[Scan]
initial_time=2016-02-16T02:53:52
final_time=2016-02-16T02:54:11
ip_count=19
run=1030
dataset=7
scan=519
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.8151E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.68561E-10
ql2_vset=
ql2_vmon=3.8147E-4
ql2_imon=3.847E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.00775E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.83551E-10
mult1=-1.06162E-8
mult2=-2.7565E-9
rf_tmon=-4.09309E-3
rf_agc=3.44303E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.4713E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=2.00795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05352E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.05586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.18639E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04616E0
lens1_imon=1.78432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.57535E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.10807E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.8872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.93837E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=1.26893E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93752E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.28976E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.99759E-10
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2604E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26505E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.09591E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=2.00975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71551E-1
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.20362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.32055E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01623E1
cs_anode2_imon=2.29002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72831E1
iondef1_imon=1.11248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68381E1
iondef4_imon=1.06251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.00541E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.68738E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.82839E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39365E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.72889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.80157E0
defgridb_imon=6.64019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.88434E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77352E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66176E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=1.00885E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62624E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66199E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8719E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-1.99323E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.97984E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28368E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.401E4	1.4E1	1.47E2	4.1E1	-7.39421E-2	-8.80012E1	3.8147E-4	-8.80008E1	4.52995E-4	5.38826E-3	9.31978E-2	2.73039E1	-3.26596E1	-3.25947E1	2.67896E1	1.73379E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
2.0E0	6.009E3	5.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80009E1	-2.14577E-4	-8.80007E1	4.52995E-4	5.45979E-3	9.32217E-2	2.73779E1	-3.25905E1	-3.26701E1	2.68007E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9951E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.8001E1	-7.15256E-5	-8.80005E1	2.86102E-4	5.26905E-3	9.32455E-2	2.72906E1	-3.26486E1	-3.26301E1	2.67972E1	1.73605E-7	2.51611E-3	2.51611E-3	6.27901E-3	1.99883E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80009E1	3.57628E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.30786E-2	2.73308E1	-3.26505E1	-3.26034E1	2.68118E1	1.73605E-7	2.51472E-3	2.51472E-3	6.31779E-3	1.98628E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80008E1	3.33786E-4	-8.80004E1	6.67572E-4	4.86374E-3	9.29594E-2	2.73375E1	-3.26573E1	-3.26325E1	2.68268E1	1.73528E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.99224E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80009E1	1.19209E-4	-8.80004E1	8.58307E-4	5.34058E-3	9.3627E-2	2.73291E1	-3.26452E1	-3.26314E1	2.67989E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80012E1	2.6226E-4	-8.80003E1	6.19888E-4	5.14984E-3	9.31263E-2	2.73249E1	-3.26579E1	-3.26296E1	2.67974E1	1.73309E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.8001E1	4.29153E-4	-8.80003E1	9.05991E-4	5.45979E-3	9.27448E-2	2.72915E1	-3.26366E1	-3.26691E1	2.68046E1	1.73454E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98419E-1
1.2E1	3.14E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80011E1	1.19209E-4	-8.80004E1	6.19888E-4	5.50747E-3	9.29117E-2	2.73231E1	-3.26506E1	-3.262E1	2.67896E1	1.73531E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9917E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80012E1	2.14577E-4	-8.80005E1	6.91414E-4	5.29289E-3	9.27687E-2	2.73195E1	-3.26633E1	-3.2596E1	2.67992E1	1.73528E-7	2.52473E-3	2.52473E-3	6.3074E-3	1.99754E-1
1.4E1	7.1E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80011E1	2.86102E-4	-8.80006E1	8.82149E-4	5.29289E-3	9.29117E-2	2.72721E1	-3.26645E1	-3.26777E1	2.6813E1	1.73531E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.99E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80014E1	1.66893E-4	-8.80004E1	6.67572E-4	5.48363E-3	9.26495E-2	2.74302E1	-3.27865E1	-3.25788E1	2.68011E1	1.73379E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99456E-1
1.6E1	3.147E3	3.0E0	6.47E2	4.41E2	-7.286E-2	-8.80012E1	9.53674E-5	-8.80007E1	4.52995E-4	5.43594E-3	9.27925E-2	2.726E1	-3.26699E1	-3.2638E1	2.67286E1	1.73457E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.97984E-1
1.7E1	3.8727E4	1.8E1	6.87E2	4.7E2	-7.25507E-2	-8.80013E1	-4.29153E-4	-8.80006E1	3.33786E-4	5.53131E-3	9.31263E-2	2.73345E1	-3.26663E1	-3.26206E1	2.68364E1	1.73492E-7	2.51552E-3	2.51552E-3	6.31014E-3	1.99283E-1
1.8E1	1.71066E5	1.09E2	7.27E2	5.0E2	-7.22418E-2	-8.80013E1	1.90735E-4	-8.80006E1	2.14577E-4	5.19753E-3	9.2864E-2	2.73086E1	-3.26496E1	-3.26083E1	2.67758E1					
1.9E1	2.285E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80015E1	3.33786E-4	-8.80005E1	2.86102E-4	5.26905E-3	9.27925E-2	2.73105E1	-3.27077E1	-3.26314E1	2.67656E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9883E-1
2.0E1	3.39E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80015E1	5.24521E-4	-8.80004E1	4.76837E-4	4.93526E-3	9.30071E-2	2.73334E1	-3.26956E1	-3.2593E1	2.67974E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80014E1	2.6226E-4	-8.80007E1	6.4373E-4	4.95911E-3	9.28879E-2	2.73216E1	-3.26652E1	-3.2626E1	2.67944E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00325E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80011E1	3.8147E-4	-8.80009E1	4.29153E-4	5.03063E-3	9.31978E-2	2.73193E1	-3.26496E1	-3.26349E1	2.67729E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.01022E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80013E1	3.8147E-4	-8.80006E1	3.09944E-4	5.48363E-3	9.33647E-2	2.72831E1	-3.26505E1	-3.2604E1	2.68381E1	1.73531E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.97984E-1