[Scan]
initial_time=2016-02-16T03:02:17
final_time=2016-02-16T03:02:37
ip_count=19
run=1030
dataset=7
scan=538
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.80012E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.91147E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=3.86715E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.73588E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=7.79355E-10
mult1=-1.09156E-8
mult2=-2.72389E-9
rf_tmon=-4.4429E-3
rf_agc=3.32334E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.76642E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05351E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53505E1
cs_ef1b_imon=3.06627E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.18684E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04422E0
lens1_imon=1.52745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63936E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.58019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=3.0138E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.77548E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11627E1
os_restr1_imon=2.88452E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=1.88599E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.26695E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=3.27653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=6.51479E-10
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26202E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26289E1
iondef2_imon=1.60107E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=3.75593E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=2.03571E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74356E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35108E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70939E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63782E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37572E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.88174E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.30137E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73173E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67792E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.87029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=3.11005E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-1.8552E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.52438E-1
window_imon=-9.44689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39352E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=8.6629E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.83302E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33911E1
os_fil1_imon=5.09221E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65811E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6632E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3077E1
cs_fil1_imon=1.00889E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62951E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66504E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29236E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72301E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22398E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86053E-1
res40_imon=-2.37997E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4095E4	1.7E1	1.47E2	4.1E1	-7.27053E-2	-8.80016E1	1.43051E-4	-8.80005E1	6.4373E-4	4.86374E-3	9.29594E-2	2.72827E1	-3.26862E1	-3.26054E1	2.6819E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.99E-1
2.0E0	5.758E3	5.0E0	3.16E2	1.6E2	-7.286E-2	-8.80015E1	-4.76837E-5	-8.80007E1	6.91414E-4	4.95911E-3	9.33647E-2	2.72971E1	-3.26817E1	-3.26107E1	2.67866E1	1.73457E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9917E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80015E1	2.38419E-4	-8.80006E1	3.8147E-4	5.03063E-3	9.34601E-2	2.73243E1	-3.26561E1	-3.2611E1	2.67836E1	1.73374E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80015E1	-1.43051E-4	-8.80003E1	2.6226E-4	5.36442E-3	9.32932E-2	2.73434E1	-3.26732E1	-3.25788E1	2.67866E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9883E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.0464E-2	-8.80014E1	0.0E0	-8.80003E1	6.4373E-4	5.53131E-3	9.32932E-2	2.73345E1	-3.26615E1	-3.26663E1	2.6786E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.03094E-2	-8.80013E1	2.6226E-4	-8.80003E1	6.91414E-4	5.34058E-3	9.31501E-2	2.7304E1	-3.26647E1	-3.26209E1	2.67987E1	1.73309E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.80014E1	-4.76837E-5	-8.80006E1	3.33786E-4	5.07832E-3	9.3174E-2	2.72491E1	-3.2633E1	-3.26744E1	2.67719E1	1.73605E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.00064E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80014E1	3.57628E-4	-8.80008E1	4.29153E-4	5.29289E-3	9.34124E-2	2.7357E1	-3.26708E1	-3.26012E1	2.68302E1	1.73525E-7	2.50834E-3	2.50834E-3	6.31902E-3	2.00386E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80014E1	-1.66893E-4	-8.80005E1	4.29153E-4	4.8399E-3	9.31263E-2	2.73159E1	-3.26603E1	-3.26386E1	2.68028E1	1.73457E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9968E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80013E1	5.24521E-4	-8.80002E1	4.76837E-4	5.29289E-3	9.32693E-2	2.73339E1	-3.27294E1	-3.25791E1	2.6807E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99456E-1
1.4E1	7.39E2	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.80012E1	1.43051E-4	-8.80004E1	3.33786E-4	5.57899E-3	9.31501E-2	2.72775E1	-3.26719E1	-3.26009E1	2.67895E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.8001E1	3.57628E-4	-8.8E1	3.09944E-4	5.22137E-3	9.32693E-2	2.73105E1	-3.27107E1	-3.2641E1	2.6789E1	1.73454E-7	2.52209E-3	2.52209E-3	6.28552E-3	1.99283E-1
1.6E1	3.189E3	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80013E1	2.6226E-4	-8.80003E1	5.24521E-4	5.19753E-3	9.2864E-2	2.73315E1	-3.26621E1	-3.26681E1	2.67824E1	1.73528E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.99931E-1
1.7E1	3.8396E4	1.8E1	6.87E2	4.7E2	-7.19325E-2	-8.80015E1	9.53674E-5	-8.80002E1	5.96046E-4	5.126E-3	9.30548E-2	2.72642E1	-3.27017E1	-3.2623E1	2.6792E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
1.8E1	1.69728E5	1.01E2	7.27E2	5.0E2	-7.25507E-2	-8.80014E1	-1.43051E-4	-8.80001E1	7.86781E-4	5.29289E-3	9.28402E-2	2.72913E1	-3.26639E1	-3.26248E1	2.68286E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00151E-1
1.9E1	2.262E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80017E1	2.38419E-5	-8.80003E1	6.4373E-4	5.29289E-3	9.30786E-2	2.72901E1	-3.26549E1	-3.26573E1	2.67716E1	1.73454E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
2.0E1	3.16E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80014E1	-4.76837E-4	-8.80004E1	6.19888E-4	5.34058E-3	9.30548E-2	2.72945E1	-3.26596E1	-3.26844E1	2.67445E1	1.73309E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80013E1	-4.05312E-4	-8.80006E1	2.14577E-4	4.95911E-3	9.30786E-2	2.73045E1	-3.26789E1	-3.25713E1	2.678E1	1.73454E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.01022E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80016E1	-2.38419E-4	-8.80003E1	5.24521E-4	5.31673E-3	9.31025E-2	2.72979E1	-3.26458E1	-3.26669E1	2.67986E1	1.73379E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99803E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80016E1	-9.53674E-5	-8.80001E1	5.24521E-4	5.24521E-3	9.30071E-2	2.73173E1	-3.26289E1	-3.26202E1	2.67792E1	1.73454E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1