[Scan]
initial_time=2016-02-16T03:16:09
final_time=2016-02-16T03:16:38
ip_count=19
run=1030
dataset=7
scan=569
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.79952E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.78642E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=3.75211E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.65299E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.61223E-10
mult1=-9.25877E-9
mult2=-2.78249E-9
rf_tmon=-4.5665E-3
rf_agc=3.34177E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.93462E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20137E1
lens5a_imon=1.97059E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05224E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53377E1
cs_ef1b_imon=3.07809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=2.17835E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04186E0
lens1_imon=1.72565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64973E1
os_ef1alow_imon=2.99468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.58019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83948E1
cs_ef1a_imon=3.0131E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.82197E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=2.88209E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=1.88706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63444E1
os_ef1bup_imon=3.09894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=1.28677E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.27444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.24995E-10
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=1.96259E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.90983E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=2.00704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53985E-1
os_ea2_imon=-3.83833E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71397E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63898E0
os_ef2alow_imon=-2.35564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65954E-1
os_ef2bup_imon=-5.17755E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10359E1
os_restr2_imon=2.86679E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.28226E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.11653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.11005E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.86899E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.04651E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-2.02897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47456E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.86298E1
mask2_imon=-8.02203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.50197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.48427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=4.67518E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.6639E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6655E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00982E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62685E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66624E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.00275E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58127E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29277E-1
cs_fil2_imon=-2.48384E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09567E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22384E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.82578E-1
res40_imon=-2.29309E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3991E4	1.9E1	1.47E2	4.1E1	-7.37874E-2	-8.80016E1	1.19209E-4	-8.80005E1	7.15256E-4	5.76973E-3	9.32455E-2	2.72937E1	-3.27119E1	-3.26332E1	2.67854E1	1.73379E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.97731E-1
2.0E0	5.744E3	6.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80014E1	-1.66893E-4	-8.80005E1	7.39098E-4	5.53131E-3	9.30309E-2	2.73228E1	-3.26787E1	-3.26383E1	2.6799E1	1.73457E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.98322E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80016E1	-4.76837E-4	-8.80004E1	8.10623E-4	5.4121E-3	9.31263E-2	2.73155E1	-3.2648E1	-3.26075E1	2.67769E1	1.73451E-7	2.51804E-3	2.51804E-3	6.27954E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.8002E1	-1.66893E-4	-8.80006E1	6.4373E-4	5.126E-3	9.32217E-2	2.73183E1	-3.26867E1	-3.26002E1	2.6803E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80019E1	-6.4373E-4	-8.80007E1	4.52995E-4	5.43594E-3	9.30786E-2	2.73442E1	-3.26933E1	-3.26272E1	2.67995E1	1.73457E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80018E1	-3.57628E-4	-8.80006E1	7.39098E-4	5.03063E-3	9.36508E-2	2.73123E1	-3.26416E1	-3.26176E1	2.68198E1	1.73605E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.0064E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80018E1	-1.90735E-4	-8.80004E1	6.4373E-4	4.93526E-3	9.31978E-2	2.73069E1	-3.26374E1	-3.2614E1	2.67926E1	1.73457E-7	2.51096E-3	2.51096E-3	6.3074E-3	1.9951E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80016E1	-2.38419E-4	-8.80003E1	5.72205E-4	5.34058E-3	9.34601E-2	2.73105E1	-3.26771E1	-3.262E1	2.68238E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.97731E-1
1.2E1	3.51E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80018E1	-3.8147E-4	-8.80006E1	4.05312E-4	5.14984E-3	9.31978E-2	2.73183E1	-3.26591E1	-3.26326E1	2.67932E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.96874E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80018E1	-3.8147E-4	-8.80004E1	3.33786E-4	4.93526E-3	9.32217E-2	2.72943E1	-3.26645E1	-3.26362E1	2.67764E1	1.73529E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.97559E-1
1.4E1	7.11E2	1.0E0	5.66E2	3.82E2	-7.44831E-2	-8.80023E1	-4.76837E-4	-8.80006E1	4.29153E-4	4.95911E-3	9.34601E-2	2.73171E1	-3.26813E1	-3.26104E1	2.68059E1	1.73454E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98247E-1
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80022E1	-4.05312E-4	-8.80002E1	5.24521E-4	4.95911E-3	9.33647E-2	2.72997E1	-3.26278E1	-3.26218E1	2.6801E1	1.73228E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98419E-1
1.6E1	3.141E3	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80018E1	-1.43051E-4	-8.80005E1	4.52995E-4	4.98295E-3	9.34124E-2	2.73375E1	-3.26681E1	-3.25852E1	2.67932E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98419E-1
1.7E1	3.8523E4	1.4E1	6.87E2	4.7E2	-7.38649E-2	-8.80017E1	-3.09944E-4	-8.80004E1	5.96046E-4	4.86374E-3	9.35555E-2	2.73075E1	-3.26561E1	-3.2613E1	2.68304E1	1.73454E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99456E-1
1.8E1	1.68216E5	1.12E2	7.27E2	5.0E2	-7.27828E-2	-8.80018E1	-2.86102E-4	-8.80003E1	5.24521E-4	5.126E-3	9.3317E-2	2.73249E1	-3.27269E1	-3.26014E1	2.67613E1	1.73605E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00705E-1
1.9E1	2.36E3	3.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80018E1	-4.29153E-4	-8.80002E1	7.15256E-5	4.86374E-3	9.34839E-2	2.73057E1	-3.26272E1	-3.26183E1	2.6786E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99977E-1
2.0E1	3.25E2	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.8002E1	-3.09944E-4	-8.8E1	2.38419E-4	4.62532E-3	9.33647E-2	2.73316E1	-3.26201E1	-3.26343E1	2.68204E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80018E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.05447E-3	9.27925E-2	2.72831E1	-3.26958E1	-3.26254E1	2.6783E1	1.73532E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.98229E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80019E1	-3.33786E-4	-8.80003E1	3.33786E-4	4.69685E-3	9.33409E-2	2.7301E1	-3.27092E1	-3.25818E1	2.67878E1	1.73374E-7	2.51248E-3	2.51248E-3	6.31858E-3	1.97994E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.8002E1	-3.09944E-4	-8.79998E1	2.38419E-4	4.93526E-3	9.33647E-2	2.72913E1	-3.26951E1	-3.26254E1	2.68076E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.98153E-1