[Scan]
initial_time=2016-02-16T02:47:39
final_time=2016-02-16T02:47:58
ip_count=19
run=1030
dataset=7
scan=505
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.79235E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-8.49605E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=3.87788E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.56771E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=8.14283E-10
mult1=-9.58386E-9
mult2=-2.93619E-9
rf_tmon=-5.73811E-3
rf_agc=3.26607E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.02486E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71341E0
bslens_imon=2.40522E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=3.06037E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.19074E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0277E0
lens1_imon=1.25137E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.59859E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=3.01067E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.96967E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=2.88695E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.155E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18898E0
cs_ionrep_imon=1.27509E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02076E1
cs_anode1_imon=3.27479E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=7.74014E-10
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-5.18331E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.53595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27119E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98781E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.42815E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32879E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.20631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.13925E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.96458E-1
os_ea2_imon=-4.05069E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00449E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70806E1
cs_ef2a_imon=3.21189E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61813E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75221E-1
os_ef2bup_imon=-5.07676E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=2.86123E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.34565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02128E1
cs_anode2_imon=2.29963E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72751E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67668E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.91051E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.21829E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08902E0
cs_ionaccel_imon=-1.87258E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56596E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=2.27532E-1
window_imon=-7.46599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-6.04114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.56214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.98522E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.55152E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.41183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.46088E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.38009E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=1.00847E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64295E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66537E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.23478E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.21909E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45478E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22344E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.97647E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.43771E-1
res40_imon=-2.7553E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3828E4	6.0E0	1.47E2	4.1E1	-7.30918E-2	-8.79998E1	2.38419E-4	-8.80007E1	5.96046E-4	4.88758E-3	9.35316E-2	2.73252E1	-3.2698E1	-3.26024E1	2.6798E1	1.73605E-7	2.51709E-3	2.51709E-3	6.33388E-3	1.98063E-1
2.0E0	5.821E3	4.0E0	3.16E2	1.6E2	-7.33239E-2	-8.79997E1	1.90735E-4	-8.80007E1	4.05312E-4	5.03063E-3	9.31978E-2	2.72916E1	-3.2664E1	-3.26168E1	2.67938E1	1.73529E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97559E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.79997E1	7.15256E-5	-8.80007E1	5.72205E-4	5.36442E-3	9.3174E-2	2.72827E1	-3.26649E1	-3.25841E1	2.68022E1	1.73567E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98678E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.79997E1	1.66893E-4	-8.80007E1	5.24521E-4	4.98295E-3	9.30786E-2	2.73285E1	-3.26585E1	-3.26549E1	2.67897E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79998E1	3.09944E-4	-8.80007E1	3.09944E-4	5.07832E-3	9.31263E-2	2.72821E1	-3.26408E1	-3.26579E1	2.6807E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.79996E1	2.38419E-4	-8.80005E1	3.33786E-4	5.14984E-3	9.31501E-2	2.73303E1	-3.27137E1	-3.25846E1	2.67884E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79995E1	1.90735E-4	-8.80006E1	2.14577E-4	5.14984E-3	9.32693E-2	2.73149E1	-3.26707E1	-3.26389E1	2.6813E1	1.73383E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.79997E1	2.14577E-4	-8.80006E1	1.90735E-4	5.26905E-3	9.34839E-2	2.72951E1	-3.26284E1	-3.26425E1	2.6822E1	1.73451E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.99401E-1
1.2E1	3.4E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.79996E1	2.38419E-4	-8.80007E1	1.19209E-4	4.95911E-3	9.30309E-2	2.72937E1	-3.26915E1	-3.26206E1	2.68034E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.79999E1	4.52995E-4	-8.80007E1	2.6226E-4	5.10216E-3	9.34362E-2	2.73207E1	-3.26627E1	-3.2629E1	2.6801E1	1.73416E-7	2.51607E-3	2.51607E-3	6.31837E-3	1.9989E-1
1.4E1	7.76E2	1.0E0	5.66E2	3.82E2	-7.29374E-2	-8.8E1	3.09944E-4	-8.80008E1	3.33786E-4	4.98295E-3	9.33647E-2	2.73243E1	-3.26536E1	-3.25906E1	2.67944E1					
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79998E1	5.48363E-4	-8.80006E1	3.57628E-4	5.126E-3	9.31263E-2	2.73279E1	-3.26585E1	-3.26573E1	2.67698E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00673E-1
1.6E1	3.139E3	1.0E0	6.47E2	4.41E2	-7.34782E-2	-8.8E1	4.76837E-4	-8.80006E1	1.90735E-4	5.126E-3	9.34839E-2	2.73535E1	-3.26784E1	-3.26226E1	2.6719E1	1.73529E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00151E-1
1.7E1	3.9123E4	2.2E1	6.87E2	4.7E2	-7.34782E-2	-8.79999E1	3.33786E-4	-8.80004E1	3.8147E-4	4.76837E-3	9.33409E-2	2.73331E1	-3.264E1	-3.26088E1	2.67932E1	1.73532E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.00231E-1
1.8E1	1.71824E5	1.14E2	7.27E2	5.0E2	-7.30146E-2	-8.79998E1	3.09944E-4	-8.80005E1	1.43051E-4	4.93526E-3	9.30786E-2	2.73522E1	-3.26591E1	-3.26266E1	2.68244E1	1.73605E-7	2.51271E-3	2.51271E-3	6.30171E-3	2.00244E-1
1.9E1	2.318E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80002E1	-7.15256E-5	-8.80005E1	3.57628E-4	4.98295E-3	9.31263E-2	2.73523E1	-3.26178E1	-3.26242E1	2.67565E1	1.73528E-7	2.51693E-3	2.51693E-3	6.28511E-3	2.00818E-1
2.0E1	3.62E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8E1	1.19209E-4	-8.80007E1	2.86102E-4	5.36442E-3	9.29117E-2	2.72937E1	-3.26657E1	-3.265E1	2.67962E1	1.73529E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80002E1	-7.15256E-5	-8.80007E1	3.09944E-4	5.17368E-3	9.31263E-2	2.72697E1	-3.26343E1	-3.26366E1	2.68012E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.99E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.8E1	3.09944E-4	-8.80007E1	4.52995E-4	5.26905E-3	9.30548E-2	2.73322E1	-3.26567E1	-3.25995E1	2.67854E1	1.73383E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.97984E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80001E1	1.43051E-4	-8.80007E1	5.24521E-4	5.17368E-3	9.32693E-2	2.72751E1	-3.27119E1	-3.26278E1	2.67668E1	1.73383E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.97647E-1