[Scan]
initial_time=2016-02-16T02:46:45
final_time=2016-02-16T02:47:05
ip_count=19
run=1030
dataset=7
scan=503
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.77621E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-9.24695E-10
ql2_vset=
ql2_vmon=3.33786E-4
ql2_imon=3.63362E-10
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.71282E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=8.07071E-10
mult1=-8.68082E-9
mult2=-2.66671E-9
rf_tmon=-5.04716E-3
rf_agc=3.23482E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.45414E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68687E0
bslens_imon=2.86995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19645E1
lens5a_imon=1.97693E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12556E2
lens4a_imon=2.05522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=3.0919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04563E2
lens23_imon=1.02205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.053E1
cs_ea1_imon=2.20208E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9839E0
lens1_imon=1.342E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65059E1
os_ef1alow_imon=2.95675E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04443E1
cs_ea2_imon=1.61955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=3.05442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.58069E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=2.85476E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=1.86968E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.11064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28822E0
cs_ionrep_imon=1.29486E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93214E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.27282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.73191E-10
tplens_vset=1.4E-1
tplens_vmon=1.6347E0
tplens_imon=1.66645E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25834E1
iondef3_imon=1.48108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.60008E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.84414E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24965E0
ionrepsh_imon=2.05957E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34209E1
lens5b_imon=2.16462E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.18769E-1
os_ea2_imon=-2.8513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06169E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70729E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66243E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.00717E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23009E2
cs_ionfoca_imon=6.34666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.32281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72156E1
iondef1_imon=1.06824E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68012E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87712E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.19457E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07428E0
cs_ionaccel_imon=-1.67166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47086E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=8.02661E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-1.23198E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92707E3
multa_neg_imon=7.66318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93773E3
defgrida_imon=7.00572E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.99837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17679E0
defgridb_imon=6.0434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=5.62916E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.15484E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66461E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.00909E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61981E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51947E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86632E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3493E4	1.5E1	1.47E2	4.1E1	-7.286E-2	-8.79997E1	1.19209E-4	-8.80011E1	2.38419E-5	4.98295E-3	9.3174E-2	2.72845E1	-3.26502E1	-3.26107E1	2.68094E1	1.73529E-7	2.51007E-3	2.51007E-3	6.3074E-3	1.98075E-1
2.0E0	5.775E3	3.0E0	3.16E2	1.6E2	-7.23964E-2	-8.79997E1	-2.38419E-5	-8.8001E1	3.57628E-4	5.10216E-3	9.37462E-2	2.73137E1	-3.26909E1	-3.26401E1	2.67836E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.97815E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.79997E1	-1.66893E-4	-8.80008E1	2.38419E-4	5.29289E-3	9.3627E-2	2.73173E1	-3.26787E1	-3.26196E1	2.68016E1	1.73528E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79997E1	2.14577E-4	-8.80007E1	2.86102E-4	5.17368E-3	9.35793E-2	2.73273E1	-3.25942E1	-3.26482E1	2.68302E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.79994E1	-4.76837E-5	-8.8001E1	6.67572E-4	5.43594E-3	9.34124E-2	2.72937E1	-3.26921E1	-3.25942E1	2.67758E1	1.73531E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.79998E1	1.66893E-4	-8.80009E1	4.76837E-4	5.05447E-3	9.35555E-2	2.72582E1	-3.26482E1	-3.26615E1	2.6807E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.79999E1	1.66893E-4	-8.80013E1	1.90735E-4	5.10216E-3	9.34124E-2	2.72961E1	-3.26338E1	-3.26603E1	2.68148E1	1.73529E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79996E1	-2.38419E-5	-8.80014E1	6.67572E-4	5.14984E-3	9.32693E-2	2.72986E1	-3.26472E1	-3.26225E1	2.67848E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00325E-1
1.2E1	3.47E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.79995E1	2.86102E-4	-8.8001E1	9.29832E-4	4.74453E-3	9.32693E-2	2.72937E1	-3.26488E1	-3.26543E1	2.68244E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.79994E1	2.86102E-4	-8.80005E1	7.15256E-4	5.17368E-3	9.30786E-2	2.73297E1	-3.26464E1	-3.26801E1	2.681E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.97984E-1
1.4E1	7.35E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.79996E1	2.86102E-4	-8.80008E1	5.00679E-4	5.45979E-3	9.33409E-2	2.73153E1	-3.26446E1	-3.2632E1	2.68052E1	1.73529E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.98075E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.79992E1	3.8147E-4	-8.80007E1	5.24521E-4	5.29289E-3	9.32455E-2	2.73267E1	-3.26338E1	-3.2608E1	2.67674E1	1.73605E-7	2.50789E-3	2.50789E-3	6.3074E-3	1.97903E-1
1.6E1	3.195E3	3.0E0	6.47E2	4.41E2	-7.40192E-2	-8.79993E1	-1.90735E-4	-8.80007E1	4.52995E-4	5.05447E-3	9.3317E-2	2.73016E1	-3.2662E1	-3.26354E1	2.67794E1	1.73529E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.97388E-1
1.7E1	3.8948E4	2.5E1	6.87E2	4.7E2	-7.35556E-2	-8.79994E1	1.19209E-4	-8.80001E1	4.52995E-4	5.07832E-3	9.32693E-2	2.73009E1	-3.26615E1	-3.2632E1	2.6804E1	1.73379E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.98247E-1
1.8E1	1.72094E5	9.8E1	7.27E2	5.0E2	-7.30918E-2	-8.79995E1	2.6226E-4	-8.80007E1	4.76837E-4	5.57899E-3	9.31263E-2	2.72831E1	-3.26738E1	-3.26027E1	2.67818E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98592E-1
1.9E1	2.267E3	3.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79996E1	1.66893E-4	-8.80006E1	5.00679E-4	5.22137E-3	9.31025E-2	2.73069E1	-3.26603E1	-3.26404E1	2.68226E1	1.73529E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.99283E-1
2.0E1	3.88E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.79997E1	-7.15256E-5	-8.80006E1	4.05312E-4	5.72205E-3	9.33409E-2	2.72496E1	-3.25924E1	-3.26526E1	2.67758E1	1.73528E-7	2.51136E-3	2.51136E-3	6.3074E-3	1.99577E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.79998E1	-1.19209E-4	-8.80006E1	2.14577E-4	5.34058E-3	9.29832E-2	2.73117E1	-3.26885E1	-3.26056E1	2.67856E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00534E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80001E1	4.76837E-4	-8.80004E1	5.72205E-4	4.93526E-3	9.29594E-2	2.72757E1	-3.26837E1	-3.26428E1	2.67957E1	1.73457E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00876E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80001E1	3.33786E-4	-8.80009E1	7.15256E-4	5.03063E-3	9.32217E-2	2.72156E1	-3.26591E1	-3.25834E1	2.68012E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99456E-1