[Scan]
initial_time=2016-02-16T03:08:57
final_time=2016-02-16T03:09:16
ip_count=19
run=1030
dataset=7
scan=553
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.74872E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.89442E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=3.41332E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.62215E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=7.60818E-10
mult1=-1.00786E-8
mult2=-2.79185E-9
rf_tmon=-4.73954E-3
rf_agc=3.21706E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=3.84867E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05242E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.03244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=2.20666E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99644E0
lens1_imon=1.27969E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=3.00721E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04233E1
cs_ea2_imon=1.59541E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=2.99243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.98052E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=2.90269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.05874E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26862E0
cs_ionrep_imon=1.26483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.29805E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.35724E-10
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.59293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98576E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.92199E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=2.01377E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.10884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.90559E-1
os_ea2_imon=-3.94451E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.21011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64381E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.10929E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.33468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.29578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68128E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.64835E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06107E0
cs_ionaccel_imon=-1.64283E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=8.09509E-6
window_vset=0.0E0
window_vmon=2.08933E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82568E2
mask1_imon=2.39434E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.46658E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.31273E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.339E1
os_fil1_imon=5.0285E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00778E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66431E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=1.0102E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66303E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58254E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22382E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4044E4	1.0E1	1.47E2	4.1E1	-7.14689E-2	-8.80018E1	-3.8147E-4	-8.80006E1	3.33786E-4	5.55515E-3	9.33886E-2	2.73293E1	-3.26679E1	-3.26319E1	2.67758E1	1.73454E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.9911E-1
2.0E0	5.755E3	2.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80015E1	2.38419E-4	-8.80001E1	4.52995E-4	5.29289E-3	9.33409E-2	2.73033E1	-3.26719E1	-3.25776E1	2.67159E1	1.73457E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9968E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80013E1	-3.8147E-4	-8.80005E1	4.76837E-4	5.45979E-3	9.33886E-2	2.73139E1	-3.2688E1	-3.26054E1	2.68036E1	1.73374E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99577E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80016E1	-1.43051E-4	-8.80007E1	4.52995E-4	5.45979E-3	9.32455E-2	2.72962E1	-3.26343E1	-3.26095E1	2.68076E1	1.73532E-7	2.51287E-3	2.51287E-3	6.32858E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80019E1	-2.6226E-4	-8.80006E1	5.24521E-4	5.26905E-3	9.35078E-2	2.73004E1	-3.26242E1	-3.26396E1	2.68215E1	1.73303E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80017E1	-2.38419E-5	-8.80004E1	2.38419E-4	5.34058E-3	9.3627E-2	2.73171E1	-3.26867E1	-3.26248E1	2.67625E1	1.73457E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80025E1	1.19209E-4	-8.80005E1	5.24521E-4	5.05447E-3	9.36508E-2	2.73081E1	-3.26494E1	-3.25707E1	2.68635E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80024E1	2.86102E-4	-8.80003E1	6.67572E-4	5.14984E-3	9.34839E-2	2.73105E1	-3.26681E1	-3.26092E1	2.67986E1	1.73383E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9917E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.8002E1	2.38419E-5	-8.80002E1	6.19888E-4	5.17368E-3	9.33886E-2	2.72892E1	-3.26655E1	-3.25983E1	2.6795E1	1.73528E-7	2.51359E-3	2.51359E-3	6.35223E-3	1.99754E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80017E1	-2.6226E-4	-8.80004E1	3.33786E-4	5.19753E-3	9.3174E-2	2.73123E1	-3.26873E1	-3.26843E1	2.67637E1	1.73531E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1
1.4E1	7.11E2	2.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80015E1	7.15256E-5	-8.80003E1	2.86102E-4	5.57899E-3	9.33886E-2	2.73087E1	-3.2653E1	-3.2605E1	2.6798E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00847E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80016E1	2.38419E-5	-8.80006E1	3.33786E-4	5.38826E-3	9.33886E-2	2.73123E1	-3.2632E1	-3.26206E1	2.67674E1	1.73454E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99456E-1
1.6E1	3.162E3	1.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80017E1	7.15256E-5	-8.80004E1	1.90735E-4	5.36442E-3	9.35316E-2	2.72925E1	-3.2647E1	-3.26675E1	2.68262E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
1.7E1	3.8216E4	1.9E1	6.87E2	4.7E2	-7.23189E-2	-8.80019E1	-2.86102E-4	-8.80004E1	3.09944E-4	5.34058E-3	9.32932E-2	2.72997E1	-3.26543E1	-3.26272E1	2.68226E1	1.73454E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9911E-1
1.8E1	1.69204E5	9.0E1	7.27E2	5.0E2	-7.27053E-2	-8.80018E1	-2.38419E-5	-8.80003E1	4.52995E-4	5.53131E-3	9.35793E-2	2.73523E1	-3.26962E1	-3.26402E1	2.67902E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98592E-1
1.9E1	2.307E3	1.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80019E1	1.19209E-4	-8.80004E1	3.33786E-4	5.57899E-3	9.36747E-2	2.73045E1	-3.26651E1	-3.25918E1	2.67662E1	1.73457E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9985E-1
2.0E1	3.7E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80018E1	2.86102E-4	-8.80005E1	4.76837E-4	5.60284E-3	9.35555E-2	2.72895E1	-3.26819E1	-3.26314E1	2.67926E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80018E1	-2.38419E-5	-8.80005E1	6.4373E-4	5.72205E-3	9.36031E-2	2.72768E1	-3.26484E1	-3.26095E1	2.67764E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98764E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80016E1	-5.24521E-4	-8.80002E1	4.05312E-4	5.6982E-3	9.34362E-2	2.73075E1	-3.26735E1	-3.25966E1	2.68022E1	1.73383E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98153E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80017E1	-2.14577E-4	-8.80003E1	5.24521E-4	6.07967E-3	9.32932E-2	2.73316E1	-3.26478E1	-3.26231E1	2.68128E1	1.73605E-7	2.52707E-3	2.52707E-3	6.32896E-3	1.98491E-1