[Scan]
initial_time=2016-02-16T03:03:11
final_time=2016-02-16T03:03:30
ip_count=19
run=1030
dataset=7
scan=540
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78259E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.12056E-10
ql2_vset=
ql2_vmon=2.6226E-4
ql2_imon=3.8414E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.76332E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=7.97141E-10
mult1=-9.33101E-9
mult2=-2.75254E-9
rf_tmon=-4.95103E-3
rf_agc=3.27868E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.0046E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.69899E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05213E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.0883E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=2.17693E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02003E0
lens1_imon=1.78229E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64296E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.5586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.80111E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=1.90015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63353E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.28075E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.09283E-10
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.97551E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=2.0212E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.21834E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74285E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72862E-1
os_ea2_imon=-3.55518E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0075E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.2774E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.11192E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.92086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=3.55959E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02024E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.77804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3395E1
os_fil1_imon=4.41583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00884E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63513E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66529E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2252E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86322E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4217E4	1.5E1	1.47E2	4.1E1	-7.17779E-2	-8.80015E1	-4.76837E-5	-8.80001E1	4.29153E-4	5.34058E-3	9.3174E-2	2.73216E1	-3.26585E1	-3.2636E1	2.6792E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9883E-1
2.0E0	5.787E3	3.0E0	3.16E2	1.6E2	-7.11597E-2	-8.80017E1	-2.38419E-4	-8.8E1	2.86102E-4	5.24521E-3	9.34124E-2	2.73051E1	-3.26615E1	-3.26194E1	2.67547E1	1.73457E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80019E1	-1.43051E-4	-8.79998E1	5.24521E-4	5.34058E-3	9.31978E-2	2.73073E1	-3.26766E1	-3.26304E1	2.68015E1	1.73228E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00325E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80017E1	-1.90735E-4	-8.80003E1	6.4373E-4	5.57899E-3	9.32932E-2	2.73064E1	-3.26241E1	-3.26425E1	2.67751E1	1.73605E-7	2.51345E-3	2.51345E-3	6.31251E-3	1.99337E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80014E1	-4.52995E-4	-8.79999E1	3.8147E-4	5.34058E-3	9.32455E-2	2.7251E1	-3.26657E1	-3.26128E1	2.67734E1	1.73605E-7	2.51411E-3	2.51411E-3	6.31321E-3	1.99466E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80013E1	-9.53674E-5	-8.80003E1	2.6226E-4	5.45979E-3	9.31025E-2	2.73093E1	-3.26603E1	-3.26074E1	2.68118E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80013E1	-1.66893E-4	-8.80001E1	4.52995E-4	5.34058E-3	9.31263E-2	2.73009E1	-3.26512E1	-3.26368E1	2.67938E1	1.73379E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80013E1	-1.43051E-4	-8.80003E1	5.24521E-4	5.38826E-3	9.30786E-2	2.73222E1	-3.26673E1	-3.26054E1	2.678E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98764E-1
1.2E1	3.32E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80012E1	2.38419E-5	-8.80001E1	0.0E0	5.53131E-3	9.28164E-2	2.72985E1	-3.26296E1	-3.26374E1	2.67656E1	1.73454E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.98592E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.8001E1	-9.53674E-5	-8.80004E1	2.6226E-4	5.43594E-3	9.29117E-2	2.73285E1	-3.26579E1	-3.26248E1	2.67866E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98592E-1
1.4E1	6.38E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80012E1	-3.09944E-4	-8.80004E1	4.52995E-4	5.24521E-3	9.31263E-2	2.73009E1	-3.26675E1	-3.26476E1	2.67932E1	1.73529E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80011E1	2.14577E-4	-8.80005E1	3.8147E-4	5.76973E-3	9.31025E-2	2.72945E1	-3.26496E1	-3.26272E1	2.6803E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
1.6E1	3.186E3	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.8001E1	-4.76837E-5	-8.80008E1	2.14577E-4	5.53131E-3	9.30548E-2	2.73129E1	-3.26837E1	-3.26536E1	2.6777E1	1.73379E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.00151E-1
1.7E1	3.8647E4	2.2E1	6.87E2	4.7E2	-7.26282E-2	-8.80012E1	-5.00679E-4	-8.80007E1	2.86102E-4	5.57899E-3	9.29832E-2	2.72925E1	-3.2647E1	-3.26344E1	2.67613E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99283E-1
1.8E1	1.69997E5	9.7E1	7.27E2	5.0E2	-7.27828E-2	-8.80014E1	-4.05312E-4	-8.80007E1	4.76837E-4	5.43594E-3	9.30786E-2	2.73033E1	-3.26711E1	-3.26182E1	2.67866E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.98491E-1
1.9E1	2.504E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80013E1	-3.8147E-4	-8.80005E1	5.72205E-4	5.38826E-3	9.32455E-2	2.73558E1	-3.26602E1	-3.26413E1	2.67992E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98419E-1
2.0E1	3.5E2	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80014E1	-1.90735E-4	-8.80007E1	-2.38419E-5	5.50747E-3	9.30786E-2	2.7269E1	-3.26723E1	-3.2641E1	2.68208E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99456E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80013E1	-3.8147E-4	-8.80004E1	2.86102E-4	5.60284E-3	9.31263E-2	2.72642E1	-3.26711E1	-3.25978E1	2.67896E1	1.73529E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80012E1	-4.52995E-4	-8.80007E1	1.90735E-4	5.4121E-3	9.33409E-2	2.72839E1	-3.26649E1	-3.26095E1	2.67943E1	1.73153E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80012E1	2.6226E-4	-8.80006E1	1.43051E-4	5.03063E-3	9.31025E-2	2.72787E1	-3.26573E1	-3.26164E1	2.68154E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9968E-1