[Scan]
initial_time=2016-02-16T03:08:30
final_time=2016-02-16T03:08:50
ip_count=19
run=1030
dataset=7
scan=552
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.74928E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.00314E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=3.61836E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.73398E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=7.49981E-10
mult1=-1.03665E-8
mult2=-2.73857E-9
rf_tmon=-4.65662E-3
rf_agc=3.39104E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=4.01962E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.08191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.20135E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01118E0
lens1_imon=1.37171E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.58373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.01795E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=2.85463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.88387E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63826E1
os_ef1bup_imon=3.11006E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.28819E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.25846E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.31742E-10
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-7.59044E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.9432E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=2.00952E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19605E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74524E1
cs_ef2b_imon=3.15316E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.70502E-1
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70991E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64825E0
os_ef2alow_imon=-2.33131E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50315E-1
os_ef2bup_imon=-5.02116E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1055E1
os_restr2_imon=2.8866E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.27531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.12007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.96464E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.27182E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-2.24443E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-8.96035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86373E1
mask2_imon=-3.99074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=5.99772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.62231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59749E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.6636E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3685E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66599E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30726E1
cs_fil1_imon=1.00773E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63194E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22258E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36144E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4197E4	1.2E1	1.47E2	4.1E1	-7.19325E-2	-8.80014E1	-1.19209E-4	-8.80001E1	4.76837E-4	5.17368E-3	9.31263E-2	2.73549E1	-3.26984E1	-3.25756E1	2.6795E1	1.73457E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9934E-1
2.0E0	5.741E3	4.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80011E1	-4.76837E-5	-8.80002E1	7.39098E-4	5.29289E-3	9.3174E-2	2.73241E1	-3.26915E1	-3.26364E1	2.68004E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98491E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80016E1	-7.15256E-5	-8.80003E1	4.29153E-4	5.38826E-3	9.31263E-2	2.73293E1	-3.2649E1	-3.26101E1	2.68274E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98592E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80016E1	-4.76837E-5	-8.80004E1	7.15256E-4	5.6982E-3	9.30548E-2	2.72775E1	-3.26374E1	-3.26236E1	2.67549E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80017E1	2.14577E-4	-8.80005E1	5.48363E-4	5.88894E-3	9.32693E-2	2.72943E1	-3.26609E1	-3.26536E1	2.6798E1	1.73457E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9951E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.8002E1	1.90735E-4	-8.80002E1	3.33786E-4	5.79357E-3	9.34124E-2	2.7296E1	-3.26892E1	-3.26163E1	2.6781E1	1.73454E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80021E1	1.43051E-4	-8.80005E1	3.8147E-4	5.60284E-3	9.32693E-2	2.73414E1	-3.26807E1	-3.26247E1	2.67739E1	1.73459E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99061E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80018E1	9.53674E-5	-8.80004E1	3.8147E-4	5.67436E-3	9.30309E-2	2.72787E1	-3.26933E1	-3.26284E1	2.68346E1	1.73526E-7	2.51498E-3	2.51498E-3	6.30171E-3	1.98625E-1
1.2E1	3.4E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-1.43051E-4	-8.80001E1	6.91414E-4	5.62668E-3	9.30548E-2	2.73123E1	-3.2647E1	-3.2614E1	2.68188E1	1.73454E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99283E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80018E1	1.66893E-4	-8.80003E1	3.57628E-4	6.17504E-3	9.30786E-2	2.72992E1	-3.26585E1	-3.26172E1	2.68267E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
1.4E1	6.73E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80013E1	-1.66893E-4	-8.80003E1	3.57628E-4	5.79357E-3	9.3317E-2	2.73345E1	-3.26434E1	-3.26536E1	2.67662E1	1.73379E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98592E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80015E1	2.86102E-4	-8.80004E1	0.0E0	5.84126E-3	9.32932E-2	2.72855E1	-3.26572E1	-3.26536E1	2.67986E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99456E-1
1.6E1	3.3E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80014E1	4.76837E-5	-8.80002E1	2.14577E-4	5.29289E-3	9.31501E-2	2.73151E1	-3.26455E1	-3.26549E1	2.67175E1	1.73454E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99456E-1
1.7E1	3.8306E4	1.4E1	6.87E2	4.7E2	-7.17779E-2	-8.80013E1	-1.90735E-4	-8.80002E1	4.52995E-4	5.60284E-3	9.34362E-2	2.73147E1	-3.26741E1	-3.26518E1	2.6846E1	1.73529E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98075E-1
1.8E1	1.68486E5	9.1E1	7.27E2	5.0E2	-7.17007E-2	-8.80016E1	-1.43051E-4	-8.80005E1	2.86102E-4	5.45979E-3	9.35555E-2	2.73027E1	-3.2675E1	-3.26229E1	2.6762E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
1.9E1	2.327E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80013E1	-2.38419E-4	-8.80009E1	2.6226E-4	5.29289E-3	9.33409E-2	2.72781E1	-3.26771E1	-3.2614E1	2.67932E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98937E-1
2.0E1	3.33E2	1.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80014E1	2.6226E-4	-8.80003E1	2.38419E-5	5.79357E-3	9.29832E-2	2.73122E1	-3.26319E1	-3.26172E1	2.68175E1	1.73605E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.98169E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80015E1	-7.15256E-5	-8.80004E1	4.76837E-5	5.29289E-3	9.30071E-2	2.73442E1	-3.26609E1	-3.2641E1	2.68388E1	1.73235E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.9883E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80011E1	-9.53674E-5	-8.80007E1	3.57628E-4	5.91278E-3	9.35078E-2	2.72998E1	-3.26956E1	-3.26301E1	2.67746E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98592E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80014E1	9.53674E-5	-8.80005E1	6.91414E-4	5.4121E-3	9.31501E-2	2.73147E1	-3.26494E1	-3.26302E1	2.68082E1	1.73309E-7	2.51417E-3	2.51417E-3	6.36144E-3	2.00021E-1