[Scan]
initial_time=2016-02-16T03:00:31
final_time=2016-02-16T03:00:50
ip_count=19
run=1030
dataset=7
scan=534
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.80975E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.67162E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=4.05264E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.71678E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=7.95817E-10
mult1=-8.95775E-9
mult2=-2.78249E-9
rf_tmon=-4.22403E-3
rf_agc=3.33276E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.7781E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.71669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19347E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53406E1
cs_ef1b_imon=3.05658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.20383E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02357E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.59541E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83878E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.74496E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11688E1
os_restr1_imon=2.88972E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.91183E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.25952E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93707E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.28327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.51328E-10
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98611E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.89802E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=2.02261E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34206E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74243E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41007E-1
os_ea2_imon=-2.70572E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6342E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.3237E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.27776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.8761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.54373E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.83467E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.37809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54434E0
defgridb_imon=5.89508E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.6681E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76751E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30773E1
cs_fil1_imon=1.00857E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66469E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73187E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28969E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3883E4	1.7E1	1.47E2	4.1E1	-7.27053E-2	-8.8001E1	-7.15256E-5	-8.80006E1	0.0E0	5.43594E-3	9.33886E-2	2.73145E1	-3.26502E1	-3.26437E1	2.67937E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9883E-1
2.0E0	5.924E3	6.0E0	3.16E2	1.6E2	-7.38649E-2	-8.8001E1	4.76837E-5	-8.80002E1	5.48363E-4	5.19753E-3	9.33886E-2	2.73381E1	-3.26458E1	-3.26176E1	2.68172E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98661E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80014E1	3.8147E-4	-8.80004E1	4.76837E-4	5.67436E-3	9.34124E-2	2.72951E1	-3.2675E1	-3.26095E1	2.67842E1	1.73454E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80012E1	3.09944E-4	-8.8E1	5.00679E-4	5.79357E-3	9.34124E-2	2.72727E1	-3.26134E1	-3.26314E1	2.68208E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.01022E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80012E1	4.52995E-4	-8.80002E1	5.48363E-4	5.6982E-3	9.34362E-2	2.7255E1	-3.26242E1	-3.26431E1	2.67503E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80013E1	1.90735E-4	-8.80004E1	3.33786E-4	5.45979E-3	9.33409E-2	2.72949E1	-3.26543E1	-3.2614E1	2.67898E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80012E1	0.0E0	-8.80008E1	5.72205E-4	5.26905E-3	9.33886E-2	2.73116E1	-3.27127E1	-3.25918E1	2.67887E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80013E1	-2.6226E-4	-8.80006E1	1.90735E-4	5.43594E-3	9.31025E-2	2.72973E1	-3.26567E1	-3.26104E1	2.6798E1	1.73567E-7	2.51052E-3	2.51052E-3	6.32644E-3	1.98883E-1
1.2E1	3.26E2	1.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80014E1	0.0E0	-8.80006E1	3.8147E-4	5.43594E-3	9.32693E-2	2.72907E1	-3.26669E1	-3.26362E1	2.6804E1					
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80015E1	-3.09944E-4	-8.80004E1	6.19888E-4	5.60284E-3	9.30786E-2	2.72889E1	-3.26579E1	-3.26152E1	2.6822E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.9911E-1
1.4E1	7.33E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80014E1	-2.38419E-4	-8.80005E1	5.24521E-4	5.34058E-3	9.33647E-2	2.73171E1	-3.26615E1	-3.26182E1	2.67776E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
1.5E1	5.5E1	1.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80012E1	-3.09944E-4	-8.80006E1	3.57628E-4	5.53131E-3	9.32693E-2	2.72895E1	-3.26897E1	-3.26266E1	2.67728E1	1.73454E-7	2.5188E-3	2.5188E-3	6.28552E-3	2.00151E-1
1.6E1	3.236E3	2.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80013E1	-1.19209E-4	-8.80006E1	2.86102E-4	5.36442E-3	9.3317E-2	2.72865E1	-3.26633E1	-3.26272E1	2.68064E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98764E-1
1.7E1	3.8894E4	2.1E1	6.87E2	4.7E2	-7.31692E-2	-8.80015E1	-4.29153E-4	-8.80008E1	6.91414E-4	5.36442E-3	9.30071E-2	2.72921E1	-3.2652E1	-3.26142E1	2.67653E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.00151E-1
1.8E1	1.71669E5	1.11E2	7.27E2	5.0E2	-7.27828E-2	-8.80015E1	-1.19209E-4	-8.80007E1	6.4373E-4	5.53131E-3	9.33409E-2	2.72991E1	-3.26711E1	-3.2647E1	2.678E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.97984E-1
1.9E1	2.339E3	3.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80016E1	-1.90735E-4	-8.80008E1	5.48363E-4	5.36442E-3	9.34362E-2	2.73225E1	-3.27125E1	-3.26116E1	2.67834E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99803E-1
2.0E1	3.19E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80013E1	-1.90735E-4	-8.80007E1	2.14577E-4	5.38826E-3	9.32693E-2	2.72961E1	-3.26668E1	-3.26036E1	2.67959E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80016E1	1.43051E-4	-8.80008E1	3.33786E-4	5.53131E-3	9.33647E-2	2.73083E1	-3.26559E1	-3.26305E1	2.67265E1	1.73464E-7	2.51345E-3	2.51345E-3	6.32784E-3	1.99337E-1
2.2E1	3.5E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80016E1	9.53674E-5	-8.80007E1	4.76837E-4	5.26905E-3	9.33886E-2	2.73122E1	-3.26679E1	-3.26166E1	2.68065E1	1.73605E-7	2.51642E-3	2.51642E-3	6.31902E-3	2.00018E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80014E1	-9.53674E-5	-8.80004E1	1.66893E-4	4.95911E-3	9.33886E-2	2.73165E1	-3.26723E1	-3.26266E1	2.6813E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00021E-1