[Scan]
initial_time=2016-02-16T03:11:10
final_time=2016-02-16T03:11:30
ip_count=19
run=1030
dataset=7
scan=558
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81513E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.72574E-10
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=3.82864E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.65391E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=7.52509E-10
mult1=-1.0523E-8
mult2=-2.56691E-9
rf_tmon=-3.72534E-3
rf_agc=3.41267E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.90935E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.07172E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.1787E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97815E0
lens1_imon=1.53453E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04032E1
cs_ea2_imon=1.55966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84166E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.93474E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=2.89909E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.92139E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63329E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.27155E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02133E1
cs_anode1_imon=3.293E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.95467E-10
tplens_vset=1.4E-1
tplens_vmon=1.655E0
tplens_imon=-7.59044E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25954E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.60603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98753E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.824E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=2.02403E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74273E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87609E-1
os_ea2_imon=-4.0153E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00764E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61738E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.28317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72624E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6802E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.87247E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=3.29876E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.73203E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.42764E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33948E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8456E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=1.0101E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.00524E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22344E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3866E4	2.0E1	1.47E2	4.1E1	-7.23964E-2	-8.80014E1	-4.29153E-4	-8.80001E1	6.91414E-4	5.53131E-3	9.31978E-2	2.73003E1	-3.26879E1	-3.2638E1	2.68065E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98491E-1
2.0E0	5.689E3	6.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80013E1	2.38419E-5	-8.80001E1	5.72205E-4	5.26905E-3	9.31263E-2	2.72811E1	-3.26488E1	-3.26188E1	2.67674E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98247E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80014E1	-1.19209E-4	-8.80003E1	3.8147E-4	5.55515E-3	9.31025E-2	2.73184E1	-3.2648E1	-3.26359E1	2.67943E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98937E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80012E1	0.0E0	-8.80006E1	4.52995E-4	5.29289E-3	9.31263E-2	2.73363E1	-3.26561E1	-3.25918E1	2.68207E1	1.73605E-7	2.51578E-3	2.51578E-3	6.3074E-3	1.98661E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80015E1	9.53674E-5	-8.80003E1	5.24521E-4	5.76973E-3	9.28879E-2	2.72847E1	-3.26224E1	-3.26476E1	2.68124E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80016E1	-1.90735E-4	-8.80006E1	3.33786E-4	5.14984E-3	9.31501E-2	2.73105E1	-3.26717E1	-3.26134E1	2.67812E1	1.73374E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.98872E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.12368E-2	-8.80014E1	-1.19209E-4	-8.80004E1	5.24521E-4	5.62668E-3	9.29832E-2	2.73255E1	-3.26573E1	-3.26368E1	2.68029E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80015E1	-1.90735E-4	-8.80004E1	3.8147E-4	6.22272E-3	9.32455E-2	2.73069E1	-3.26779E1	-3.26207E1	2.67881E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.07733E-2	-8.80012E1	-1.90735E-4	-8.80003E1	2.86102E-4	5.45979E-3	9.34124E-2	2.73291E1	-3.26464E1	-3.26098E1	2.68028E1	1.73529E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.9963E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80014E1	-3.33786E-4	-8.80003E1	6.19888E-4	5.50747E-3	9.32217E-2	2.72883E1	-3.27071E1	-3.26224E1	2.67932E1	1.73605E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9968E-1
1.4E1	7.32E2	2.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80013E1	-9.53674E-5	-8.80003E1	5.00679E-4	5.84126E-3	9.33647E-2	2.72648E1	-3.26254E1	-3.2617E1	2.68064E1	1.73454E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00325E-1
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80013E1	-5.24521E-4	-8.80005E1	5.00679E-4	5.22137E-3	9.34601E-2	2.73381E1	-3.26993E1	-3.26428E1	2.678E1	1.73454E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99977E-1
1.6E1	3.227E3	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	-3.09944E-4	-8.80003E1	1.43051E-4	5.00679E-3	9.32693E-2	2.73015E1	-3.26518E1	-3.26092E1	2.67607E1	1.73379E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00499E-1
1.7E1	3.8376E4	2.3E1	6.87E2	4.7E2	-7.23964E-2	-8.80015E1	-2.14577E-4	-8.80001E1	5.48363E-4	5.6982E-3	9.32693E-2	2.7272E1	-3.26376E1	-3.25819E1	2.68269E1	1.73528E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.99754E-1
1.8E1	1.69569E5	1.0E2	7.27E2	5.0E2	-7.26282E-2	-8.80013E1	-2.86102E-4	-8.79998E1	5.48363E-4	5.36442E-3	9.34839E-2	2.73411E1	-3.26669E1	-3.26146E1	2.68241E1	1.73303E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
1.9E1	2.229E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80012E1	-4.52995E-4	-8.8E1	4.29153E-4	5.14984E-3	9.35078E-2	2.73435E1	-3.26446E1	-3.26188E1	2.67715E1	1.73529E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00673E-1
2.0E1	3.21E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80013E1	-3.09944E-4	-8.80005E1	4.05312E-4	5.14984E-3	9.32693E-2	2.72868E1	-3.26555E1	-3.26443E1	2.67955E1	1.73303E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80013E1	-3.33786E-4	-8.80005E1	4.05312E-4	4.98295E-3	9.35316E-2	2.73442E1	-3.26687E1	-3.26266E1	2.6798E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99977E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80015E1	-2.38419E-4	-8.80005E1	1.43051E-4	5.29289E-3	9.35316E-2	2.7308E1	-3.26809E1	-3.25829E1	2.67758E1	1.73531E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.99E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	3.09944E-4	-8.80001E1	2.14577E-4	5.03063E-3	9.30786E-2	2.72624E1	-3.26332E1	-3.25954E1	2.6802E1	1.73605E-7	2.5131E-3	2.5131E-3	6.29665E-3	1.9985E-1