[Scan]
initial_time=2016-02-16T02:51:12
final_time=2016-02-16T02:51:31
ip_count=19
run=1030
dataset=7
scan=513
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.83762E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.827E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=3.98242E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.21111E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.78031E-10
mult1=-1.07157E-8
mult2=-2.7246E-9
rf_tmon=-4.15794E-3
rf_agc=3.33456E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.95942E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66281E0
bslens_imon=2.81276E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.99226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53949E1
cs_ef1b_imon=3.06099E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02267E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05191E1
cs_ea1_imon=2.21127E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01511E0
lens1_imon=1.32842E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64529E1
os_ef1alow_imon=2.998E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.60953E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8448E1
cs_ef1a_imon=3.01109E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.74269E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11306E1
os_restr1_imon=2.87982E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15526E1
os_ea1_imon=1.90953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63444E1
os_ef1bup_imon=3.10911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27122E0
cs_ionrep_imon=1.24558E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93549E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0152E1
cs_anode1_imon=3.26657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.45857E-10
tplens_vset=1.4E-1
tplens_vmon=1.60493E0
tplens_imon=-1.8373E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50838E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.59076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.987E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.02319E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23761E0
ionrepsh_imon=1.99644E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33582E1
lens5b_imon=2.19562E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59062E-1
os_ea2_imon=-4.06207E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00793E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.17032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64813E0
os_ef2alow_imon=-2.4781E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57518E-1
os_ef2bup_imon=-5.38316E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10864E1
os_restr2_imon=2.86389E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01662E1
cs_anode2_imon=2.27439E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10966E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67662E1
iondef4_imon=1.06955E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.89319E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.21007E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13191E0
cs_ionaccel_imon=-1.77041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02031E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56511E1
einzel_imon=7.57815E-6
window_vset=0.0E0
window_vmon=1.98941E-1
window_imon=-8.39799E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39176E-4
mask2_vset=0.0E0
mask2_vmon=-1.86503E1
mask2_imon=-5.46109E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.53345E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.70263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.40135E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57761E0
defgridb_imon=6.00044E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=5.00491E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61156E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00818E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66442E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2575E-2
os_fil2_imon=-2.41402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.82884E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33275E-1
cs_fil2_imon=-1.97171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.82884E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22426E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.5744E-1
res40_imon=-2.48517E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3867E4	1.9E1	1.47E2	4.1E1	-7.27828E-2	-8.80007E1	2.6226E-4	-8.80008E1	5.72205E-4	5.126E-3	9.29832E-2	2.73442E1	-3.26795E1	-3.2644E1	2.67834E1	1.73531E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9934E-1
2.0E0	5.91E3	1.0E1	3.16E2	1.6E2	-7.27053E-2	-8.80007E1	5.48363E-4	-8.80005E1	6.4373E-4	5.07832E-3	9.28879E-2	2.73261E1	-3.265E1	-3.26314E1	2.68118E1	1.73531E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00705E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80007E1	1.43051E-4	-8.80004E1	5.24521E-4	5.19753E-3	9.32455E-2	2.73317E1	-3.26764E1	-3.25826E1	2.67818E1	1.73605E-7	2.51693E-3	2.51693E-3	6.29624E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80004E1	1.43051E-4	-8.80005E1	4.76837E-4	5.53131E-3	9.33886E-2	2.73143E1	-3.26229E1	-3.26291E1	2.67884E1	1.73169E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.98063E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80006E1	-1.66893E-4	-8.80007E1	5.48363E-4	4.8399E-3	9.35078E-2	2.72745E1	-3.26705E1	-3.2641E1	2.67583E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97045E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80008E1	2.6226E-4	-8.80003E1	5.00679E-4	5.26905E-3	9.36031E-2	2.72968E1	-3.26732E1	-3.26213E1	2.68273E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.96191E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80008E1	4.52995E-4	-8.80003E1	8.34465E-4	5.31673E-3	9.33409E-2	2.72811E1	-3.26056E1	-3.26362E1	2.67714E1	1.73303E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9551E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80006E1	-4.76837E-5	-8.80006E1	7.39098E-4	5.05447E-3	9.32932E-2	2.73381E1	-3.26855E1	-3.25846E1	2.67937E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.96191E-1
1.2E1	3.48E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80007E1	-4.76837E-5	-8.80007E1	6.19888E-4	5.17368E-3	9.3317E-2	2.7262E1	-3.26425E1	-3.26301E1	2.68304E1	1.73455E-7	2.51593E-3	2.51593E-3	6.3074E-3	1.97179E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80006E1	2.38419E-4	-8.80007E1	4.52995E-4	5.36442E-3	9.3174E-2	2.73069E1	-3.27125E1	-3.26326E1	2.68058E1					
1.4E1	7.58E2	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80005E1	1.19209E-4	-8.80005E1	4.76837E-4	5.48363E-3	9.33409E-2	2.73596E1	-3.26933E1	-3.26303E1	2.6837E1	1.73529E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98075E-1
1.5E1	6.9E1	1.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80005E1	1.90735E-4	-8.80006E1	3.8147E-4	5.4121E-3	9.3317E-2	2.73027E1	-3.26939E1	-3.26056E1	2.67571E1	1.73605E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99283E-1
1.6E1	3.255E3	1.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80008E1	9.53674E-5	-8.80006E1	4.52995E-4	4.88758E-3	9.35078E-2	2.73219E1	-3.26705E1	-3.26669E1	2.67475E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98937E-1
1.7E1	3.8715E4	2.2E1	6.87E2	4.7E2	-7.37874E-2	-8.80009E1	3.33786E-4	-8.80008E1	5.48363E-4	5.34058E-3	9.35316E-2	2.73249E1	-3.26248E1	-3.26759E1	2.67601E1	1.73298E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99754E-1
1.8E1	1.71932E5	1.07E2	7.27E2	5.0E2	-7.34782E-2	-8.80008E1	-2.38419E-4	-8.80007E1	4.52995E-4	4.88758E-3	9.33886E-2	2.73181E1	-3.26809E1	-3.26054E1	2.67758E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29665E-3	1.9968E-1
1.9E1	2.299E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80008E1	3.8147E-4	-8.80005E1	3.57628E-4	5.4121E-3	9.35078E-2	2.7346E1	-3.26645E1	-3.25864E1	2.68004E1	1.73605E-7	2.50898E-3	2.50898E-3	6.28552E-3	2.00151E-1
2.0E1	3.26E2	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80008E1	1.66893E-4	-8.80008E1	2.38419E-4	5.45979E-3	9.33409E-2	2.72821E1	-3.26272E1	-3.26083E1	2.68141E1	1.73605E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.00151E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.8001E1	1.43051E-4	-8.80003E1	1.90735E-4	5.19753E-3	9.31025E-2	2.73134E1	-3.2685E1	-3.26024E1	2.67451E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32356E-3	1.9883E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80008E1	3.57628E-4	-8.80005E1	3.33786E-4	5.14984E-3	9.31025E-2	2.73015E1	-3.26633E1	-3.26086E1	2.68436E1	1.7353E-7	2.51538E-3	2.51538E-3	6.31555E-3	1.98883E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80009E1	2.38419E-5	-8.80004E1	2.38419E-5	5.05447E-3	9.30309E-2	2.73051E1	-3.2647E1	-3.26446E1	2.67662E1