[Scan]
initial_time=2016-02-16T03:18:06
final_time=2016-02-16T03:18:35
ip_count=19
run=1030
dataset=7
scan=572
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.75806E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.77092E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=3.7353E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.67879E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=7.60543E-10
mult1=-1.00432E-8
mult2=-2.9114E-9
rf_tmon=-4.68055E-3
rf_agc=3.27251E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.91233E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70161E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05419E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.04865E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04611E1
cs_ea1_imon=2.18507E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02416E0
lens1_imon=1.69734E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=3.01405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.59222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.71993E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.90738E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=1.89626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.27792E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.28796E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=7.13825E-10
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26602E1
iondef3_imon=1.52179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98703E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.49045E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=2.0304E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.22082E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63423E-1
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64261E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.8735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.28209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.87849E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.57389E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-2.02124E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.01725E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.85545E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.55152E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.25421E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57387E0
defgridb_imon=6.25964E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33903E1
os_fil1_imon=5.485E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73147E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30724E1
cs_fil1_imon=1.00947E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.25151E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.86051E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88124E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4159E4	8.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80017E1	7.15256E-5	-8.8E1	8.58307E-4	5.38826E-3	9.33409E-2	2.72709E1	-3.26313E1	-3.26065E1	2.67758E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
2.0E0	5.946E3	2.0E0	3.16E2	1.6E2	-7.286E-2	-8.80018E1	-6.91414E-4	-8.80002E1	7.39098E-4	5.05447E-3	9.31263E-2	2.72895E1	-3.26386E1	-3.26212E1	2.6795E1	1.73457E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9883E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	0.0E0	-8.80002E1	7.39098E-4	5.14984E-3	9.32693E-2	2.73236E1	-3.26778E1	-3.26145E1	2.67837E1	1.73451E-7	2.51804E-3	2.51804E-3	6.32978E-3	1.99577E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80019E1	-2.38419E-4	-8.80003E1	5.72205E-4	5.67436E-3	9.36747E-2	2.72845E1	-3.26656E1	-3.26039E1	2.68298E1	1.73553E-7	2.51516E-3	2.51516E-3	6.3224E-3	1.99204E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80019E1	-1.19209E-4	-8.80004E1	5.72205E-4	5.43594E-3	9.33886E-2	2.73015E1	-3.26374E1	-3.26699E1	2.68022E1	1.73314E-7	2.52131E-3	2.52131E-3	6.2863E-3	1.99506E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80016E1	-1.66893E-4	-8.80005E1	5.24521E-4	5.14984E-3	9.29832E-2	2.72917E1	-3.26683E1	-3.26267E1	2.67751E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80018E1	-3.09944E-4	-8.80005E1	6.4373E-4	5.65052E-3	9.32217E-2	2.73051E1	-3.26567E1	-3.26194E1	2.67716E1	1.73605E-7	2.51306E-3	2.51306E-3	6.32028E-3	1.98539E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80018E1	-9.53674E-5	-8.80004E1	5.48363E-4	5.79357E-3	9.31501E-2	2.72925E1	-3.26308E1	-3.26206E1	2.68124E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
1.2E1	3.37E2	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80019E1	-1.66893E-4	-8.80004E1	2.6226E-4	5.48363E-3	9.31025E-2	2.72552E1	-3.26585E1	-3.26038E1	2.67764E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.97216E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80017E1	-4.05312E-4	-8.80001E1	5.48363E-4	5.48363E-3	9.30786E-2	2.73454E1	-3.26969E1	-3.26314E1	2.67998E1	1.73379E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.97216E-1
1.4E1	7.1E2	0.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80017E1	-5.24521E-4	-8.80003E1	5.72205E-4	5.24521E-3	9.27925E-2	2.73558E1	-3.26543E1	-3.26413E1	2.67541E1	1.73529E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97216E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80013E1	-4.29153E-4	-8.79999E1	3.33786E-4	5.6982E-3	9.29117E-2	2.73435E1	-3.26645E1	-3.265E1	2.6837E1	1.73309E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.98661E-1
1.6E1	3.199E3	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80018E1	-1.90735E-4	-8.80002E1	4.05312E-4	5.62668E-3	9.25541E-2	2.73381E1	-3.26506E1	-3.26326E1	2.67931E1	1.73379E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.97388E-1
1.7E1	3.8445E4	2.5E1	6.87E2	4.7E2	-7.33239E-2	-8.80016E1	-3.57628E-4	-8.8E1	2.38419E-4	5.34058E-3	9.30309E-2	2.72957E1	-3.26826E1	-3.26366E1	2.68136E1	1.73228E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97903E-1
1.8E1	1.67008E5	9.9E1	7.27E2	5.0E2	-7.33239E-2	-8.80018E1	-2.86102E-4	-8.80001E1	2.86102E-4	4.98295E-3	9.33647E-2	2.72919E1	-3.26374E1	-3.26428E1	2.67577E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9985E-1
1.9E1	2.269E3	3.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80018E1	-5.24521E-4	-8.80002E1	1.90735E-4	5.17368E-3	9.32693E-2	2.72592E1	-3.26327E1	-3.26811E1	2.67746E1	1.73529E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99456E-1
2.0E1	3.53E2	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80018E1	-6.67572E-4	-8.80002E1	3.09944E-4	5.10216E-3	9.31978E-2	2.72845E1	-3.26526E1	-3.26714E1	2.68028E1	1.73528E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99577E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80018E1	-5.00679E-4	-8.8E1	3.33786E-4	5.43594E-3	9.35555E-2	2.73139E1	-3.26325E1	-3.26526E1	2.67601E1	1.73457E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9883E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.8002E1	-6.19888E-4	-8.80001E1	3.09944E-4	5.38826E-3	9.34601E-2	2.73808E1	-3.26452E1	-3.26446E1	2.67955E1	1.73457E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9917E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80018E1	-9.77516E-4	-8.79999E1	3.33786E-4	5.43594E-3	9.33886E-2	2.73086E1	-3.26526E1	-3.26602E1	2.67902E1	1.73529E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98764E-1