[Scan]
initial_time=2016-02-16T02:50:45
final_time=2016-02-16T02:51:05
ip_count=19
run=1030
dataset=7
scan=512
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82641E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.05588E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=3.80719E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.05604E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.03435E-10
mult1=-1.15224E-8
mult2=-2.74656E-9
rf_tmon=-5.25745E-3
rf_agc=3.26006E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.00293E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.76978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05217E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53292E1
cs_ef1b_imon=3.07244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=2.20843E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04894E0
lens1_imon=1.45312E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.58514E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=3.0346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.09687E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.87963E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.90157E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1996E0
cs_ionrep_imon=1.25562E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.24975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.14755E-10
tplens_vset=1.4E-1
tplens_vmon=1.64261E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98721E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.10187E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=2.00456E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.15605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.77581E-1
os_ea2_imon=-4.15688E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70945E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62939E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10457E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.32335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.27921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.91119E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=3.19064E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07068E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82585E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.13741E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.3427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=5.17866E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53926E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66117E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=1.00951E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.626E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66511E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86096E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22355E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.97388E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59002E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3516E4	1.8E1	1.47E2	4.1E1	-7.27828E-2	-8.80004E1	-4.76837E-5	-8.80007E1	4.05312E-4	5.6982E-3	9.31025E-2	2.73134E1	-3.26443E1	-3.26172E1	2.68128E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9968E-1
2.0E0	5.786E3	1.0E1	3.16E2	1.6E2	-7.27828E-2	-8.80003E1	2.6226E-4	-8.80006E1	1.90735E-4	5.50747E-3	9.31978E-2	2.73253E1	-3.26891E1	-3.26432E1	2.67716E1	1.73531E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00192E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80002E1	2.38419E-5	-8.80005E1	5.00679E-4	5.24521E-3	9.31501E-2	2.73092E1	-3.26638E1	-3.26065E1	2.6786E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00151E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80006E1	2.14577E-4	-8.80003E1	5.00679E-4	5.48363E-3	9.31263E-2	2.72933E1	-3.26531E1	-3.2613E1	2.67878E1	1.73529E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99456E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80007E1	1.66893E-4	-8.80004E1	5.00679E-4	5.74589E-3	9.32932E-2	2.73326E1	-3.26542E1	-3.26205E1	2.67734E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80007E1	4.76837E-5	-8.80002E1	3.33786E-4	5.65052E-3	9.33409E-2	2.72967E1	-3.26434E1	-3.26452E1	2.67908E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.8001E1	-7.15256E-5	-8.80001E1	4.29153E-4	5.45979E-3	9.33409E-2	2.72992E1	-3.26626E1	-3.26349E1	2.67812E1	1.73605E-7	2.5068E-3	2.5068E-3	6.31837E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80008E1	2.14577E-4	-8.80003E1	2.86102E-4	5.14984E-3	9.30548E-2	2.73363E1	-3.26488E1	-3.26368E1	2.68094E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80006E1	3.8147E-4	-8.80006E1	1.43051E-4	5.34058E-3	9.31025E-2	2.73247E1	-3.26836E1	-3.26909E1	2.68064E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00673E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80007E1	5.96046E-4	-8.80006E1	5.00679E-4	5.38826E-3	9.30786E-2	2.72787E1	-3.26753E1	-3.26446E1	2.67656E1	1.73528E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.00108E-1
1.4E1	7.37E2	1.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80007E1	6.4373E-4	-8.80006E1	6.67572E-4	5.22137E-3	9.29832E-2	2.72829E1	-3.2647E1	-3.26524E1	2.67373E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9968E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80005E1	2.6226E-4	-8.80004E1	2.38419E-4	5.74589E-3	9.31263E-2	2.73558E1	-3.26815E1	-3.2639E1	2.68352E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
1.6E1	3.2E3	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80005E1	2.38419E-4	-8.80005E1	9.53674E-5	5.74589E-3	9.30309E-2	2.73237E1	-3.27161E1	-3.26086E1	2.6807E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
1.7E1	3.8915E4	2.3E1	6.87E2	4.7E2	-7.35556E-2	-8.80006E1	1.66893E-4	-8.80006E1	2.6226E-4	5.17368E-3	9.3174E-2	2.73153E1	-3.26831E1	-3.2614E1	2.68364E1	1.73379E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99456E-1
1.8E1	1.71518E5	1.15E2	7.27E2	5.0E2	-7.3401E-2	-8.80007E1	3.57628E-4	-8.80005E1	5.72205E-4	5.53131E-3	9.29832E-2	2.73303E1	-3.26765E1	-3.2599E1	2.684E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9963E-1
1.9E1	2.276E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80005E1	0.0E0	-8.80004E1	4.29153E-4	5.07832E-3	9.32932E-2	2.73478E1	-3.26681E1	-3.26116E1	2.68135E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00499E-1
2.0E1	3.17E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80005E1	1.66893E-4	-8.80003E1	3.33786E-4	5.36442E-3	9.30786E-2	2.72943E1	-3.26164E1	-3.26825E1	2.6816E1	1.73383E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80006E1	2.38419E-5	-8.80003E1	4.29153E-4	5.31673E-3	9.29832E-2	2.73145E1	-3.26797E1	-3.26502E1	2.67896E1	1.73374E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.97469E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80006E1	-1.19209E-4	-8.80006E1	6.4373E-4	5.24521E-3	9.28879E-2	2.73137E1	-3.26701E1	-3.26021E1	2.67896E1	1.73457E-7	2.51632E-3	2.51632E-3	6.28056E-3	1.9647E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80004E1	1.43051E-4	-8.80006E1	2.14577E-4	5.53131E-3	9.30548E-2	2.72907E1	-3.26446E1	-3.26464E1	2.68256E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97388E-1