[Scan]
initial_time=2016-02-16T02:52:58
final_time=2016-02-16T02:53:18
ip_count=19
run=1030
dataset=7
scan=517
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.79398E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.248E-10
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=3.86059E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.97245E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.15666E-10
mult1=-8.71694E-9
mult2=-2.76851E-9
rf_tmon=-4.65061E-3
rf_agc=3.24263E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.99137E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.75765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05356E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53406E1
cs_ef1b_imon=3.05082E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.20478E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03535E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6441E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.59518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.81446E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.8944E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.87096E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.29525E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=3.27931E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.61378E-10
tplens_vset=1.4E-1
tplens_vmon=1.6174E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.60816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98645E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.68679E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2533E0
ionrepsh_imon=2.01948E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34222E1
lens5b_imon=2.21018E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.21682E-1
os_ea2_imon=-2.95741E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.0312E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.34723E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.29182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67674E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.91001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.15273E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.38954E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92696E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.9394E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=4.95642E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68342E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=1.0081E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63501E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66355E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86546E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22419E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98395E-1
chamber_ion_pmon=1.73459E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3017E-1
res40_imon=-2.78168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=140
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3967E4	1.1E1	1.47E2	4.1E1	-7.32464E-2	-8.80009E1	-1.90735E-4	-8.80008E1	4.52995E-4	5.76973E-3	9.31263E-2	2.73045E1	-3.26932E1	-3.25884E1	2.68082E1	1.73379E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99283E-1
2.0E0	5.826E3	1.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80011E1	3.09944E-4	-8.80009E1	3.09944E-4	5.4121E-3	9.32693E-2	2.73189E1	-3.26518E1	-3.2611E1	2.67698E1	1.73235E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9985E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80007E1	2.14577E-4	-8.80009E1	2.86102E-4	5.24521E-3	9.33409E-2	2.7291E1	-3.26536E1	-3.25905E1	2.67884E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9934E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80009E1	4.52995E-4	-8.80008E1	5.00679E-4	5.38826E-3	9.31501E-2	2.72846E1	-3.26624E1	-3.26351E1	2.67845E1	1.73605E-7	2.51581E-3	2.51581E-3	6.31858E-3	1.98872E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80013E1	4.76837E-4	-8.80008E1	2.86102E-4	5.31673E-3	9.33647E-2	2.73345E1	-3.26554E1	-3.259E1	2.67764E1	1.73605E-7	2.50762E-3	2.50762E-3	6.33388E-3	1.99061E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8001E1	-1.43051E-4	-8.80009E1	5.24521E-4	5.65052E-3	9.32455E-2	2.72915E1	-3.26921E1	-3.26455E1	2.67842E1	1.73383E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.8001E1	1.66893E-4	-8.80009E1	7.39098E-4	5.45979E-3	9.31501E-2	2.73405E1	-3.26579E1	-3.26086E1	2.67926E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80011E1	-1.66893E-4	-8.80007E1	5.00679E-4	4.95911E-3	9.3174E-2	2.72709E1	-3.26338E1	-3.2617E1	2.68118E1	1.73531E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9968E-1
1.2E1	3.77E2	0.0E0	4.85E2	3.23E2	-7.47149E-2	-8.80007E1	3.09944E-4	-8.80004E1	2.6226E-4	5.19753E-3	9.27687E-2	2.72961E1	-3.26705E1	-3.25809E1	2.67698E1	1.73379E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80007E1	-1.90735E-4	-8.80003E1	4.76837E-4	5.24521E-3	9.31978E-2	2.73237E1	-3.26753E1	-3.26326E1	2.68136E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98764E-1
1.4E1	6.94E2	0.0E0	5.66E2	3.82E2	-7.49466E-2	-8.80005E1	-4.76837E-5	-8.80002E1	5.24521E-4	5.43594E-3	9.30071E-2	2.73039E1	-3.26831E1	-3.26134E1	2.68406E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.48695E-2	-8.80005E1	1.66893E-4	-8.80004E1	3.33786E-4	5.29289E-3	9.30786E-2	2.72204E1	-3.25347E1	-3.26597E1	2.67932E1	1.73605E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.99283E-1
1.6E1	3.019E3	0.0E0	6.47E2	4.41E2	-7.51013E-2	-8.80008E1	2.38419E-4	-8.80008E1	5.48363E-4	5.14984E-3	9.31263E-2	2.73104E1	-3.26655E1	-3.26272E1	2.6825E1	1.73454E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.99283E-1
1.7E1	3.8758E4	1.4E1	6.87E2	4.7E2	-7.44059E-2	-8.80007E1	0.0E0	-8.80011E1	3.8147E-4	5.24521E-3	9.33647E-2	2.73165E1	-3.26567E1	-3.26482E1	2.67734E1	1.73493E-7	2.5143E-3	2.5143E-3	6.32644E-3	2.00689E-1
1.8E1	1.71379E5	1.0E2	7.27E2	5.0E2	-7.31692E-2	-8.80009E1	7.15256E-5	-8.80007E1	5.24521E-4	5.45979E-3	9.32693E-2	2.73021E1	-3.26598E1	-3.26207E1	2.67867E1					
1.9E1	2.316E3	2.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8001E1	2.38419E-4	-8.80006E1	5.72205E-4	5.34058E-3	9.30786E-2	2.72859E1	-3.27071E1	-3.26561E1	2.67764E1	1.73479E-7	2.51361E-3	2.51361E-3	6.30435E-3	2.00185E-1
2.0E1	3.41E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80005E1	2.6226E-4	-8.80005E1	5.00679E-4	5.31673E-3	9.32217E-2	2.73027E1	-3.26956E1	-3.26319E1	2.67763E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.00463E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80006E1	4.52995E-4	-8.80005E1	4.05312E-4	5.65052E-3	9.29594E-2	2.73442E1	-3.26458E1	-3.26374E1	2.67842E1	1.73457E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9917E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80008E1	4.29153E-4	-8.80004E1	5.48363E-4	5.34058E-3	9.31025E-2	2.73039E1	-3.26738E1	-3.26231E1	2.67781E1	1.73454E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80009E1	7.15256E-5	-8.80004E1	4.29153E-4	5.55515E-3	9.3174E-2	2.72955E1	-3.26434E1	-3.26026E1	2.67674E1	1.73459E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.98395E-1