[Scan]
initial_time=2016-02-16T02:52:32
final_time=2016-02-16T02:52:51
ip_count=19
run=1030
dataset=7
scan=516
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.76223E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.19452E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=3.91173E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.07316E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.02159E-10
mult1=-9.88947E-9
mult2=-2.80753E-9
rf_tmon=-5.47101E-3
rf_agc=3.29965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=4.08208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61961E0
bslens_imon=2.79456E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.97342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.04757E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.01958E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.19711E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02593E0
lens1_imon=1.47082E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65131E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03354E1
cs_ea2_imon=1.57488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.86941E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11045E1
os_restr1_imon=2.86233E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=1.90652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6399E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.27545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93774E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.2912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.4985E-10
tplens_vset=1.4E-1
tplens_vmon=1.6432E0
tplens_imon=-9.0062E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.52391E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2639E1
iondef2_imon=1.59966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.88515E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30519E0
ionrepsh_imon=2.03005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3331E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66963E-1
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00371E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70759E1
cs_ef2a_imon=3.20759E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65222E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.90506E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=2.88503E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.29759E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72998E1
iondef1_imon=1.10839E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67704E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.90592E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.35133E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.11336E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.87361E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=7.14449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.07016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6093E0
defgridb_imon=6.30211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.46098E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17887E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=1.01156E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62936E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22359E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.5749E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3795E4	1.5E1	1.47E2	4.1E1	-7.23189E-2	-8.80007E1	2.38419E-4	-8.80004E1	3.33786E-4	5.53131E-3	9.32217E-2	2.72996E1	-3.26358E1	-3.26199E1	2.67637E1	1.73383E-7	2.50989E-3	2.50989E-3	6.32356E-3	1.98153E-1
2.0E0	5.898E3	6.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80009E1	-9.53674E-5	-8.80007E1	5.24521E-4	5.45979E-3	9.30786E-2	2.73177E1	-3.26609E1	-3.26146E1	2.6792E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80009E1	2.14577E-4	-8.80006E1	3.33786E-4	5.45979E-3	9.29832E-2	2.73009E1	-3.26627E1	-3.26224E1	2.67986E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99456E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80008E1	1.90735E-4	-8.80008E1	3.33786E-4	5.81741E-3	9.32932E-2	2.73299E1	-3.26437E1	-3.26349E1	2.68528E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80006E1	-4.76837E-5	-8.80002E1	2.6226E-4	5.29289E-3	9.31025E-2	2.72916E1	-3.26566E1	-3.26181E1	2.68157E1	1.73383E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00192E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80008E1	-9.53674E-5	-8.80002E1	0.0E0	5.65052E-3	9.32693E-2	2.72781E1	-3.26951E1	-3.26104E1	2.67698E1	1.73451E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99224E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80008E1	-1.66893E-4	-8.80004E1	1.66893E-4	5.29289E-3	9.32932E-2	2.72877E1	-3.26524E1	-3.26116E1	2.67746E1	1.73528E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.9852E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80009E1	-1.66893E-4	-8.80006E1	4.05312E-4	5.126E-3	9.29832E-2	2.73297E1	-3.26777E1	-3.26122E1	2.68334E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
1.2E1	3.53E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80007E1	4.76837E-5	-8.80004E1	4.52995E-4	5.19753E-3	9.3317E-2	2.72823E1	-3.2641E1	-3.26146E1	2.68142E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9963E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80006E1	1.19209E-4	-8.80005E1	4.05312E-4	5.26905E-3	9.29832E-2	2.73458E1	-3.26301E1	-3.26443E1	2.67704E1	1.73529E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1
1.4E1	6.97E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80007E1	-4.76837E-5	-8.80004E1	4.52995E-4	4.95911E-3	9.32693E-2	2.73143E1	-3.26578E1	-3.26009E1	2.68412E1	1.73605E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98937E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80008E1	1.90735E-4	-8.80005E1	3.8147E-4	5.26905E-3	9.3317E-2	2.7185E1	-3.25332E1	-3.27091E1	2.683E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1
1.6E1	3.125E3	1.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80007E1	1.19209E-4	-8.80005E1	3.57628E-4	5.31673E-3	9.34124E-2	2.73185E1	-3.26655E1	-3.26432E1	2.68121E1	1.73533E-7	2.52093E-3	2.52093E-3	6.3126E-3	2.00105E-1
1.7E1	3.8494E4	8.0E0	6.87E2	4.7E2	-7.201E-2	-8.80009E1	1.43051E-4	-8.80005E1	2.6226E-4	5.26905E-3	9.32217E-2	2.72921E1	-3.26602E1	-3.26331E1	2.67897E1	1.73365E-7	2.50949E-3	2.50949E-3	6.33065E-3	1.98917E-1
1.8E1	1.69123E5	9.8E1	7.27E2	5.0E2	-7.05415E-2	-8.80005E1	-2.38419E-5	-8.80008E1	-2.38419E-5	5.4121E-3	9.3317E-2	2.72626E1	-3.26744E1	-3.26537E1	2.67884E1	1.73383E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9951E-1
1.9E1	2.156E3	1.0E0	7.68E2	5.29E2	-7.10825E-2	-8.80008E1	7.15256E-5	-8.80007E1	3.57628E-4	5.65052E-3	9.3174E-2	2.73099E1	-3.26867E1	-3.26098E1	2.67848E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98764E-1
2.0E1	3.45E2	1.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80008E1	1.66893E-4	-8.80007E1	2.86102E-4	5.53131E-3	9.29594E-2	2.73171E1	-3.26723E1	-3.26128E1	2.678E1	1.73531E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.9934E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80006E1	1.90735E-4	-8.80007E1	3.57628E-4	5.57899E-3	9.30309E-2	2.73039E1	-3.26639E1	-3.26098E1	2.68238E1	1.73416E-7	2.51716E-3	2.51716E-3	6.32936E-3	1.98678E-1
2.2E1	5.9E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80005E1	-9.53674E-5	-8.80006E1	2.38419E-4	5.53131E-3	9.32932E-2	2.73075E1	-3.26762E1	-3.25965E1	2.6792E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80006E1	-4.76837E-5	-8.80006E1	1.90735E-4	5.4121E-3	9.3317E-2	2.72998E1	-3.2639E1	-3.26396E1	2.67704E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.99E-1