[Scan]
initial_time=2016-02-16T02:53:25
final_time=2016-02-16T02:53:44
ip_count=19
run=1030
dataset=7
scan=518
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79303E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.42979E-10
ql2_vset=
ql2_vmon=5.24521E-4
ql2_imon=3.61812E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.96426E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=7.97462E-10
mult1=-1.01259E-8
mult2=-2.82125E-9
rf_tmon=-3.91957E-3
rf_agc=3.33032E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.97849E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.91844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20214E1
lens5a_imon=2.00916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05224E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53304E1
cs_ef1b_imon=3.06451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02482E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.21622E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97992E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=3.00577E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.5816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.83174E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=2.89116E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15677E1
os_ea1_imon=1.89484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.10127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=1.2666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=3.27678E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.36606E-10
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26054E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=3.88098E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22142E0
ionrepsh_imon=2.01872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34218E1
lens5b_imon=2.19923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58114E-1
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00747E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.53872E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=2.88071E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.30155E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67481E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89195E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.69811E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47583E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56027E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82581E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.76743E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.96398E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59749E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=4.47589E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17286E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66214E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=1.00923E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63801E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66325E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.17866E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4076E4	1.5E1	1.47E2	4.1E1	-7.11597E-2	-8.80009E1	-7.15256E-5	-8.80005E1	5.00679E-4	5.48363E-3	9.34124E-2	2.73069E1	-3.26638E1	-3.26266E1	2.6831E1	1.73457E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00534E-1
2.0E0	5.675E3	5.0E0	3.16E2	1.6E2	-7.18554E-2	-8.8001E1	-2.6226E-4	-8.80005E1	4.29153E-4	5.126E-3	9.34124E-2	2.73176E1	-3.26603E1	-3.26429E1	2.67613E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00021E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.8001E1	1.19209E-4	-8.80004E1	4.52995E-4	5.76973E-3	9.36031E-2	2.73265E1	-3.26892E1	-3.26631E1	2.68123E1	1.73605E-7	2.5147E-3	2.5147E-3	6.29624E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80008E1	7.15256E-5	-8.80005E1	4.76837E-4	5.31673E-3	9.32455E-2	2.73051E1	-3.26655E1	-3.26396E1	2.67583E1	1.73457E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80009E1	0.0E0	-8.80005E1	2.14577E-4	5.55515E-3	9.35555E-2	2.72913E1	-3.26729E1	-3.2593E1	2.68328E1	1.73531E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80008E1	4.76837E-4	-8.80008E1	4.76837E-4	5.50747E-3	9.33886E-2	2.73087E1	-3.26693E1	-3.26158E1	2.68022E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80009E1	-1.66893E-4	-8.80007E1	5.24521E-4	5.31673E-3	9.34362E-2	2.73039E1	-3.26608E1	-3.26543E1	2.6819E1	1.73529E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80006E1	1.90735E-4	-8.80008E1	5.48363E-4	4.98295E-3	9.38654E-2	2.72955E1	-3.26585E1	-3.26146E1	2.68065E1	1.73529E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
1.2E1	3.44E2	3.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80007E1	6.19888E-4	-8.80004E1	6.19888E-4	5.00679E-3	9.30548E-2	2.7281E1	-3.2664E1	-3.25964E1	2.67445E1	1.73605E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9951E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80008E1	4.52995E-4	-8.80007E1	3.8147E-4	5.10216E-3	9.32455E-2	2.73201E1	-3.26472E1	-3.26117E1	2.67939E1	1.73533E-7	2.51679E-3	2.51679E-3	6.28667E-3	1.99447E-1
1.4E1	7.29E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80009E1	-3.8147E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.31263E-2	2.73171E1	-3.27119E1	-3.2638E1	2.67415E1	1.73526E-7	2.51725E-3	2.51725E-3	6.31879E-3	2.00425E-1
1.5E1	5.4E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.8001E1	4.76837E-5	-8.80007E1	5.48363E-4	5.24521E-3	9.33647E-2	2.7239E1	-3.25353E1	-3.25695E1	2.67723E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00499E-1
1.6E1	3.135E3	2.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80009E1	2.14577E-4	-8.80005E1	3.09944E-4	4.93526E-3	9.33409E-2	2.72847E1	-3.26699E1	-3.26032E1	2.67758E1	1.73531E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.00534E-1
1.7E1	3.8826E4	2.4E1	6.87E2	4.7E2	-7.3401E-2	-8.80008E1	-2.14577E-4	-8.80004E1	4.05312E-4	5.62668E-3	9.31025E-2	2.73081E1	-3.26615E1	-3.26068E1	2.67782E1	1.73454E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00847E-1
1.8E1	1.71586E5	8.4E1	7.27E2	5.0E2	-7.38649E-2	-8.80007E1	0.0E0	-8.80008E1	5.00679E-4	5.05447E-3	9.30071E-2	2.73171E1	-3.26687E1	-3.26386E1	2.68052E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
1.9E1	2.24E3	4.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80004E1	-4.76837E-5	-8.80005E1	6.19888E-4	5.29289E-3	9.32217E-2	2.73147E1	-3.27005E1	-3.26068E1	2.68125E1	1.73454E-7	2.51334E-3	2.51334E-3	6.28552E-3	1.99456E-1
2.0E1	3.51E2	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80008E1	2.6226E-4	-8.80007E1	3.33786E-4	5.03063E-3	9.29832E-2	2.73033E1	-3.26868E1	-3.26508E1	2.68224E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80007E1	7.15256E-5	-8.80008E1	5.24521E-4	5.24521E-3	9.29356E-2	2.73204E1	-3.26708E1	-3.2639E1	2.67824E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00021E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80011E1	7.15256E-5	-8.80008E1	5.96046E-4	5.24521E-3	9.31501E-2	2.72745E1	-3.26428E1	-3.2608E1	2.67601E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80011E1	5.24521E-4	-8.80007E1	5.24521E-4	5.14984E-3	9.27448E-2	2.73187E1	-3.26738E1	-3.26054E1	2.67481E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9951E-1