[Scan]
initial_time=2016-02-16T03:04:57
final_time=2016-02-16T03:05:17
ip_count=19
run=1030
dataset=7
scan=544
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.77266E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.0457E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=3.74722E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.72356E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=7.52318E-10
mult1=-9.93676E-9
mult2=-2.73698E-9
rf_tmon=-4.55077E-3
rf_agc=3.34507E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.73793E-10
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.06343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.18366E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.81414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.56426E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.02162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.93879E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=2.87494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=1.87502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.28327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=7.24244E-10
tplens_vset=1.4E-1
tplens_vmon=1.64261E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26856E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98838E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.91817E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24915E0
ionrepsh_imon=2.01058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45726E-1
os_ea2_imon=-3.30742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6408E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31733E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.27993E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67885E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88582E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.14081E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55913E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.46658E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.85144E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=5.01048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70745E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66357E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00872E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66387E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01608E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7787E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22326E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73383E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.94441E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3938E4	1.2E1	1.47E2	4.1E1	-7.21643E-2	-8.80013E1	1.66893E-4	-8.80003E1	4.29153E-4	5.50747E-3	9.31501E-2	2.73316E1	-3.26844E1	-3.26048E1	2.68151E1	1.73454E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97731E-1
2.0E0	5.702E3	2.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80015E1	4.76837E-5	-8.80005E1	7.39098E-4	5.26905E-3	9.35555E-2	2.72925E1	-3.26494E1	-3.26224E1	2.68328E1	1.73532E-7	2.51498E-3	2.51498E-3	6.33388E-3	1.97897E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80017E1	2.14577E-4	-8.80002E1	4.52995E-4	5.4121E-3	9.32455E-2	2.72733E1	-3.26639E1	-3.26278E1	2.68046E1	1.73528E-7	2.51248E-3	2.51248E-3	6.35223E-3	1.99931E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80013E1	1.66893E-4	-8.80004E1	4.52995E-4	5.36442E-3	9.33647E-2	2.73267E1	-3.26561E1	-3.26272E1	2.6798E1	1.73454E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80015E1	4.76837E-5	-8.80003E1	4.05312E-4	5.19753E-3	9.32217E-2	2.73157E1	-3.26986E1	-3.26278E1	2.68034E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80016E1	-1.66893E-4	-8.80002E1	5.00679E-4	5.14984E-3	9.32455E-2	2.72913E1	-3.26591E1	-3.25912E1	2.68004E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-1.43051E-4	-8.80004E1	5.72205E-4	5.45979E-3	9.32932E-2	2.73039E1	-3.26543E1	-3.25906E1	2.6834E1	1.73383E-7	2.52061E-3	2.52061E-3	6.29665E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80015E1	-2.14577E-4	-8.80003E1	4.05312E-4	5.36442E-3	9.33409E-2	2.72913E1	-3.26639E1	-3.26356E1	2.68196E1	1.73528E-7	2.51136E-3	2.51136E-3	6.31299E-3	1.99224E-1
1.2E1	2.96E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80012E1	-3.33786E-4	-8.80003E1	6.4373E-4	5.29289E-3	9.3317E-2	2.73015E1	-3.26663E1	-3.26398E1	2.68298E1	1.7353E-7	2.51268E-3	2.51268E-3	6.32371E-3	1.9914E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80011E1	-2.38419E-4	-8.80003E1	6.19888E-4	5.26905E-3	9.31978E-2	2.73369E1	-3.26963E1	-3.26212E1	2.6816E1					
1.4E1	7.13E2	2.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80012E1	-4.29153E-4	-8.80004E1	4.76837E-4	5.00679E-3	9.31978E-2	2.73122E1	-3.26992E1	-3.26225E1	2.67833E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80015E1	-1.90735E-4	-8.80007E1	3.09944E-4	5.24521E-3	9.3174E-2	2.72769E1	-3.26603E1	-3.2623E1	2.67938E1	1.73309E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9951E-1
1.6E1	3.193E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80015E1	1.90735E-4	-8.80004E1	7.39098E-4	4.93526E-3	9.31025E-2	2.73069E1	-3.26514E1	-3.26437E1	2.67824E1	1.73454E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.98419E-1
1.7E1	3.8408E4	2.5E1	6.87E2	4.7E2	-7.23964E-2	-8.80016E1	-7.15256E-5	-8.80003E1	8.10623E-4	5.57899E-3	9.32217E-2	2.73159E1	-3.26651E1	-3.262E1	2.67758E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9934E-1
1.8E1	1.70053E5	1.12E2	7.27E2	5.0E2	-7.29374E-2	-8.80016E1	-9.53674E-5	-8.80004E1	9.77516E-4	5.22137E-3	9.32217E-2	2.72709E1	-3.26849E1	-3.25876E1	2.67908E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
1.9E1	2.29E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80016E1	-1.43051E-4	-8.80004E1	9.77516E-4	5.24521E-3	9.32217E-2	2.72829E1	-3.26428E1	-3.26314E1	2.67926E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
2.0E1	3.68E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.8002E1	-4.05312E-4	-8.80003E1	8.82149E-4	4.98295E-3	9.31263E-2	2.72815E1	-3.2636E1	-3.26437E1	2.68186E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80015E1	-1.19209E-4	-8.80005E1	4.52995E-4	5.50747E-3	9.32217E-2	2.72931E1	-3.26795E1	-3.25864E1	2.68076E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
2.2E1	5.5E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80016E1	-2.38419E-5	-8.80003E1	4.05312E-4	5.72205E-3	9.32932E-2	2.72927E1	-3.2626E1	-3.26272E1	2.68268E1	1.73531E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98661E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80016E1	-1.66893E-4	-8.80005E1	5.72205E-4	5.24521E-3	9.32693E-2	2.72845E1	-3.26856E1	-3.26402E1	2.67885E1	1.73383E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00021E-1