[Scan]
initial_time=2016-02-16T03:14:16
final_time=2016-02-16T03:14:36
ip_count=19
run=1030
dataset=7
scan=565
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.76226E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.76413E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.94762E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.69179E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=7.82514E-10
mult1=-9.89692E-9
mult2=-2.6747E-9
rf_tmon=-4.12189E-3
rf_agc=3.38683E-2
counter1=6
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=3.79693E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.08017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.19215E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00352E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.99051E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.58019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84203E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.75843E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.8873E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.09998E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.2673E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=3.27514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=6.82056E-10
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.23992E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=1.99288E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74385E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71682E-1
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61813E0
os_ef2alow_imon=-2.4738E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.95869E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10614E1
os_restr2_imon=2.88417E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.29859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.11405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87809E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=3.45242E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07801E0
cs_ionaccel_imon=-2.10195E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=2.15948E-1
window_imon=-7.88302E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86726E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.89838E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.81178E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=7.37101E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=4.88949E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55964E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66502E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=1.00853E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63119E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55976E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.31587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22298E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42033E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3696E4	1.3E1	1.47E2	4.1E1	-7.21643E-2	-8.80017E1	-2.86102E-4	-8.80006E1	3.57628E-4	5.38826E-3	9.34362E-2	2.73153E1	-3.26609E1	-3.26675E1	2.67884E1	1.73605E-7	2.50775E-3	2.50775E-3	6.31278E-3	1.99E-1
2.0E0	5.641E3	3.0E0	3.16E2	1.6E2	-7.286E-2	-8.80017E1	-5.72205E-4	-8.80001E1	2.86102E-4	5.03063E-3	9.35078E-2	2.73171E1	-3.26729E1	-3.2587E1	2.67878E1	1.73529E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80014E1	2.38419E-5	-8.8E1	5.24521E-4	4.86374E-3	9.35555E-2	2.73033E1	-3.26685E1	-3.26431E1	2.67878E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00499E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80016E1	-1.66893E-4	-8.80004E1	2.38419E-4	5.07832E-3	9.34839E-2	2.73009E1	-3.26837E1	-3.26627E1	2.6803E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80018E1	4.76837E-5	-8.80004E1	6.67572E-4	5.07832E-3	9.35316E-2	2.72799E1	-3.26609E1	-3.26242E1	2.67962E1	1.73383E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80019E1	-7.15256E-5	-8.80003E1	3.09944E-4	5.57899E-3	9.34601E-2	2.73448E1	-3.26476E1	-3.25912E1	2.67698E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80014E1	2.38419E-5	-8.80007E1	2.14577E-4	5.36442E-3	9.36031E-2	2.73181E1	-3.26526E1	-3.26384E1	2.68022E1	1.73303E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80017E1	-2.6226E-4	-8.80009E1	2.38419E-4	5.26905E-3	9.32217E-2	2.72895E1	-3.2638E1	-3.25888E1	2.6798E1	1.73379E-7	2.51662E-3	2.51662E-3	6.32661E-3	1.96447E-1
1.2E1	3.92E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80016E1	-9.53674E-5	-8.80005E1	9.53674E-5	5.38826E-3	9.34362E-2	2.73153E1	-3.26458E1	-3.26014E1	2.68022E1					
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80019E1	-2.38419E-4	-8.80006E1	9.53674E-5	5.6982E-3	9.36985E-2	2.73478E1	-3.26957E1	-3.26212E1	2.68142E1	1.73529E-7	2.51443E-3	2.51443E-3	6.27461E-3	1.9585E-1
1.4E1	7.15E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80015E1	-4.76837E-4	-8.80004E1	1.90735E-4	5.67436E-3	9.33647E-2	2.72763E1	-3.26302E1	-3.25864E1	2.67848E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.96191E-1
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80014E1	-1.66893E-4	-8.80005E1	1.19209E-4	5.45979E-3	9.35316E-2	2.73261E1	-3.26693E1	-3.26567E1	2.67583E1	1.73454E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.96191E-1
1.6E1	3.175E3	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80014E1	-4.05312E-4	-8.80006E1	3.09944E-4	5.50747E-3	9.32217E-2	2.73411E1	-3.26831E1	-3.26452E1	2.68022E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.97388E-1
1.7E1	3.8305E4	1.7E1	6.87E2	4.7E2	-7.22418E-2	-8.80017E1	-4.52995E-4	-8.80006E1	7.15256E-5	5.29289E-3	9.32455E-2	2.73269E1	-3.26632E1	-3.26036E1	2.68088E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.96973E-1
1.8E1	1.68179E5	9.6E1	7.27E2	5.0E2	-7.25507E-2	-8.80017E1	-1.66893E-4	-8.80003E1	2.38419E-4	5.43594E-3	9.32455E-2	2.73261E1	-3.2623E1	-3.26386E1	2.6818E1	1.73454E-7	2.5117E-3	2.5117E-3	6.31288E-3	1.98505E-1
1.9E1	2.294E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80018E1	-4.05312E-4	-8.80007E1	2.38419E-4	5.53131E-3	9.35555E-2	2.73187E1	-3.26679E1	-3.26142E1	2.67962E1					
2.0E1	3.28E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80018E1	-1.90735E-4	-8.80005E1	2.38419E-4	5.55515E-3	9.33409E-2	2.73201E1	-3.26573E1	-3.26086E1	2.67854E1	1.73457E-7	2.51954E-3	2.51954E-3	6.28592E-3	1.98491E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80017E1	-1.43051E-4	-8.80003E1	3.09944E-4	5.79357E-3	9.30071E-2	2.7324E1	-3.27115E1	-3.26154E1	2.68154E1	1.73381E-7	2.51755E-3	2.51755E-3	6.31283E-3	1.99827E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80019E1	-2.38419E-4	-8.80005E1	2.86102E-4	5.19753E-3	9.3174E-2	2.72919E1	-3.26476E1	-3.26068E1	2.68322E1					
2.3E1	6.0E0	1.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80019E1	-7.15256E-5	-8.80003E1	1.43051E-4	5.74589E-3	9.33409E-2	2.73099E1	-3.26278E1	-3.26308E1	2.6795E1	1.73529E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.00151E-1