5.126E-3	9.30786E-2	2.72856E1	-3.26738E1	-3.26354E1	2.68028E1	1.73457E-7	2.50882E-3	2.50882E-3	6.29665E-3	2.01047E-1