[Scan]
initial_time=2016-02-16T03:09:24
final_time=2016-02-16T03:09:43
ip_count=19
run=1030
dataset=7
scan=554
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.82027E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.46944E-10
ql2_vset=
ql2_vmon=1.90735E-4
ql2_imon=3.86858E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.73174E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=7.393E-10
mult1=-1.07157E-8
mult2=-2.80045E-9
rf_tmon=-5.2214E-3
rf_agc=3.24023E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.87061E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71601E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=2.03282E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.071E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.16476E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06419E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64314E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.02343E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.89326E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=2.8526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.9052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.10992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.26857E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.25048E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=7.35855E-10
tplens_vset=1.4E-1
tplens_vmon=1.60358E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98623E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.83532E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=2.01011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.20658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.16038E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62538E-1
os_ea2_imon=-2.70506E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64621E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.2911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67409E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.89509E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.21686E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.23766E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02017E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.18454E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.46212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.4275E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33933E1
os_fil1_imon=5.04051E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.98375E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66419E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=1.01008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62414E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.22148E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=1.97731E-1
chamber_ion_pmon=1.73314E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74909E-1
res40_imon=-2.81412E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3773E4	1.8E1	1.47E2	4.1E1	-7.201E-2	-8.8002E1	-3.33786E-4	-8.80003E1	2.38419E-4	5.29289E-3	9.35078E-2	2.73122E1	-3.26183E1	-3.26449E1	2.6807E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.97647E-1
2.0E0	5.72E3	4.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80016E1	-2.6226E-4	-8.80008E1	2.14577E-4	5.48363E-3	9.31978E-2	2.72802E1	-3.26556E1	-3.26428E1	2.68024E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.98937E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80017E1	0.0E0	-8.80006E1	3.57628E-4	5.31673E-3	9.32455E-2	2.7317E1	-3.27034E1	-3.2616E1	2.67914E1	1.73459E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.99227E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80017E1	-3.57628E-4	-8.80005E1	6.4373E-4	5.05447E-3	9.31025E-2	2.73261E1	-3.26422E1	-3.26062E1	2.6825E1	1.73605E-7	2.51725E-3	2.51725E-3	6.3131E-3	1.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-1.90735E-4	-8.80006E1	2.38419E-4	5.43594E-3	9.33409E-2	2.72794E1	-3.2664E1	-3.2656E1	2.67764E1	1.73529E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80021E1	-2.38419E-5	-8.80007E1	3.8147E-4	5.26905E-3	9.32217E-2	2.73016E1	-3.26434E1	-3.26335E1	2.67978E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80021E1	0.0E0	-8.80007E1	3.09944E-4	5.6982E-3	9.33886E-2	2.73375E1	-3.26663E1	-3.26212E1	2.6777E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80017E1	-5.48363E-4	-8.80004E1	3.09944E-4	5.79357E-3	9.34124E-2	2.72913E1	-3.26603E1	-3.26512E1	2.67619E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98075E-1
1.2E1	3.63E2	1.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80019E1	-2.14577E-4	-8.80005E1	1.90735E-4	5.24521E-3	9.31025E-2	2.72835E1	-3.26585E1	-3.26074E1	2.67884E1	1.73228E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98247E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-4.76837E-5	-8.80005E1	5.00679E-4	5.79357E-3	9.32217E-2	2.73287E1	-3.2652E1	-3.26213E1	2.67686E1	1.73531E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.99E-1
1.4E1	7.13E2	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80021E1	2.38419E-5	-8.80004E1	4.29153E-4	5.45979E-3	9.35316E-2	2.72781E1	-3.26591E1	-3.26464E1	2.68046E1	1.73454E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9911E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80018E1	-1.66893E-4	-8.80002E1	2.86102E-4	4.91142E-3	9.32932E-2	2.73153E1	-3.2626E1	-3.2635E1	2.68186E1	1.73605E-7	2.51632E-3	2.51632E-3	6.35059E-3	2.00363E-1
1.6E1	3.203E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80016E1	-2.6226E-4	-8.80002E1	3.09944E-4	4.93526E-3	9.31263E-2	2.7308E1	-3.2659E1	-3.26567E1	2.68689E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98937E-1
1.7E1	3.8642E4	1.6E1	6.87E2	4.7E2	-7.29374E-2	-8.80015E1	-1.19209E-4	-8.80002E1	3.09944E-4	5.38826E-3	9.34124E-2	2.72997E1	-3.26669E1	-3.26248E1	2.67938E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.01022E-1
1.8E1	1.69264E5	1.03E2	7.27E2	5.0E2	-7.286E-2	-8.80016E1	-1.66893E-4	-8.80001E1	-2.38419E-5	5.45979E-3	9.35793E-2	2.72774E1	-3.26655E1	-3.26337E1	2.6783E1	1.73457E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.00534E-1
1.9E1	2.278E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80015E1	-6.4373E-4	-8.80002E1	3.09944E-4	5.43594E-3	9.34124E-2	2.73111E1	-3.26554E1	-3.25828E1	2.68306E1	1.73454E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99803E-1
2.0E1	3.24E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80017E1	-4.52995E-4	-8.80001E1	2.86102E-4	5.34058E-3	9.32932E-2	2.72775E1	-3.26951E1	-3.2626E1	2.67898E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9934E-1
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80015E1	4.76837E-5	-8.8E1	4.29153E-4	5.57899E-3	9.31501E-2	2.72925E1	-3.26452E1	-3.2605E1	2.6819E1	1.73605E-7	2.51025E-3	2.51025E-3	6.32978E-3	1.97818E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80017E1	-1.90735E-4	-8.80003E1	4.76837E-4	5.8651E-3	9.29117E-2	2.73523E1	-3.26325E1	-3.26449E1	2.67787E1	1.73454E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.97903E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80014E1	1.90735E-4	-8.79999E1	8.58307E-4	5.53131E-3	9.32217E-2	2.73279E1	-3.26573E1	-3.26128E1	2.67409E1	1.73314E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.97731E-1