[Scan]
initial_time=2016-02-16T03:20:04
final_time=2016-02-16T03:20:33
ip_count=19
run=1030
dataset=7
scan=575
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.83074E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.67651E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.5609E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.63345E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=7.63619E-10
mult1=-1.021E-8
mult2=-2.7765E-9
rf_tmon=-5.43169E-3
rf_agc=3.23482E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.14085E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.84778E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1967E1
lens5a_imon=2.00542E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=3.05874E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02406E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.1763E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05397E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.5822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.88491E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.10632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.28371E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.65748E-10
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.83282E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=2.01912E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.21667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74315E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.89575E-1
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65282E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63787E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.29687E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90716E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.31402E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.78078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33902E1
os_fil1_imon=4.77622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74349E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6662E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30716E1
cs_fil1_imon=1.01072E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66434E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.44267E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01939E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4356E4	1.3E1	1.47E2	4.1E1	-7.29374E-2	-8.80015E1	1.19209E-4	-8.80002E1	4.05312E-4	5.38826E-3	9.33409E-2	2.73222E1	-3.26767E1	-3.26071E1	2.67968E1	1.73454E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.9911E-1
2.0E0	5.619E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80019E1	-4.76837E-4	-8.80003E1	2.6226E-4	5.29289E-3	9.32455E-2	2.72935E1	-3.26903E1	-3.26456E1	2.6816E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00192E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80018E1	-2.14577E-4	-8.80002E1	1.66893E-4	5.36442E-3	9.30309E-2	2.72892E1	-3.26638E1	-3.26142E1	2.68146E1	1.73528E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.97294E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80018E1	-2.14577E-4	-8.8E1	4.29153E-4	5.45979E-3	9.32932E-2	2.72868E1	-3.26402E1	-3.26425E1	2.67457E1	1.73532E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.99394E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80018E1	-4.76837E-4	-8.79999E1	3.33786E-4	5.53131E-3	9.34124E-2	2.73357E1	-3.26392E1	-3.26206E1	2.6786E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80018E1	-5.48363E-4	-8.80004E1	5.24521E-4	5.53131E-3	9.36031E-2	2.72645E1	-3.26845E1	-3.26127E1	2.67873E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80014E1	-3.33786E-4	-8.80003E1	3.09944E-4	5.48363E-3	9.35078E-2	2.731E1	-3.26891E1	-3.26064E1	2.68034E1	1.73532E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.99394E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80014E1	-1.43051E-4	-8.80005E1	3.57628E-4	5.34058E-3	9.3317E-2	2.73134E1	-3.2682E1	-3.26301E1	2.68052E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
1.2E1	3.28E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80018E1	-3.57628E-4	-8.80004E1	2.6226E-4	5.34058E-3	9.3317E-2	2.73277E1	-3.26493E1	-3.2648E1	2.67662E1	1.73529E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.99283E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80016E1	-3.57628E-4	-8.80003E1	7.15256E-4	5.126E-3	9.34601E-2	2.72962E1	-3.27039E1	-3.2626E1	2.67938E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99977E-1
1.4E1	7.04E2	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80019E1	-5.24521E-4	-8.80002E1	2.86102E-4	5.24521E-3	9.34839E-2	2.7324E1	-3.25971E1	-3.26472E1	2.67968E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80017E1	-5.00679E-4	-8.80001E1	5.96046E-4	5.55515E-3	9.35555E-2	2.73201E1	-3.26759E1	-3.26116E1	2.68123E1	1.73383E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98153E-1
1.6E1	3.088E3	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80017E1	-4.05312E-4	-8.80003E1	5.00679E-4	5.45979E-3	9.34601E-2	2.73169E1	-3.26626E1	-3.26183E1	2.67776E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
1.7E1	3.8247E4	1.8E1	6.87E2	4.7E2	-7.32464E-2	-8.80015E1	-4.05312E-4	-8.80001E1	2.14577E-4	5.62668E-3	9.34601E-2	2.73015E1	-3.2653E1	-3.26386E1	2.68196E1	1.73531E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9883E-1
1.8E1	1.6887E5	8.9E1	7.27E2	5.0E2	-7.37103E-2	-8.80016E1	-2.6226E-4	-8.80003E1	3.57628E-4	5.72205E-3	9.31978E-2	2.73081E1	-3.2611E1	-3.26404E1	2.6789E1	1.73605E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.99283E-1
1.9E1	2.225E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80019E1	-4.76837E-4	-8.80002E1	7.39098E-4	5.67436E-3	9.32217E-2	2.73351E1	-3.26446E1	-3.26242E1	2.67842E1	1.73529E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
2.0E1	3.22E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.6226E-4	5.17368E-3	9.30071E-2	2.72775E1	-3.26603E1	-3.26368E1	2.67956E1	1.73529E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00325E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80017E1	-4.76837E-5	-8.80005E1	3.8147E-4	5.72205E-3	9.34362E-2	2.72898E1	-3.26396E1	-3.26425E1	2.67984E1	1.73457E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00192E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80016E1	-2.6226E-4	-8.80002E1	4.76837E-4	5.31673E-3	9.3317E-2	2.72951E1	-3.26756E1	-3.26284E1	2.67884E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80016E1	-4.76837E-4	-8.80002E1	3.33786E-4	5.29289E-3	9.32455E-2	2.72781E1	-3.26711E1	-3.2626E1	2.68112E1	1.73457E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00021E-1