[Scan]
initial_time=2016-02-16T03:05:24
final_time=2016-02-16T03:05:43
ip_count=19
run=1030
dataset=7
scan=545
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.82856E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.849E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=3.50761E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.64778E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=7.70354E-10
mult1=-1.12963E-8
mult2=-3.77371E-9
rf_tmon=-9.22874E-4
rf_agc=3.72614E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.72374E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20096E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=3.06595E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02535E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=2.18401E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00529E0
lens1_imon=1.59824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.56532E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.0328E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.84879E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=1.8821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27687E0
cs_ionrep_imon=1.27509E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93685E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.26525E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.68304E-10
tplens_vset=1.4E-1
tplens_vmon=1.6202E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.48639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26496E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98732E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.66282E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=2.01943E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65783E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.008E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70801E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-4.99091E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.28353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.12467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.83628E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=2.92706E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47727E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.75327E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.92151E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.2082E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.2384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=4.07345E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46718E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66381E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30738E1
cs_fil1_imon=1.00929E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66594E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22311E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61695E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4127E4	1.5E1	1.47E2	4.1E1	-7.34782E-2	-8.80016E1	4.76837E-5	-8.80008E1	6.19888E-4	5.07832E-3	9.36985E-2	2.73257E1	-3.26862E1	-3.2616E1	2.67984E1	1.73605E-7	2.50989E-3	2.50989E-3	6.29128E-3	2.00705E-1
2.0E0	6.029E3	4.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80016E1	-2.6226E-4	-8.80004E1	4.29153E-4	5.55515E-3	9.35316E-2	2.73235E1	-3.26585E1	-3.26211E1	2.67701E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00363E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80016E1	-7.15256E-5	-8.80004E1	5.72205E-4	5.36442E-3	9.35078E-2	2.73263E1	-3.2636E1	-3.26555E1	2.68018E1	1.73374E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80015E1	2.14577E-4	-8.80004E1	3.57628E-4	5.31673E-3	9.35793E-2	2.73305E1	-3.26567E1	-3.26301E1	2.67986E1	1.73309E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80016E1	1.19209E-4	-8.80004E1	5.48363E-4	5.72205E-3	9.34362E-2	2.73129E1	-3.26825E1	-3.26771E1	2.68118E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80013E1	-2.38419E-5	-8.80002E1	4.76837E-4	5.19753E-3	9.33409E-2	2.73225E1	-3.26879E1	-3.2632E1	2.68052E1	1.73383E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80016E1	1.43051E-4	-8.80003E1	3.33786E-4	5.88894E-3	9.35078E-2	2.72839E1	-3.26555E1	-3.26036E1	2.68204E1	1.73303E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80017E1	2.6226E-4	-8.80003E1	6.91414E-4	5.62668E-3	9.32693E-2	2.72926E1	-3.26704E1	-3.26698E1	2.68065E1	1.73311E-7	2.51405E-3	2.51405E-3	6.31808E-3	1.99199E-1
1.2E1	3.08E2	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80015E1	2.38419E-4	-8.80003E1	4.52995E-4	5.17368E-3	9.32693E-2	2.7283E1	-3.26429E1	-3.26111E1	2.67795E1					
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80018E1	4.52995E-4	-8.80002E1	4.52995E-4	5.17368E-3	9.36031E-2	2.7298E1	-3.27068E1	-3.26236E1	2.68034E1	1.73445E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.00202E-1
1.4E1	7.16E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80018E1	1.43051E-4	-8.80004E1	2.38419E-5	5.17368E-3	9.36508E-2	2.73033E1	-3.26717E1	-3.26464E1	2.68142E1	1.73531E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00363E-1
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80016E1	4.76837E-5	-8.80002E1	6.4373E-4	5.62668E-3	9.377E-2	2.73375E1	-3.26951E1	-3.25773E1	2.6816E1	1.73454E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98937E-1
1.6E1	2.975E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80017E1	5.72205E-4	-8.8E1	4.29153E-4	5.31673E-3	9.35793E-2	2.73369E1	-3.26701E1	-3.26156E1	2.678E1	1.73452E-7	2.51622E-3	2.51622E-3	6.30464E-3	1.98818E-1
1.7E1	3.8407E4	2.6E1	6.87E2	4.7E2	-7.27828E-2	-8.80013E1	5.24521E-4	-8.79997E1	5.00679E-4	5.22137E-3	9.3317E-2	2.73039E1	-3.26868E1	-3.26378E1	2.67929E1					
1.8E1	1.69384E5	9.1E1	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-2.38419E-5	-8.79997E1	2.86102E-4	5.38826E-3	9.32932E-2	2.72757E1	-3.26848E1	-3.26125E1	2.68138E1	1.73087E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
1.9E1	2.236E3	3.0E0	7.68E2	5.29E2	-7.10825E-2	-8.80012E1	0.0E0	-8.79999E1	3.33786E-4	5.29289E-3	9.32693E-2	2.73087E1	-3.26693E1	-3.2617E1	2.67897E1	1.73451E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99931E-1
2.0E1	3.27E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80013E1	-2.14577E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.33409E-2	2.73234E1	-3.26514E1	-3.26048E1	2.67806E1	1.73379E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80014E1	-1.43051E-4	-8.80005E1	3.8147E-4	5.14984E-3	9.34839E-2	2.72426E1	-3.26543E1	-3.26344E1	2.6804E1	1.73605E-7	2.51739E-3	2.51739E-3	6.28056E-3	2.00021E-1
2.2E1	5.3E1	1.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80013E1	-9.53674E-5	-8.80001E1	2.38419E-4	5.26905E-3	9.33409E-2	2.73257E1	-3.27204E1	-3.26402E1	2.67862E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80013E1	-1.90735E-4	-8.8E1	2.86102E-4	5.45979E-3	9.30786E-2	2.72992E1	-3.26496E1	-3.26384E1	2.67998E1	1.73531E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1