[Scan]
initial_time=2016-02-16T02:48:32
final_time=2016-02-16T02:48:52
ip_count=19
run=1030
dataset=7
scan=507
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.7791E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-8.10146E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=4.01986E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.41793E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.22449E-10
mult1=-1.02822E-8
mult2=-2.87031E-9
rf_tmon=-5.41366E-3
rf_agc=3.23302E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=4.12571E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61968E0
bslens_imon=2.76202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19752E1
lens5a_imon=1.97288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5386E1
cs_ef1b_imon=3.08671E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02176E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05011E1
cs_ea1_imon=2.22595E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02915E0
lens1_imon=1.72379E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64178E1
os_ef1alow_imon=2.97598E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04146E1
cs_ea2_imon=1.59584E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84635E1
cs_ef1a_imon=3.02966E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.89326E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11095E1
os_restr1_imon=2.86961E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=1.87828E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63596E1
os_ef1bup_imon=3.11288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23673E0
cs_ionrep_imon=1.26935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93447E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=3.26052E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=7.23672E-10
tplens_vset=1.4E-1
tplens_vmon=1.62606E0
tplens_imon=-1.54579E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.52139E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98592E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.31836E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26917E0
ionrepsh_imon=2.00635E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33447E1
lens5b_imon=2.18736E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74915E1
cs_ef2b_imon=3.15717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.83314E-1
os_ea2_imon=-3.42416E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71012E1
cs_ef2a_imon=3.18435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66357E0
os_ef2alow_imon=-2.22071E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65175E-1
os_ef2bup_imon=-5.41842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10436E1
os_restr2_imon=2.89478E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29382E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.28409E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.12215E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.09493E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.61681E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0731E0
cs_ionaccel_imon=-2.05965E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47612E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56181E1
einzel_imon=7.54691E-6
window_vset=0.0E0
window_vmon=1.67115E-1
window_imon=-8.68473E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39064E-4
mask2_vset=0.0E0
mask2_vmon=-1.86372E1
mask2_imon=-1.80612E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.35549E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.45387E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50145E0
defgridb_imon=6.24213E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=5.32489E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.23748E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30682E1
cs_fil1_imon=1.00965E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66356E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12462E-2
os_fil2_imon=-2.37019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.51006E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60454E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28687E-1
cs_fil2_imon=-2.40934E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24247E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23998E-1
res40_imon=-2.61329E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3683E4	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.79999E1	-3.09944E-4	-8.80002E1	5.72205E-4	5.4121E-3	9.30548E-2	2.73094E1	-3.26046E1	-3.2634E1	2.68132E1	1.73605E-7	2.51041E-3	2.51041E-3	6.32273E-3	1.98372E-1
2.0E0	5.879E3	5.0E0	3.16E2	1.6E2	-7.27828E-2	-8.79999E1	-2.86102E-4	-8.80004E1	4.76837E-4	5.45979E-3	9.31263E-2	2.73131E1	-3.26725E1	-3.26174E1	2.6771E1	1.73451E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.99224E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80003E1	-2.38419E-4	-8.80007E1	6.19888E-4	5.36442E-3	9.32932E-2	2.73021E1	-3.26496E1	-3.26083E1	2.68178E1	1.73416E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.79998E1	4.76837E-5	-8.80005E1	4.52995E-4	5.29289E-3	9.3174E-2	2.72721E1	-3.26326E1	-3.26518E1	2.68022E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79999E1	2.38419E-5	-8.80003E1	5.00679E-4	5.126E-3	9.32932E-2	2.73104E1	-3.26579E1	-3.25794E1	2.67816E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99283E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.79998E1	-2.38419E-4	-8.80006E1	3.8147E-4	5.38826E-3	9.31263E-2	2.72973E1	-3.26536E1	-3.26452E1	2.67932E1	1.73379E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.79999E1	7.15256E-5	-8.8001E1	7.62939E-4	5.07832E-3	9.32455E-2	2.73063E1	-3.26759E1	-3.26242E1	2.67854E1	1.73457E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.79997E1	4.76837E-5	-8.8001E1	5.24521E-4	4.93526E-3	9.3174E-2	2.72889E1	-3.2644E1	-3.26332E1	2.67884E1	1.73528E-7	2.51248E-3	2.51248E-3	6.29624E-3	1.99048E-1
1.2E1	3.11E2	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.8E1	4.76837E-5	-8.80009E1	5.72205E-4	4.95911E-3	9.32217E-2	2.7346E1	-3.26681E1	-3.2647E1	2.67656E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9968E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80001E1	-7.15256E-5	-8.80007E1	6.4373E-4	4.98295E-3	9.31025E-2	2.73292E1	-3.26646E1	-3.2598E1	2.67953E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99283E-1
1.4E1	6.67E2	1.0E0	5.66E2	3.82E2	-7.39421E-2	-8.79999E1	-2.6226E-4	-8.80007E1	6.4373E-4	4.93526E-3	9.3174E-2	2.73299E1	-3.26934E1	-3.2633E1	2.67784E1	1.73605E-7	2.51575E-3	2.51575E-3	6.31779E-3	2.00765E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80001E1	-1.90735E-4	-8.80007E1	5.72205E-4	5.14984E-3	9.3174E-2	2.73093E1	-3.26567E1	-3.26146E1	2.67566E1	1.73526E-7	2.52293E-3	2.52293E-3	6.33592E-3	1.99523E-1
1.6E1	3.225E3	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80004E1	-2.14577E-4	-8.80009E1	4.52995E-4	5.10216E-3	9.29356E-2	2.72968E1	-3.26703E1	-3.25912E1	2.67782E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98419E-1
1.7E1	3.8736E4	2.3E1	6.87E2	4.7E2	-7.42513E-2	-8.8E1	-1.43051E-4	-8.80008E1	5.00679E-4	5.05447E-3	9.32217E-2	2.7349E1	-3.26549E1	-3.2608E1	2.68424E1	1.73531E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.98661E-1
1.8E1	1.72244E5	1.2E2	7.27E2	5.0E2	-7.44831E-2	-8.8E1	-2.14577E-4	-8.80007E1	2.6226E-4	5.29289E-3	9.32217E-2	2.73279E1	-3.26224E1	-3.26272E1	2.67986E1	1.73374E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.98872E-1
1.9E1	2.251E3	2.0E0	7.68E2	5.29E2	-7.50241E-2	-8.79998E1	-1.90735E-4	-8.80008E1	4.29153E-4	4.60148E-3	9.35078E-2	2.73033E1	-3.26771E1	-3.26188E1	2.68076E1	1.73531E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.98661E-1
2.0E1	3.07E2	0.0E0	8.08E2	5.58E2	-7.47923E-2	-8.79997E1	9.53674E-5	-8.80007E1	5.24521E-4	4.81606E-3	9.33647E-2	2.73099E1	-3.26591E1	-3.26128E1	2.6768E1	1.73528E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.44831E-2	-8.79999E1	9.53674E-5	-8.80007E1	5.00679E-4	4.88758E-3	9.3317E-2	2.73488E1	-3.26679E1	-3.26189E1	2.68334E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.99E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.79998E1	-2.38419E-4	-8.80007E1	3.57628E-4	5.126E-3	9.27687E-2	2.73279E1	-3.26633E1	-3.2608E1	2.68041E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98419E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80002E1	1.43051E-4	-8.80008E1	4.52995E-4	4.79221E-3	9.29832E-2	2.72919E1	-3.265E1	-3.26356E1	2.67866E1	1.73457E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9934E-1