[Scan]
initial_time=2016-02-16T03:00:57
final_time=2016-02-16T03:01:17
ip_count=19
run=1030
dataset=7
scan=535
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.75083E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.07157E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.81064E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.81308E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.67016E-10
mult1=-1.03665E-8
mult2=-2.82041E-9
rf_tmon=-4.21802E-3
rf_agc=3.35979E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.83627E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.81579E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=3.06488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.02386E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=2.18472E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99939E0
lens1_imon=1.38233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6451E1
os_ef1alow_imon=2.99851E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.59859E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.00129E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.9494E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11094E1
os_restr1_imon=2.88243E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=1.89236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63913E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29634E0
cs_ionrep_imon=1.29385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93795E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01607E1
cs_anode1_imon=3.25533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=7.12788E-10
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98788E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.99077E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=1.99855E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.17658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.14655E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76991E-1
os_ea2_imon=-3.37821E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61929E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67112E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10614E1
os_restr2_imon=2.86471E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67782E1
iondef4_imon=1.08781E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.87824E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.96593E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-1.75442E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.85813E-6
window_vset=0.0E0
window_vmon=1.86409E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.30565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.67721E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66571E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=1.0109E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62974E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66554E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2728E-1
cs_fil2_imon=-2.20582E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22459E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.06325E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4074E4	1.9E1	1.47E2	4.1E1	-7.21643E-2	-8.80014E1	-4.29153E-4	-8.80004E1	4.05312E-4	5.57899E-3	9.31025E-2	2.72426E1	-3.26136E1	-3.26596E1	2.6789E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.99E-1
2.0E0	5.748E3	4.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80014E1	-1.43051E-4	-8.80004E1	3.33786E-4	5.60284E-3	9.33647E-2	2.73448E1	-3.26627E1	-3.26392E1	2.67968E1	1.73531E-7	2.51954E-3	2.51954E-3	6.28056E-3	1.98491E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80014E1	-5.24521E-4	-8.80003E1	4.05312E-4	5.26905E-3	9.34601E-2	2.72841E1	-3.2644E1	-3.26543E1	2.68328E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80015E1	-4.29153E-4	-8.80004E1	5.48363E-4	5.53131E-3	9.32693E-2	2.73231E1	-3.26561E1	-3.26867E1	2.68196E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80016E1	-1.90735E-4	-8.80003E1	3.09944E-4	5.38826E-3	9.31978E-2	2.73393E1	-3.26464E1	-3.26272E1	2.67866E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80014E1	0.0E0	-8.80002E1	3.57628E-4	5.36442E-3	9.31263E-2	2.72787E1	-3.26332E1	-3.26482E1	2.68208E1	1.73529E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80016E1	4.76837E-5	-8.80004E1	5.00679E-4	5.57899E-3	9.3627E-2	2.72847E1	-3.26591E1	-3.26464E1	2.68112E1	1.73228E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.97216E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80013E1	-1.66893E-4	-8.80005E1	6.67572E-4	5.38826E-3	9.34362E-2	2.72986E1	-3.26838E1	-3.26431E1	2.67902E1	1.73379E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
1.2E1	3.44E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80011E1	-4.52995E-4	-8.80006E1	5.48363E-4	5.26905E-3	9.31501E-2	2.73057E1	-3.26771E1	-3.26212E1	2.67674E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.98153E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80011E1	-1.90735E-4	-8.80004E1	8.82149E-4	5.79357E-3	9.31978E-2	2.73556E1	-3.26885E1	-3.25942E1	2.67932E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97731E-1
1.4E1	7.14E2	3.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80013E1	-1.19209E-4	-8.80005E1	6.19888E-4	5.00679E-3	9.35078E-2	2.73237E1	-3.26783E1	-3.2638E1	2.67637E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98247E-1
1.5E1	5.8E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80013E1	-4.76837E-5	-8.80006E1	8.34465E-4	5.31673E-3	9.3317E-2	2.72787E1	-3.26627E1	-3.26212E1	2.68178E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98937E-1
1.6E1	3.202E3	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80013E1	2.14577E-4	-8.80004E1	5.24521E-4	5.6982E-3	9.34362E-2	2.72919E1	-3.26861E1	-3.25809E1	2.67752E1	1.73529E-7	2.51116E-3	2.51116E-3	6.29098E-3	1.98937E-1
1.7E1	3.9152E4	1.7E1	6.87E2	4.7E2	-7.37103E-2	-8.80012E1	4.76837E-5	-8.80002E1	4.52995E-4	5.62668E-3	9.30309E-2	2.73316E1	-3.26644E1	-3.25841E1	2.68028E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
1.8E1	1.70029E5	1.01E2	7.27E2	5.0E2	-7.286E-2	-8.80012E1	4.76837E-5	-8.80004E1	6.19888E-4	5.53131E-3	9.3317E-2	2.72787E1	-3.26711E1	-3.2638E1	2.68016E1	1.73457E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00021E-1
1.9E1	2.273E3	3.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80011E1	-1.43051E-4	-8.80004E1	7.62939E-4	5.55515E-3	9.32693E-2	2.72915E1	-3.26425E1	-3.26083E1	2.68157E1	1.73605E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.01022E-1
2.0E1	3.35E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80013E1	7.15256E-5	-8.80007E1	5.72205E-4	5.45979E-3	9.31978E-2	2.73297E1	-3.26957E1	-3.26116E1	2.67722E1	1.73383E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9985E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80014E1	9.53674E-5	-8.80006E1	2.38419E-4	5.126E-3	9.34362E-2	2.73074E1	-3.26718E1	-3.26538E1	2.68029E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80015E1	2.38419E-5	-8.80002E1	3.09944E-4	5.38826E-3	9.34362E-2	2.73099E1	-3.26639E1	-3.26639E1	2.67651E1	1.73459E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99896E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80012E1	-7.15256E-5	-8.80004E1	2.38419E-4	5.29289E-3	9.3317E-2	2.73129E1	-3.26645E1	-3.26434E1	2.67782E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.99283E-1