[Scan]
initial_time=2016-02-16T02:54:18
final_time=2016-02-16T02:54:38
ip_count=19
run=1030
dataset=7
scan=520
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81558E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.67214E-10
ql2_vset=
ql2_vmon=2.14577E-4
ql2_imon=4.06146E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.91815E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=7.81071E-10
mult1=-1.1414E-8
mult2=-2.85634E-9
rf_tmon=-4.00773E-3
rf_agc=3.40726E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.69406E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61371E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.04901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.2095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01413E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.5947E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.99279E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.6639E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.89765E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=1.89024E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=1.28075E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=3.28219E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=7.11656E-10
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-6.52862E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26669E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26392E1
iondef2_imon=1.58444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.79038E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.14236E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73451E-1
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00927E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65342E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.87314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.29398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.81863E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.61407E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55889E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=1.95719E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.18696E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61521E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=5.17866E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92969E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65865E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=1.0115E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62264E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66337E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.83939E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.408E4	9.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80011E1	-3.57628E-4	-8.80007E1	3.57628E-4	5.03063E-3	9.29594E-2	2.72986E1	-3.26714E1	-3.26272E1	2.67671E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.99E-1
2.0E0	5.613E3	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.8001E1	-9.53674E-5	-8.80001E1	5.48363E-4	4.98295E-3	9.3317E-2	2.73144E1	-3.26863E1	-3.26556E1	2.67896E1	1.73383E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80012E1	1.19209E-4	-8.80002E1	3.09944E-4	5.14984E-3	9.33886E-2	2.73161E1	-3.2645E1	-3.26217E1	2.67535E1	1.73529E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99977E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80008E1	-2.14577E-4	-8.80003E1	4.76837E-4	5.17368E-3	9.33886E-2	2.73213E1	-3.26374E1	-3.26242E1	2.68142E1	1.73531E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.8001E1	-1.43051E-4	-8.80005E1	4.52995E-4	4.86374E-3	9.29117E-2	2.7329E1	-3.26197E1	-3.26499E1	2.67595E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
6.0E0	3.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80009E1	-3.57628E-4	-8.80007E1	5.72205E-4	4.88758E-3	9.27925E-2	2.72886E1	-3.26782E1	-3.26133E1	2.68026E1	1.73462E-7	2.50955E-3	2.50955E-3	6.30221E-3	1.99119E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.8001E1	9.53674E-5	-8.80007E1	6.67572E-4	4.88758E-3	9.29832E-2	2.72684E1	-3.26813E1	-3.26368E1	2.68004E1	1.73525E-7	2.51642E-3	2.51642E-3	6.3074E-3	1.98551E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8001E1	2.38419E-5	-8.80006E1	5.96046E-4	5.29289E-3	9.29594E-2	2.72845E1	-3.26437E1	-3.26272E1	2.68226E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.2E1	3.62E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80009E1	4.76837E-5	-8.80004E1	5.48363E-4	4.95911E-3	9.28164E-2	2.72883E1	-3.26549E1	-3.2599E1	2.67677E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.8001E1	4.76837E-5	-8.80006E1	6.19888E-4	4.98295E-3	9.31263E-2	2.72991E1	-3.26963E1	-3.26579E1	2.6801E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.9985E-1
1.4E1	7.15E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80012E1	4.76837E-5	-8.80004E1	5.72205E-4	5.29289E-3	9.2864E-2	2.72889E1	-3.26825E1	-3.26002E1	2.67511E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98937E-1
1.5E1	8.0E1	1.0E0	6.06E2	4.11E2	-7.286E-2	-8.80008E1	1.19209E-4	-8.80003E1	5.72205E-4	5.19753E-3	9.31501E-2	2.71663E1	-3.25521E1	-3.27143E1	2.68136E1	1.73454E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99283E-1
1.6E1	3.214E3	3.0E0	6.47E2	4.41E2	-7.286E-2	-8.8001E1	3.09944E-4	-8.80005E1	9.29832E-4	4.74453E-3	9.3317E-2	2.73225E1	-3.26573E1	-3.2638E1	2.68119E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99283E-1
1.7E1	3.9031E4	2.5E1	6.87E2	4.7E2	-7.30918E-2	-8.80008E1	3.57628E-4	-8.80003E1	7.39098E-4	5.00679E-3	9.3174E-2	2.73249E1	-3.26591E1	-3.2632E1	2.68105E1	1.73529E-7	2.51225E-3	2.51225E-3	6.34588E-3	1.98937E-1
1.8E1	1.71041E5	1.02E2	7.27E2	5.0E2	-7.25507E-2	-8.80007E1	3.33786E-4	-8.80007E1	9.53674E-5	5.03063E-3	9.31025E-2	2.73424E1	-3.2675E1	-3.26499E1	2.67458E1	1.73529E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98937E-1
1.9E1	2.258E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80006E1	4.76837E-5	-8.80005E1	3.09944E-4	4.72069E-3	9.30309E-2	2.73039E1	-3.26526E1	-3.26496E1	2.67966E1	1.73605E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99577E-1
2.0E1	3.8E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80009E1	2.14577E-4	-8.80007E1	5.00679E-4	4.76837E-3	9.28164E-2	2.73216E1	-3.26284E1	-3.25729E1	2.67559E1	1.73531E-7	2.51203E-3	2.51203E-3	6.34518E-3	1.98153E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80008E1	3.57628E-4	-8.80004E1	2.6226E-4	5.24521E-3	9.29832E-2	2.73213E1	-3.2641E1	-3.26248E1	2.68088E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80012E1	1.19209E-4	-8.80008E1	2.38419E-5	5.4121E-3	9.30309E-2	2.72909E1	-3.26296E1	-3.26331E1	2.6763E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9917E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80012E1	2.14577E-4	-8.80007E1	2.86102E-4	5.03063E-3	9.30548E-2	2.73375E1	-3.26392E1	-3.26669E1	2.67926E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9917E-1