[Scan]
initial_time=2016-02-16T03:02:44
final_time=2016-02-16T03:03:03
ip_count=19
run=1030
dataset=7
scan=539
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77972E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.24144E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=3.82316E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.7266E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=7.71534E-10
mult1=-9.9812E-9
mult2=-2.84037E-9
rf_tmon=-5.44971E-3
rf_agc=3.30512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.02474E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.73602E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=2.01191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.07532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.19973E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00891E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.99676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.56454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.91018E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=2.88467E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=1.91746E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27673E0
cs_ionrep_imon=1.28371E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.27354E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=7.08592E-10
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=3.88956E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=2.02489E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3406E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.91378E-1
os_ea2_imon=-3.5342E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24143E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31587E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.30588E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=3.19362E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.80241E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.56306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66021E0
defgridb_imon=6.38063E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33942E1
os_fil1_imon=4.51193E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66404E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.00817E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.98064E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76105E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73235E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.96843E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3796E4	3.1E1	1.47E2	4.1E1	-7.19325E-2	-8.80012E1	0.0E0	-8.80003E1	4.29153E-4	5.29289E-3	9.3174E-2	2.73252E1	-3.26708E1	-3.26278E1	2.67601E1	1.73531E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.9968E-1
2.0E0	5.605E3	4.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80011E1	1.66893E-4	-8.80003E1	5.48363E-4	5.53131E-3	9.32217E-2	2.72971E1	-3.26211E1	-3.26058E1	2.67938E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99283E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80014E1	-1.19209E-4	-8.80002E1	3.09944E-4	5.29289E-3	9.31501E-2	2.73265E1	-3.267E1	-3.26289E1	2.68105E1	1.73451E-7	2.50914E-3	2.50914E-3	6.3074E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80013E1	-3.57628E-4	-8.80003E1	4.76837E-4	5.31673E-3	9.29356E-2	2.73417E1	-3.26368E1	-3.26651E1	2.67505E1	1.73532E-7	2.51498E-3	2.51498E-3	6.31798E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80015E1	-1.66893E-4	-8.80005E1	5.00679E-4	4.93526E-3	9.2864E-2	2.73032E1	-3.26766E1	-3.26251E1	2.68203E1	1.73457E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80013E1	0.0E0	-8.80004E1	6.91414E-4	5.43594E-3	9.30071E-2	2.72886E1	-3.26291E1	-3.26162E1	2.6787E1	1.73422E-7	2.52137E-3	2.52137E-3	6.31182E-3	1.99889E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.8001E1	-4.29153E-4	-8.80002E1	5.96046E-4	5.00679E-3	9.31501E-2	2.72967E1	-3.26488E1	-3.26074E1	2.67758E1	1.73605E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80012E1	-5.96046E-4	-8.80005E1	1.66893E-4	4.98295E-3	9.32693E-2	2.73004E1	-3.26897E1	-3.26166E1	2.67873E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99803E-1
1.2E1	3.48E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80016E1	-1.43051E-4	-8.80006E1	3.09944E-4	5.10216E-3	9.33886E-2	2.72991E1	-3.2653E1	-3.26398E1	2.68028E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99283E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80015E1	0.0E0	-8.80003E1	3.33786E-4	5.126E-3	9.3174E-2	2.73181E1	-3.26461E1	-3.26531E1	2.6777E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.00363E-1
1.4E1	6.85E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80013E1	-1.19209E-4	-8.80003E1	5.24521E-4	5.22137E-3	9.3174E-2	2.72973E1	-3.27035E1	-3.26368E1	2.67974E1	1.73379E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00151E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.8001E1	1.90735E-4	-8.80001E1	1.66893E-4	5.36442E-3	9.31501E-2	2.73257E1	-3.26596E1	-3.26172E1	2.68018E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9917E-1
1.6E1	3.144E3	1.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80009E1	-1.43051E-4	-8.80001E1	2.86102E-4	5.00679E-3	9.31501E-2	2.73249E1	-3.26633E1	-3.26476E1	2.67764E1	1.73454E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
1.7E1	3.8641E4	2.6E1	6.87E2	4.7E2	-7.15461E-2	-8.80012E1	-2.14577E-4	-8.80003E1	2.86102E-4	5.22137E-3	9.34124E-2	2.73117E1	-3.27011E1	-3.25894E1	2.67529E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98592E-1
1.8E1	1.69271E5	1.16E2	7.27E2	5.0E2	-7.13915E-2	-8.80012E1	9.53674E-5	-8.80003E1	2.6226E-4	5.14984E-3	9.30786E-2	2.7257E1	-3.26753E1	-3.26536E1	2.68334E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
1.9E1	2.257E3	3.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80011E1	9.53674E-5	-8.80005E1	3.57628E-4	4.95911E-3	9.33647E-2	2.73116E1	-3.26944E1	-3.26077E1	2.67595E1	1.73605E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.9985E-1
2.0E1	3.22E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80012E1	2.38419E-5	-8.80005E1	9.53674E-5	5.05447E-3	9.31501E-2	2.73345E1	-3.26825E1	-3.2647E1	2.67824E1	1.73454E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80012E1	7.15256E-5	-8.80005E1	1.66893E-4	5.19753E-3	9.31263E-2	2.73334E1	-3.2636E1	-3.2652E1	2.67816E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00876E-1
2.2E1	6.3E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80012E1	0.0E0	-8.80003E1	3.57628E-4	4.98295E-3	9.34124E-2	2.72662E1	-3.26815E1	-3.25806E1	2.67686E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80013E1	-2.6226E-4	-8.80004E1	4.29153E-4	5.34058E-3	9.28879E-2	2.73087E1	-3.26579E1	-3.26597E1	2.67818E1	1.73235E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9968E-1