[Scan]
initial_time=2016-02-16T03:10:44
final_time=2016-02-16T03:11:03
ip_count=19
run=1030
dataset=7
scan=557
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13143E-2
qbias_imon=-3.7379E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.91576E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.71194E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64086E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=7.64263E-10
mult1=-9.88488E-9
mult2=-2.77251E-9
rf_tmon=-4.57251E-3
rf_agc=3.3628E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=3.81625E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69099E0
bslens_imon=2.6636E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=2.01164E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54015E1
cs_ef1b_imon=3.0482E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05106E1
cs_ea1_imon=2.20135E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02121E0
lens1_imon=1.65487E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=3.00719E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.58337E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84203E1
cs_ef1a_imon=3.03048E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.9314E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=2.87096E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=1.87927E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63328E1
os_ef1bup_imon=3.11632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=1.2627E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=3.27131E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.15566E-10
tplens_vset=1.4E-1
tplens_vmon=1.64084E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27047E1
iondef2_imon=1.60249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.00031E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.00952E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.69322E-1
os_ea2_imon=-3.87372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.20424E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63898E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29463E-1
os_ef2bup_imon=-5.09067E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.87965E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.28608E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.89559E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=2.90143E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55977E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.06632E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-4.12975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.25775E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.11971E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59749E0
defgridb_imon=6.29857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33945E1
os_fil1_imon=5.098E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85504E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66407E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30753E1
cs_fil1_imon=1.00917E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62638E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66672E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86728E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28528E-1
cs_fil2_imon=-1.67874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22293E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=1.98894E-1
chamber_ion_pmon=1.73677E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.30073E-1
res40_imon=-2.74834E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.394E4	7.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80015E1	-9.53674E-5	-8.8E1	2.86102E-4	5.07832E-3	9.35078E-2	2.73381E1	-3.2636E1	-3.26484E1	2.6786E1	1.73531E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.99E-1
2.0E0	5.729E3	5.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80015E1	-4.76837E-5	-8.79999E1	1.43051E-4	5.126E-3	9.36031E-2	2.72937E1	-3.26657E1	-3.26212E1	2.67776E1	1.73383E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9917E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80014E1	0.0E0	-8.80003E1	4.05312E-4	5.31673E-3	9.35555E-2	2.73216E1	-3.26744E1	-3.26189E1	2.67752E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80015E1	-4.76837E-5	-8.80001E1	2.38419E-4	5.31673E-3	9.33409E-2	2.72648E1	-3.265E1	-3.25761E1	2.68046E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00192E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80013E1	2.38419E-5	-8.80001E1	1.90735E-4	5.29289E-3	9.32217E-2	2.72886E1	-3.26797E1	-3.26166E1	2.68111E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80012E1	3.8147E-4	-8.80003E1	5.00679E-4	5.31673E-3	9.33409E-2	2.72721E1	-3.26443E1	-3.26119E1	2.67884E1	1.73531E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80011E1	-1.90735E-4	-8.80004E1	3.09944E-4	5.26905E-3	9.35555E-2	2.72592E1	-3.26787E1	-3.26193E1	2.67631E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.97388E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80015E1	-1.43051E-4	-8.80005E1	2.6226E-4	5.43594E-3	9.34839E-2	2.72781E1	-3.26482E1	-3.26002E1	2.67734E1	1.73454E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98075E-1
1.2E1	3.19E2	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80018E1	2.38419E-5	-8.80005E1	1.43051E-4	5.62668E-3	9.34362E-2	2.73063E1	-3.26212E1	-3.26098E1	2.68316E1	1.73454E-7	2.51007E-3	2.51007E-3	6.34037E-3	1.98592E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.8002E1	0.0E0	-8.80003E1	5.72205E-4	5.36442E-3	9.36031E-2	2.72998E1	-3.2639E1	-3.26095E1	2.6822E1	1.73454E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.98247E-1
1.4E1	6.83E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80018E1	1.90735E-4	-8.80003E1	5.24521E-4	5.65052E-3	9.35793E-2	2.73285E1	-3.26524E1	-3.26392E1	2.67836E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98247E-1
1.5E1	7.2E1	1.0E0	6.06E2	4.11E2	-7.201E-2	-8.80018E1	3.33786E-4	-8.80006E1	5.00679E-4	5.65052E-3	9.34839E-2	2.72977E1	-3.26482E1	-3.25964E1	2.67682E1	1.73457E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9883E-1
1.6E1	3.163E3	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80014E1	-2.14577E-4	-8.80007E1	3.57628E-4	5.4121E-3	9.35316E-2	2.72702E1	-3.2656E1	-3.26522E1	2.68026E1	1.7339E-7	2.5199E-3	2.5199E-3	6.3126E-3	1.99283E-1
1.7E1	3.8062E4	1.7E1	6.87E2	4.7E2	-7.17007E-2	-8.80014E1	-5.96046E-4	-8.80004E1	4.29153E-4	5.19753E-3	9.33886E-2	2.72817E1	-3.26338E1	-3.25972E1	2.6783E1	1.73365E-7	2.51411E-3	2.51411E-3	6.3074E-3	1.991E-1
1.8E1	1.67826E5	9.0E1	7.27E2	5.0E2	-7.17007E-2	-8.80019E1	-4.05312E-4	-8.80005E1	4.05312E-4	5.34058E-3	9.33647E-2	2.73014E1	-3.27001E1	-3.26187E1	2.68046E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.97388E-1
1.9E1	2.335E3	2.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80015E1	-3.8147E-4	-8.80002E1	4.52995E-4	5.24521E-3	9.32693E-2	2.73094E1	-3.26744E1	-3.2637E1	2.68052E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.97388E-1
2.0E1	3.27E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80015E1	-4.76837E-4	-8.80004E1	1.66893E-4	5.36442E-3	9.30786E-2	2.73092E1	-3.26422E1	-3.26179E1	2.68088E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80015E1	-1.90735E-4	-8.80005E1	3.57628E-4	5.29289E-3	9.3174E-2	2.72898E1	-3.26787E1	-3.26438E1	2.68124E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98075E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80015E1	-2.38419E-4	-8.80003E1	2.38419E-4	5.50747E-3	9.3174E-2	2.73173E1	-3.26417E1	-3.26671E1	2.68256E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98764E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.13143E-2	-8.80018E1	-4.76837E-4	-8.80005E1	6.4373E-4	5.65052E-3	9.34124E-2	2.73141E1	-3.27047E1	-3.2635E1	2.67896E1	1.73677E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.98894E-1