[Scan]
initial_time=2016-02-16T02:57:24
final_time=2016-02-16T02:57:44
ip_count=19
run=1030
dataset=7
scan=527
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.90532E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.41143E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=3.80909E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.86045E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.78985E-10
mult1=-1.03954E-8
mult2=-2.81751E-9
rf_tmon=-4.8889E-3
rf_agc=3.23367E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.03166E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.9149E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=3.06379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=2.19605E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03773E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.60036E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.73387E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15571E1
os_ea1_imon=1.9136E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=1.27651E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93183E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=3.2775E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.24304E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-1.18377E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2637E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2637E1
iondef2_imon=1.59505E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.99721E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=2.02828E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34106E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74345E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27747E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.32229E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.29542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72678E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89946E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.98643E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64179E0
defgridb_imon=6.3906E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=4.99847E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33504E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66222E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.00856E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22326E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4015E4	1.8E1	1.47E2	4.1E1	-7.53334E-2	-8.80013E1	9.53674E-5	-8.80004E1	2.14577E-4	5.43594E-3	9.31501E-2	2.72784E1	-3.26399E1	-3.26521E1	2.68065E1	1.73241E-7	2.51393E-3	2.51393E-3	6.29684E-3	1.99394E-1
2.0E0	5.75E3	1.1E1	3.16E2	1.6E2	-7.40967E-2	-8.80014E1	-2.6226E-4	-8.80003E1	3.8147E-4	5.43594E-3	9.31978E-2	2.73626E1	-3.26842E1	-3.2604E1	2.67986E1	1.73459E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.99227E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80015E1	-3.09944E-4	-8.80004E1	2.38419E-4	5.79357E-3	9.31263E-2	2.73045E1	-3.26679E1	-3.26826E1	2.67938E1	1.73605E-7	2.50914E-3	2.50914E-3	6.31299E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80012E1	-2.14577E-4	-8.80003E1	2.38419E-4	5.79357E-3	9.30786E-2	2.73243E1	-3.26308E1	-3.26362E1	2.6801E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00847E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80012E1	-2.6226E-4	-8.80007E1	2.14577E-4	5.4121E-3	9.34362E-2	2.72871E1	-3.26765E1	-3.26356E1	2.67728E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00876E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80016E1	-3.57628E-4	-8.80003E1	2.6226E-4	5.43594E-3	9.34124E-2	2.73153E1	-3.26254E1	-3.26344E1	2.6795E1	1.73454E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80017E1	7.15256E-5	-8.80003E1	2.14577E-4	5.72205E-3	9.33886E-2	2.73523E1	-3.26986E1	-3.25841E1	2.67956E1	1.73379E-7	2.50789E-3	2.50789E-3	6.31288E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80012E1	1.43051E-4	-8.80005E1	1.66893E-4	5.60284E-3	9.32693E-2	2.73075E1	-3.26579E1	-3.26272E1	2.67845E1	1.73454E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99456E-1
1.2E1	3.7E2	1.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80009E1	-3.33786E-4	-8.80004E1	2.6226E-4	5.24521E-3	9.32932E-2	2.72967E1	-3.26609E1	-3.26296E1	2.67956E1	1.73529E-7	2.5188E-3	2.5188E-3	6.35692E-3	1.98592E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.8001E1	2.6226E-4	-8.80004E1	5.00679E-4	5.19753E-3	9.35078E-2	2.72791E1	-3.26762E1	-3.26514E1	2.67824E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98661E-1
1.4E1	7.4E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80012E1	1.90735E-4	-8.80004E1	1.66893E-4	5.53131E-3	9.32932E-2	2.72805E1	-3.26615E1	-3.2596E1	2.68046E1	1.73457E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9883E-1
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.8001E1	-1.90735E-4	-8.80002E1	3.33786E-4	5.62668E-3	9.3317E-2	2.72877E1	-3.26585E1	-3.25924E1	2.67752E1	1.73379E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9963E-1
1.6E1	3.15E3	4.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80011E1	2.38419E-4	-8.80006E1	5.48363E-4	5.79357E-3	9.33409E-2	2.73224E1	-3.26671E1	-3.2626E1	2.67925E1	1.73454E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.98937E-1
1.7E1	3.8916E4	2.3E1	6.87E2	4.7E2	-7.36328E-2	-8.80013E1	-2.6226E-4	-8.80007E1	4.76837E-4	5.6982E-3	9.31978E-2	2.7245E1	-3.26621E1	-3.25954E1	2.68022E1	1.73467E-7	2.51823E-3	2.51823E-3	6.30239E-3	1.98914E-1
1.8E1	1.71098E5	1.01E2	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-7.15256E-5	-8.80004E1	3.57628E-4	5.43594E-3	9.31978E-2	2.72983E1	-3.26567E1	-3.26807E1	2.68076E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98937E-1
1.9E1	2.343E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80014E1	9.53674E-5	-8.80004E1	2.38419E-4	5.67436E-3	9.31978E-2	2.72962E1	-3.26489E1	-3.26406E1	2.67851E1	1.73462E-7	2.52301E-3	2.52301E-3	6.3074E-3	1.98465E-1
2.0E1	3.46E2	1.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80013E1	-2.38419E-5	-8.80005E1	4.05312E-4	5.48363E-3	9.32932E-2	2.73255E1	-3.26224E1	-3.26945E1	2.67866E1	1.73605E-7	2.51065E-3	2.51065E-3	6.3074E-3	1.98004E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80014E1	3.09944E-4	-8.80003E1	3.09944E-4	5.22137E-3	9.33647E-2	2.72774E1	-3.27045E1	-3.25883E1	2.67974E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80015E1	-4.76837E-5	-8.80005E1	1.43051E-4	5.07832E-3	9.33409E-2	2.73257E1	-3.26832E1	-3.26467E1	2.67648E1	1.73383E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9934E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80015E1	2.38419E-5	-8.80005E1	3.57628E-4	5.34058E-3	9.31263E-2	2.72678E1	-3.2637E1	-3.2637E1	2.68088E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9917E-1