[Scan]
initial_time=2016-02-16T02:56:05
final_time=2016-02-16T02:56:24
ip_count=19
run=1030
dataset=7
scan=524
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79584E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.57308E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=3.95632E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.93231E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=7.87878E-10
mult1=-9.34568E-9
mult2=-2.78597E-9
rf_tmon=-4.50358E-3
rf_agc=3.39285E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=3.44908E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.93967E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20261E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=3.0621E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=2.19711E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=3.00059E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.58337E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=3.01971E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.69573E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.8866E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.26837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91832E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.28417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.84881E-10
tplens_vset=1.4E-1
tplens_vmon=1.65559E0
tplens_imon=3.02779E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98583E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.85952E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2928E0
ionrepsh_imon=2.02155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33557E1
lens5b_imon=2.2102E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74438E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59884E-1
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00913E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70962E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64999E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83909E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=2.8734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.29824E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.98596E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.61443E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09191E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.64266E-6
window_vset=0.0E0
window_vmon=1.9973E-1
window_imon=-9.82917E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.41702E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5532E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=5.22543E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.38588E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66279E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3081E1
cs_fil1_imon=1.00975E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6316E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66373E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.10325E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72681E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-1.93938E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22399E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=1.98541E-1
chamber_ion_pmon=1.7353E-7
chamber_cvt_pmon=2.51322E-3
foreline_cvt_pmon=2.51322E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67894E-1
res40_imon=-2.70317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.363E4	1.3E1	1.47E2	4.1E1	-7.13915E-2	-8.80013E1	-5.00679E-4	-8.80001E1	6.91414E-4	5.126E-3	9.3174E-2	2.72978E1	-3.26473E1	-3.26103E1	2.67833E1	1.73383E-7	2.51847E-3	2.51847E-3	6.34518E-3	1.9934E-1
2.0E0	5.833E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80012E1	-5.96046E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.32932E-2	2.73185E1	-3.26559E1	-3.26025E1	2.67882E1	1.73324E-7	2.5216E-3	2.5216E-3	6.32273E-3	1.99498E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80009E1	-7.15256E-5	-8.79999E1	5.48363E-4	5.45979E-3	9.34124E-2	2.73305E1	-3.26508E1	-3.26396E1	2.67688E1	1.73525E-7	2.5199E-3	2.5199E-3	6.31321E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80008E1	1.43051E-4	-8.80003E1	5.00679E-4	5.17368E-3	9.3174E-2	2.7278E1	-3.26726E1	-3.26579E1	2.67499E1	1.73383E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80009E1	-7.15256E-5	-8.80003E1	3.33786E-4	5.24521E-3	9.34124E-2	2.72883E1	-3.26963E1	-3.2605E1	2.6774E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00021E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.286E-2	-8.80011E1	-1.43051E-4	-8.80001E1	5.48363E-4	5.65052E-3	9.31978E-2	2.7321E1	-3.26499E1	-3.26597E1	2.6777E1	1.73529E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00151E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.8001E1	-3.8147E-4	-8.80004E1	9.29832E-4	5.29289E-3	9.32932E-2	2.72797E1	-3.2662E1	-3.26307E1	2.68016E1	1.73454E-7	2.51771E-3	2.51771E-3	6.35692E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8001E1	-1.90735E-4	-8.80003E1	4.29153E-4	5.60284E-3	9.32217E-2	2.73021E1	-3.26482E1	-3.26326E1	2.67824E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
1.2E1	3.42E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80009E1	2.38419E-5	-8.80005E1	5.24521E-4	5.14984E-3	9.33647E-2	2.72847E1	-3.2647E1	-3.26056E1	2.68484E1	1.73379E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80007E1	-2.6226E-4	-8.80007E1	4.29153E-4	5.48363E-3	9.34362E-2	2.73189E1	-3.2644E1	-3.2608E1	2.68214E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.9911E-1
1.4E1	7.36E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80011E1	-2.14577E-4	-8.80003E1	3.33786E-4	5.26905E-3	9.33409E-2	2.73135E1	-3.26609E1	-3.26146E1	2.6768E1	1.73605E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.9911E-1
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80011E1	-2.6226E-4	-8.80005E1	-4.76837E-5	5.4121E-3	9.37462E-2	2.71705E1	-3.25293E1	-3.2647E1	2.67956E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
1.6E1	3.027E3	2.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80013E1	-2.14577E-4	-8.80004E1	1.90735E-4	5.10216E-3	9.30786E-2	2.72892E1	-3.26632E1	-3.26691E1	2.67555E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.99283E-1
1.7E1	3.8513E4	1.6E1	6.87E2	4.7E2	-7.23189E-2	-8.80011E1	-4.76837E-5	-8.80003E1	3.57628E-4	5.65052E-3	9.30071E-2	2.73111E1	-3.26482E1	-3.26014E1	2.68124E1	1.73457E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9934E-1
1.8E1	1.6959E5	9.1E1	7.27E2	5.0E2	-7.11597E-2	-8.80012E1	-7.15256E-5	-8.80002E1	2.38419E-5	5.19753E-3	9.3174E-2	2.73291E1	-3.26663E1	-3.26338E1	2.67884E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99283E-1
1.9E1	2.185E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80011E1	-3.8147E-4	-8.80002E1	2.6226E-4	5.14984E-3	9.31263E-2	2.73454E1	-3.26699E1	-3.26446E1	2.67908E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99977E-1
2.0E1	3.08E2	0.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80009E1	-1.90735E-4	-8.80004E1	1.90735E-4	5.10216E-3	9.29594E-2	2.7298E1	-3.27021E1	-3.26679E1	2.67866E1	1.73605E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9917E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80012E1	1.19209E-4	-8.80001E1	-7.15256E-5	5.19753E-3	9.3174E-2	2.72985E1	-3.26603E1	-3.26146E1	2.67992E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99456E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80015E1	-1.43051E-4	-8.80005E1	-2.6226E-4	5.26905E-3	9.30309E-2	2.72823E1	-3.26693E1	-3.26296E1	2.67523E1	1.73379E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99977E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80014E1	0.0E0	-8.80005E1	2.14577E-4	5.57899E-3	9.30309E-2	2.7308E1	-3.26685E1	-3.26089E1	2.6798E1	1.7353E-7	2.51322E-3	2.51322E-3	6.31012E-3	1.98541E-1