[Scan]
initial_time=2016-02-16T03:08:04
final_time=2016-02-16T03:08:23
ip_count=19
run=1030
dataset=7
scan=551
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.78078E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.21176E-10
ql2_vset=
ql2_vmon=1.66893E-4
ql2_imon=3.95024E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.66612E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.75373E-10
mult1=-1.05591E-8
mult2=-2.74855E-9
rf_tmon=-4.72872E-3
rf_agc=3.30512E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.16231E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68981E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.98085E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.0538E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53274E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.19852E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00705E0
lens1_imon=1.50267E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=3.00541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.58196E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83914E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.88539E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=2.85368E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=1.90794E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.23333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93806E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.2876E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.55918E-10
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.514E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=3.83437E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=1.99005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.22047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36878E-1
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71576E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59756E0
os_ef2alow_imon=-2.31677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90216E-1
os_ef2bup_imon=-5.0738E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.84179E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.29146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.87912E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.30198E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02026E2
cs_ionfocb_imon=1.47053E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56838E1
einzel_imon=7.88966E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.96563E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.69664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5532E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=4.18157E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5693E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66058E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30706E1
cs_fil1_imon=1.00934E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63687E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73187E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.58401E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4117E4	1.6E1	1.47E2	4.1E1	-7.29374E-2	-8.80023E1	1.19209E-4	-8.80004E1	1.90735E-4	5.45979E-3	9.33409E-2	2.72715E1	-3.26729E1	-3.2666E1	2.67926E1	1.73454E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99456E-1
2.0E0	5.705E3	9.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80017E1	-7.15256E-5	-8.80001E1	4.76837E-4	5.57899E-3	9.31978E-2	2.73104E1	-3.26484E1	-3.26461E1	2.67705E1	1.73459E-7	2.52131E-3	2.52131E-3	6.30212E-3	1.98561E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	-6.4373E-4	-8.80003E1	3.8147E-4	5.38826E-3	9.34601E-2	2.73225E1	-3.26392E1	-3.26236E1	2.6772E1	1.73532E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.98395E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.38419E-4	5.57899E-3	9.33409E-2	2.72612E1	-3.26543E1	-3.2608E1	2.67929E1	1.73528E-7	2.51677E-3	2.51677E-3	6.3157E-3	1.97601E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80018E1	-3.57628E-4	-8.80003E1	2.86102E-4	5.29289E-3	9.34601E-2	2.72968E1	-3.26555E1	-3.26242E1	2.67392E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.86102E-4	5.43594E-3	9.3317E-2	2.73002E1	-3.27068E1	-3.25954E1	2.67974E1	1.73309E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98153E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80019E1	-3.57628E-4	-8.80004E1	2.38419E-4	5.60284E-3	9.33409E-2	2.72669E1	-3.26306E1	-3.2604E1	2.67974E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.8002E1	-1.66893E-4	-8.80004E1	2.38419E-4	5.74589E-3	9.34362E-2	2.72775E1	-3.26543E1	-3.26633E1	2.67788E1	1.73531E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.9934E-1
1.2E1	3.21E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80018E1	-4.76837E-5	-8.80004E1	5.00679E-4	5.36442E-3	9.33647E-2	2.73129E1	-3.26062E1	-3.26446E1	2.67794E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98937E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80016E1	0.0E0	-8.80005E1	5.48363E-4	5.22137E-3	9.30786E-2	2.72696E1	-3.26645E1	-3.26302E1	2.68124E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99977E-1
1.4E1	7.14E2	1.0E0	5.66E2	3.82E2	-7.286E-2	-8.80015E1	4.76837E-5	-8.8E1	5.48363E-4	5.6982E-3	9.30071E-2	2.72998E1	-3.26596E1	-3.26242E1	2.67926E1	1.73454E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.00325E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80019E1	2.38419E-4	-8.80004E1	6.91414E-4	5.10216E-3	9.34124E-2	2.73171E1	-3.26717E1	-3.26176E1	2.67998E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00534E-1
1.6E1	3.066E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80017E1	3.33786E-4	-8.80002E1	3.09944E-4	5.19753E-3	9.32693E-2	2.73081E1	-3.26374E1	-3.26524E1	2.6789E1	1.73529E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.00847E-1
1.7E1	3.842E4	1.8E1	6.87E2	4.7E2	-7.31692E-2	-8.80018E1	1.66893E-4	-8.79999E1	4.76837E-4	5.48363E-3	9.32932E-2	2.73315E1	-3.26801E1	-3.25918E1	2.67902E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
1.8E1	1.68605E5	8.9E1	7.27E2	5.0E2	-7.24736E-2	-8.80015E1	2.6226E-4	-8.80006E1	4.52995E-4	5.22137E-3	9.32932E-2	2.73021E1	-3.26555E1	-3.26178E1	2.6777E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9985E-1
1.9E1	2.276E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	2.14577E-4	-8.80004E1	5.96046E-4	5.8651E-3	9.32455E-2	2.72847E1	-3.26512E1	-3.26512E1	2.67932E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9963E-1
2.0E1	3.39E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80016E1	-3.8147E-4	-8.80003E1	2.86102E-4	5.38826E-3	9.3317E-2	2.73041E1	-3.26401E1	-3.26173E1	2.67953E1	1.73529E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.9911E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80014E1	-2.14577E-4	-8.80003E1	6.4373E-4	5.45979E-3	9.31025E-2	2.73417E1	-3.26868E1	-3.25918E1	2.67716E1	1.73545E-7	2.51411E-3	2.51411E-3	6.31176E-3	1.9965E-1
2.2E1	2.3E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	1.19209E-4	-8.80003E1	5.00679E-4	5.62668E-3	9.3174E-2	2.7324E1	-3.26791E1	-3.26201E1	2.67868E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98764E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80016E1	1.66893E-4	-8.80003E1	5.48363E-4	5.45979E-3	9.29117E-2	2.73381E1	-3.26699E1	-3.26236E1	2.6819E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98661E-1