[Scan]
initial_time=2016-02-16T02:55:11
final_time=2016-02-16T02:55:31
ip_count=19
run=1030
dataset=7
scan=522
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80546E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.54972E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=3.85916E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.90403E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=7.6673E-10
mult1=-1.04869E-8
mult2=-2.82041E-9
rf_tmon=-4.83687E-3
rf_agc=3.27087E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.8451E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6845E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20155E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53047E1
cs_ef1b_imon=3.06732E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02411E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=2.17587E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04009E0
lens1_imon=1.16289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65008E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.59541E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.02144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.65651E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11158E1
os_restr1_imon=2.89946E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=1.90263E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63143E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27805E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0229E1
cs_anode1_imon=3.27062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=7.18617E-10
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.59399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98824E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.74603E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=2.02084E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.13925E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.823E-1
os_ea2_imon=-4.22766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63724E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35255E-1
os_ef2bup_imon=-5.08719E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10585E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02192E1
cs_anode2_imon=2.29442E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.11617E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.90253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.55256E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06179E0
cs_ionaccel_imon=-1.89343E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47014E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.94501E-6
window_vset=0.0E0
window_vmon=1.95097E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39515E-4
mask2_vset=0.0E0
mask2_vmon=-1.86535E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.90027E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55025E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=5.05746E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.11568E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66182E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=1.00916E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66375E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.85622E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.64622E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3723E4	1.5E1	1.47E2	4.1E1	-7.3401E-2	-8.80009E1	3.09944E-4	-8.80007E1	4.05312E-4	5.17368E-3	9.33409E-2	2.73104E1	-3.2639E1	-3.2626E1	2.68192E1	1.73457E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98322E-1
2.0E0	5.848E3	4.0E0	3.16E2	1.6E2	-7.32464E-2	-8.8001E1	2.14577E-4	-8.80006E1	1.43051E-4	5.22137E-3	9.32217E-2	2.72939E1	-3.26678E1	-3.26017E1	2.6767E1	1.73309E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98491E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80009E1	3.09944E-4	-8.80006E1	4.76837E-5	5.53131E-3	9.31263E-2	2.73653E1	-3.27051E1	-3.25977E1	2.67854E1	1.73448E-7	2.51611E-3	2.51611E-3	6.31879E-3	1.99523E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.8001E1	-2.38419E-5	-8.80006E1	2.38419E-4	5.62668E-3	9.31025E-2	2.73086E1	-3.26685E1	-3.26048E1	2.67692E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80013E1	-7.15256E-5	-8.80007E1	3.57628E-4	5.4121E-3	9.30548E-2	2.72992E1	-3.26602E1	-3.26213E1	2.67972E1	1.73235E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80015E1	4.76837E-5	-8.80007E1	2.86102E-4	5.84126E-3	9.30071E-2	2.73033E1	-3.26319E1	-3.26366E1	2.68389E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.8001E1	2.14577E-4	-8.80006E1	5.72205E-4	5.74589E-3	9.32932E-2	2.73153E1	-3.26669E1	-3.26146E1	2.67517E1	1.73309E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80012E1	-3.8147E-4	-8.80004E1	7.39098E-4	5.62668E-3	9.34124E-2	2.73225E1	-3.26543E1	-3.2611E1	2.68334E1	1.73303E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.2E1	3.64E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80012E1	-7.15256E-5	-8.80005E1	2.86102E-4	5.60284E-3	9.30548E-2	2.73357E1	-3.26356E1	-3.26326E1	2.68394E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98764E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-3.57628E-4	-8.80008E1	5.24521E-4	5.4121E-3	9.30309E-2	2.72751E1	-3.26927E1	-3.26254E1	2.6737E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.98075E-1
1.4E1	6.49E2	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80011E1	-1.90735E-4	-8.80007E1	4.29153E-4	5.14984E-3	9.29832E-2	2.72799E1	-3.26543E1	-3.26344E1	2.6774E1	1.73529E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.97216E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80011E1	-3.8147E-4	-8.80003E1	4.05312E-4	5.29289E-3	9.33886E-2	2.74265E1	-3.27672E1	-3.25191E1	2.67788E1	1.73228E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.97903E-1
1.6E1	3.21E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80011E1	-2.14577E-4	-8.80005E1	5.00679E-4	5.17368E-3	9.34362E-2	2.73021E1	-3.26536E1	-3.26014E1	2.6786E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9917E-1
1.7E1	3.911E4	2.3E1	6.87E2	4.7E2	-7.36328E-2	-8.80013E1	-1.66893E-4	-8.80007E1	4.76837E-4	5.34058E-3	9.32455E-2	2.73198E1	-3.2667E1	-3.26395E1	2.67986E1	1.73528E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99048E-1
1.8E1	1.69856E5	9.4E1	7.27E2	5.0E2	-7.286E-2	-8.80014E1	-3.09944E-4	-8.80004E1	5.96046E-4	5.22137E-3	9.29356E-2	2.73246E1	-3.26585E1	-3.26042E1	2.6819E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9968E-1
1.9E1	2.339E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80012E1	2.38419E-5	-8.8E1	5.72205E-4	5.48363E-3	9.31025E-2	2.73351E1	-3.26681E1	-3.26002E1	2.6789E1	1.73528E-7	2.5225E-3	2.5225E-3	6.30182E-3	2.00108E-1
2.0E1	3.2E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80011E1	9.53674E-5	-8.80004E1	4.52995E-4	5.57899E-3	9.30071E-2	2.72793E1	-3.26615E1	-3.26266E1	2.67938E1	1.73529E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00151E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80014E1	1.19209E-4	-8.80003E1	2.38419E-4	5.126E-3	9.30071E-2	2.73057E1	-3.26633E1	-3.25948E1	2.68412E1	1.73379E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00325E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80012E1	-3.57628E-4	-8.80006E1	1.43051E-4	5.31673E-3	9.31501E-2	2.73311E1	-3.26461E1	-3.26443E1	2.68346E1	1.73454E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.00499E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80015E1	-2.14577E-4	-8.80002E1	1.90735E-4	5.43594E-3	9.31263E-2	2.73195E1	-3.26675E1	-3.26128E1	2.68124E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.00705E-1