[Scan]
initial_time=2016-02-16T03:16:48
final_time=2016-02-16T03:17:17
ip_count=19
run=1030
dataset=7
scan=570
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.80393E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.862E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=3.74699E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.68201E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=7.66337E-10
mult1=-1.05591E-8
mult2=-2.7226E-9
rf_tmon=-4.69267E-3
rf_agc=3.37181E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.05288E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.7627E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19789E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0544E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53007E1
cs_ef1b_imon=3.07149E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.18224E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07194E0
lens1_imon=1.6761E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.57948E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.01206E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.80456E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=2.88556E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.26235E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=3.2668E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.80971E-10
tplens_vset=1.4E-1
tplens_vmon=1.61961E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.91674E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=2.03076E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.21268E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.88199E-1
os_ea2_imon=-3.97991E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70586E1
cs_ef2a_imon=3.17157E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62913E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42206E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=2.88313E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.33361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.29894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89577E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.18217E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11624E0
cs_ionaccel_imon=-1.92819E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.79905E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86778E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.73203E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67722E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=5.16172E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30758E1
cs_fil1_imon=1.00994E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63177E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66744E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.04933E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-1.99151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22482E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67315E-1
res40_imon=-2.34174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3963E4	2.2E1	1.47E2	4.1E1	-7.29374E-2	-8.80019E1	-7.15256E-4	-8.80005E1	2.6226E-4	5.45979E-3	9.30309E-2	2.73517E1	-3.26644E1	-3.26467E1	2.67966E1	1.73457E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9934E-1
2.0E0	5.655E3	5.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80019E1	-5.00679E-4	-8.80005E1	2.6226E-4	5.43594E-3	9.32693E-2	2.72973E1	-3.26909E1	-3.265E1	2.6783E1	1.73531E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9968E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80018E1	-5.48363E-4	-8.8E1	9.53674E-5	5.29289E-3	9.31501E-2	2.72927E1	-3.26626E1	-3.26142E1	2.67974E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80021E1	-5.00679E-4	-8.80003E1	5.72205E-4	5.50747E-3	9.32693E-2	2.73034E1	-3.2667E1	-3.2585E1	2.67474E1	1.73531E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.97815E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.17007E-2	-8.8002E1	-5.24521E-4	-8.80004E1	4.29153E-4	5.45979E-3	9.33886E-2	2.72873E1	-3.26667E1	-3.26235E1	2.68531E1	1.73462E-7	2.51679E-3	2.51679E-3	6.3074E-3	1.99447E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80018E1	-6.67572E-4	-8.80002E1	6.4373E-4	5.36442E-3	9.33409E-2	2.73454E1	-3.26296E1	-3.2611E1	2.6774E1	1.73525E-7	2.51642E-3	2.51642E-3	6.29581E-3	1.98917E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80018E1	-4.05312E-4	-8.80003E1	5.48363E-4	4.86374E-3	9.32217E-2	2.73128E1	-3.26567E1	-3.26101E1	2.6789E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80018E1	-1.66893E-4	-8.80005E1	2.14577E-4	5.03063E-3	9.30071E-2	2.73281E1	-3.26254E1	-3.26166E1	2.68117E1	1.73383E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9934E-1
1.2E1	3.64E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80018E1	-4.52995E-4	-8.80006E1	3.57628E-4	5.17368E-3	9.30786E-2	2.72967E1	-3.26452E1	-3.26482E1	2.68178E1	1.73303E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98764E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	2.38419E-5	-8.80003E1	1.66893E-4	5.26905E-3	9.31501E-2	2.73198E1	-3.26762E1	-3.26307E1	2.6798E1	1.73457E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.9968E-1
1.4E1	7.05E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-4.76837E-5	-8.80004E1	3.33786E-4	5.17368E-3	9.34124E-2	2.73087E1	-3.26464E1	-3.26188E1	2.68059E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.99E-1
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80019E1	-3.57628E-4	-8.80005E1	1.90735E-4	5.126E-3	9.32217E-2	2.72823E1	-3.26302E1	-3.2611E1	2.67872E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
1.6E1	3.226E3	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80017E1	-4.76837E-5	-8.80003E1	6.4373E-4	5.34058E-3	9.32217E-2	2.73003E1	-3.26554E1	-3.2593E1	2.6792E1	1.73454E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.98937E-1
1.7E1	3.8464E4	3.6E1	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-2.38419E-4	-8.80002E1	4.29153E-4	5.14984E-3	9.32217E-2	2.73027E1	-3.26632E1	-3.26301E1	2.67668E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99283E-1
1.8E1	1.67927E5	1.06E2	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-3.8147E-4	-8.80004E1	3.8147E-4	5.50747E-3	9.32932E-2	2.73081E1	-3.26741E1	-3.2638E1	2.67788E1	1.73605E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9968E-1
1.9E1	2.3E3	2.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80019E1	-1.90735E-4	-8.80006E1	2.14577E-4	5.22137E-3	9.34839E-2	2.72815E1	-3.26697E1	-3.25871E1	2.67944E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00673E-1
2.0E1	3.18E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80019E1	-2.14577E-4	-8.80007E1	4.52995E-4	5.29289E-3	9.30786E-2	2.73117E1	-3.26561E1	-3.2644E1	2.68267E1	1.73418E-7	2.51538E-3	2.51538E-3	6.3074E-3	2.00516E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	-9.53674E-5	-8.80006E1	4.05312E-4	5.05447E-3	9.33886E-2	2.73189E1	-3.26909E1	-3.26146E1	2.68064E1					
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80017E1	-2.38419E-5	-8.80003E1	3.8147E-4	4.8399E-3	9.34601E-2	2.7321E1	-3.26425E1	-3.26231E1	2.67872E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00325E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80018E1	-9.53674E-5	-8.80003E1	1.43051E-4	5.19753E-3	9.3317E-2	2.73075E1	-3.26554E1	-3.26326E1	2.67974E1	1.73454E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.9911E-1