[Scan]
initial_time=2016-02-16T02:58:18
final_time=2016-02-16T02:58:37
ip_count=19
run=1030
dataset=7
scan=529
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.85151E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.22547E-10
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=3.47126E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.78709E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=7.95317E-10
mult1=-1.07277E-8
mult2=-2.79846E-9
rf_tmon=-4.69868E-3
rf_agc=3.17174E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.83866E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=2.01518E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.06992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.20277E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06369E0
lens1_imon=1.58762E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.99676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.56072E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.57866E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.9005E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22142E0
cs_ionrep_imon=1.29951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.17664E-10
tplens_vset=1.4E-1
tplens_vmon=1.61076E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.59045E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.98728E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.80504E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24384E0
ionrepsh_imon=2.03429E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.20666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8407E-1
os_ea2_imon=-1.43153E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64321E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32552E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.89621E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23114E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.28137E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67943E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.85555E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.93076E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.87715E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.26318E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.51259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=6.6242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=4.21761E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.77042E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66399E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30758E1
cs_fil1_imon=1.00671E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63303E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66334E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.24551E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43194E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3632E4	1.5E1	1.47E2	4.1E1	-7.40967E-2	-8.80013E1	-3.57628E-4	-8.80004E1	2.14577E-4	5.57899E-3	9.3317E-2	2.73564E1	-3.27593E1	-3.25706E1	2.68028E1	1.73457E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
2.0E0	5.876E3	4.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80012E1	-3.57628E-4	-8.80003E1	4.52995E-4	5.48363E-3	9.35316E-2	2.7318E1	-3.26462E1	-3.26358E1	2.68142E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99803E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.8001E1	-4.76837E-4	-8.80003E1	3.33786E-4	5.17368E-3	9.31978E-2	2.73086E1	-3.26667E1	-3.26714E1	2.67956E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.99283E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80015E1	-4.29153E-4	-8.80005E1	5.72205E-4	5.50747E-3	9.31978E-2	2.72991E1	-3.26621E1	-3.26374E1	2.67978E1	1.73454E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80012E1	-7.15256E-5	-8.80005E1	1.19209E-4	5.50747E-3	9.3317E-2	2.73021E1	-3.26747E1	-3.26188E1	2.67962E1	1.73379E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.97903E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80013E1	-4.76837E-5	-8.80007E1	3.09944E-4	5.43594E-3	9.3174E-2	2.73688E1	-3.26413E1	-3.26478E1	2.68076E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.97478E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80015E1	0.0E0	-8.80004E1	3.57628E-4	5.48363E-3	9.33886E-2	2.72852E1	-3.26681E1	-3.25816E1	2.68179E1	1.73379E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80013E1	1.19209E-4	-8.80005E1	2.14577E-4	5.19753E-3	9.30071E-2	2.73395E1	-3.26474E1	-3.26039E1	2.67821E1	1.73319E-7	2.52197E-3	2.52197E-3	6.33341E-3	1.99447E-1
1.2E1	3.39E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80013E1	2.6226E-4	-8.80005E1	6.19888E-4	5.34058E-3	9.31978E-2	2.72678E1	-3.26182E1	-3.26885E1	2.68166E1	1.73286E-7	2.51758E-3	2.51758E-3	6.3074E-3	1.9965E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-2.38419E-5	-8.80004E1	4.05312E-4	6.05583E-3	9.34362E-2	2.73027E1	-3.26963E1	-3.262E1	2.67926E1	1.73529E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.9911E-1
1.4E1	6.93E2	2.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80014E1	-9.53674E-5	-8.80002E1	6.67572E-4	5.53131E-3	9.3174E-2	2.72733E1	-3.2635E1	-3.26939E1	2.67818E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98419E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80015E1	-1.66893E-4	-8.80006E1	4.05312E-4	5.22137E-3	9.32932E-2	2.73123E1	-3.27294E1	-3.26086E1	2.68358E1	1.73374E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.96945E-1
1.6E1	3.256E3	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80012E1	2.38419E-5	-8.80003E1	4.52995E-4	5.60284E-3	9.30548E-2	2.73363E1	-3.26669E1	-3.26434E1	2.67668E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.96638E-1
1.7E1	3.8669E4	1.7E1	6.87E2	4.7E2	-7.43285E-2	-8.80013E1	-1.66893E-4	-8.80004E1	3.8147E-4	5.34058E-3	9.3627E-2	2.72702E1	-3.26585E1	-3.26164E1	2.68046E1	1.73379E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.97045E-1
1.8E1	1.7106E5	1.0E2	7.27E2	5.0E2	-7.37874E-2	-8.80013E1	9.53674E-5	-8.80007E1	5.00679E-4	5.126E-3	9.33409E-2	2.73063E1	-3.26413E1	-3.26018E1	2.67992E1	1.73605E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.97731E-1
1.9E1	2.238E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80014E1	3.8147E-4	-8.80005E1	4.29153E-4	5.62668E-3	9.32932E-2	2.73429E1	-3.26849E1	-3.26561E1	2.67854E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.97216E-1
2.0E1	3.49E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80014E1	-1.90735E-4	-8.80006E1	4.76837E-5	5.57899E-3	9.3317E-2	2.73411E1	-3.26785E1	-3.26119E1	2.67833E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98491E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80014E1	-2.14577E-4	-8.80003E1	9.53674E-5	5.19753E-3	9.3174E-2	2.72624E1	-3.26681E1	-3.26032E1	2.67794E1	1.73531E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.9883E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80015E1	9.53674E-5	-8.80003E1	1.43051E-4	5.45979E-3	9.33886E-2	2.72964E1	-3.26724E1	-3.26115E1	2.67547E1	1.73228E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	1.90735E-4	-8.80003E1	0.0E0	5.60284E-3	9.33647E-2	2.73219E1	-3.26777E1	-3.26092E1	2.67943E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1