[Scan]
initial_time=2016-02-16T02:49:25
final_time=2016-02-16T02:49:45
ip_count=19
run=1030
dataset=7
scan=509
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.84189E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-8.20684E-10
ql2_vset=
ql2_vmon=1.66893E-4
ql2_imon=3.83174E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.33412E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.00991E-10
mult1=-1.01739E-8
mult2=-2.92421E-9
rf_tmon=-5.74412E-3
rf_agc=3.13929E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=3.86083E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61953E0
bslens_imon=2.33003E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99787E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53749E1
cs_ef1b_imon=3.03978E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05043E1
cs_ea1_imon=2.20098E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05614E0
lens1_imon=1.48891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=3.01246E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03886E1
cs_ea2_imon=1.5729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84369E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.12047E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.89158E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=1.90237E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63311E1
os_ef1bup_imon=3.08918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27169E0
cs_ionrep_imon=1.29229E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93067E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.28979E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=7.1708E-10
tplens_vset=1.4E-1
tplens_vmon=1.61327E0
tplens_imon=7.8494E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.48916E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58392E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.9886E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.29499E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26618E0
ionrepsh_imon=1.9975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33713E1
lens5b_imon=2.19841E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.10977E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64069E-1
os_ea2_imon=-5.86314E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00847E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71501E1
cs_ef2a_imon=3.17676E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61782E0
os_ef2alow_imon=-2.55186E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82038E-1
os_ef2bup_imon=-5.1305E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.87473E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01697E1
cs_anode2_imon=2.27929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.11158E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67656E1
iondef4_imon=1.12096E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.92653E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=3.46529E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11268E0
cs_ionaccel_imon=-2.0541E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4735E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.67661E-6
window_vset=0.0E0
window_vmon=1.68943E-1
window_imon=-1.06606E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86519E1
mask2_imon=-5.15896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=8.87159E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.50987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.08652E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.79272E0
defgridb_imon=6.57965E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33917E1
os_fil1_imon=4.67919E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66237E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30724E1
cs_fil1_imon=1.00818E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63145E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66292E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18687E-2
os_fil2_imon=-2.413E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85305E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.0325E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26097E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22351E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.00979E-1
res40_imon=-2.66414E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3549E4	1.2E1	1.47E2	4.1E1	-7.27053E-2	-8.80003E1	-2.86102E-4	-8.80005E1	4.52995E-4	4.86374E-3	9.35316E-2	2.73375E1	-3.26921E1	-3.26154E1	2.67908E1	1.73605E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.98696E-1
2.0E0	5.791E3	1.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80006E1	-4.76837E-5	-8.80004E1	3.57628E-4	4.95911E-3	9.33647E-2	2.73235E1	-3.26572E1	-3.26138E1	2.67988E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9917E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80004E1	-2.6226E-4	-8.80003E1	5.72205E-4	5.05447E-3	9.29594E-2	2.73411E1	-3.26921E1	-3.2652E1	2.68192E1	1.73492E-7	2.51225E-3	2.51225E-3	6.31014E-3	1.99024E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80005E1	0.0E0	-8.80006E1	3.57628E-4	4.8399E-3	9.3174E-2	2.73345E1	-3.26783E1	-3.25882E1	2.67932E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44059E-2	-8.80005E1	-1.66893E-4	-8.80004E1	7.39098E-4	5.31673E-3	9.34124E-2	2.73153E1	-3.26705E1	-3.2647E1	2.6783E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98075E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80003E1	-9.53674E-5	-8.80003E1	7.39098E-4	5.07832E-3	9.30548E-2	2.73017E1	-3.2626E1	-3.26238E1	2.67937E1	1.73605E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.97559E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.8E1	2.14577E-4	-8.80007E1	5.00679E-4	4.98295E-3	9.3174E-2	2.72785E1	-3.26649E1	-3.26091E1	2.67881E1	1.73464E-7	2.51041E-3	2.51041E-3	6.31251E-3	1.98211E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.8E1	2.38419E-5	-8.80002E1	2.6226E-4	4.95911E-3	9.3174E-2	2.72425E1	-3.26186E1	-3.2692E1	2.67897E1	1.73605E-7	2.51321E-3	2.51321E-3	6.28967E-3	1.99408E-1
1.2E1	3.13E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80004E1	2.6226E-4	-8.80006E1	2.86102E-4	4.93526E-3	9.32455E-2	2.7257E1	-3.26813E1	-3.26242E1	2.6784E1	1.73533E-7	2.52197E-3	2.52197E-3	6.3282E-3	1.9994E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80003E1	1.90735E-4	-8.80003E1	5.48363E-4	4.88758E-3	9.35078E-2	2.73093E1	-3.26657E1	-3.26368E1	2.67843E1	1.73454E-7	2.5188E-3	2.5188E-3	6.28552E-3	1.98592E-1
1.4E1	6.98E2	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80007E1	7.15256E-5	-8.80005E1	4.52995E-4	4.8399E-3	9.3174E-2	2.72962E1	-3.26537E1	-3.26183E1	2.67694E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
1.5E1	6.1E1	1.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80006E1	-1.66893E-4	-8.80005E1	4.05312E-4	4.57764E-3	9.32932E-2	2.72688E1	-3.26332E1	-3.2676E1	2.68093E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.98153E-1
1.6E1	3.098E3	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80006E1	0.0E0	-8.80007E1	3.09944E-4	5.05447E-3	9.3317E-2	2.72847E1	-3.26993E1	-3.25984E1	2.67897E1	1.73536E-7	2.51923E-3	2.51923E-3	6.31242E-3	1.97025E-1
1.7E1	3.874E4	1.8E1	6.87E2	4.7E2	-7.35556E-2	-8.80005E1	-3.57628E-4	-8.80005E1	4.05312E-4	4.8399E-3	9.3174E-2	2.73045E1	-3.265E1	-3.26386E1	2.6822E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98592E-1
1.8E1	1.7199E5	9.4E1	7.27E2	5.0E2	-7.34782E-2	-8.80011E1	-1.19209E-4	-8.80003E1	3.33786E-4	5.48363E-3	9.2721E-2	2.7275E1	-3.26673E1	-3.25918E1	2.67902E1	1.73529E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99456E-1
1.9E1	2.308E3	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80006E1	-1.19209E-4	-8.80004E1	5.00679E-4	5.00679E-3	9.28164E-2	2.73081E1	-3.26404E1	-3.26338E1	2.67932E1	1.73531E-7	2.52599E-3	2.52599E-3	6.31278E-3	1.9968E-1
2.0E1	3.35E2	0.0E0	8.08E2	5.58E2	-7.50241E-2	-8.80007E1	-1.43051E-4	-8.80007E1	3.09944E-4	5.24521E-3	9.32932E-2	2.72889E1	-3.26254E1	-3.26122E1	2.68154E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00151E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80008E1	-2.86102E-4	-8.80008E1	3.57628E-4	5.14984E-3	9.31263E-2	2.73171E1	-3.26825E1	-3.26212E1	2.68016E1	1.73379E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.01372E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80007E1	-2.86102E-4	-8.80005E1	4.05312E-4	5.4121E-3	9.33886E-2	2.72939E1	-3.26838E1	-3.26142E1	2.68233E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9911E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80004E1	1.66893E-4	-8.80005E1	2.14577E-4	5.00679E-3	9.34839E-2	2.73424E1	-3.26597E1	-3.26338E1	2.67656E1	1.73531E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9917E-1