[Scan]
initial_time=2016-02-16T03:20:44
final_time=2016-02-16T03:21:12
ip_count=19
run=1030
dataset=7
scan=576
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.80778E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.53155E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.8569E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.69059E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=7.84242E-10
mult1=-9.72062E-9
mult2=-2.81548E-9
rf_tmon=-5.04194E-3
rf_agc=3.3463E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=3.99792E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.78289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53244E1
cs_ef1b_imon=3.06271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.19685E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02333E0
lens1_imon=1.31928E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.58653E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.01369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.91006E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.87494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89439E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.09911E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.26857E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.2721E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.93993E-10
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26787E1
iondef2_imon=1.60059E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.06873E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=2.01155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.2073E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.69748E-1
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65041E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52975E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.87891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.32452E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73486E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68462E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.90023E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.38829E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.8154E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.17875E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.74113E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65721E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=4.95041E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77352E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66586E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30743E1
cs_fil1_imon=1.00948E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66637E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22382E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73533E-7
chamber_cvt_pmon=2.51162E-3
foreline_cvt_pmon=2.51162E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.96243E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=142
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4108E4	1.1E1	1.47E2	4.1E1	-7.27828E-2	-8.80018E1	1.66893E-4	-8.80002E1	6.19888E-4	5.14984E-3	9.32693E-2	2.73173E1	-3.26411E1	-3.26057E1	2.67937E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00151E-1
2.0E0	5.861E3	5.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80018E1	-9.53674E-5	-8.80004E1	4.52995E-4	5.67436E-3	9.33647E-2	2.73104E1	-3.26791E1	-3.26254E1	2.67824E1	1.73605E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.98727E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80015E1	-5.00679E-4	-8.80002E1	6.4373E-4	5.81741E-3	9.3317E-2	2.73039E1	-3.26779E1	-3.27027E1	2.67763E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80014E1	-2.86102E-4	-8.80004E1	2.86102E-4	5.76973E-3	9.32455E-2	2.73228E1	-3.26478E1	-3.26113E1	2.6801E1	1.73532E-7	2.51498E-3	2.51498E-3	6.29684E-3	1.99729E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80014E1	-4.29153E-4	-8.8E1	5.72205E-4	5.57899E-3	9.30786E-2	2.73063E1	-3.26771E1	-3.26026E1	2.68142E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80018E1	-3.57628E-4	-8.80004E1	3.33786E-4	5.62668E-3	9.30309E-2	2.73225E1	-3.26579E1	-3.26356E1	2.67926E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80021E1	4.76837E-5	-8.80006E1	5.72205E-4	5.24521E-3	9.31263E-2	2.7308E1	-3.26579E1	-3.26484E1	2.67776E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-3.33786E-4	-8.80002E1	6.19888E-4	5.48363E-3	9.33886E-2	2.73082E1	-3.2667E1	-3.25776E1	2.68364E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
1.2E1	3.39E2	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80018E1	-2.86102E-4	-8.80002E1	3.33786E-4	5.6982E-3	9.36985E-2	2.72709E1	-3.26669E1	-3.26506E1	2.67728E1	1.73374E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.99577E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.8002E1	-2.86102E-4	-8.80006E1	5.48363E-4	5.50747E-3	9.35555E-2	2.73358E1	-3.26691E1	-3.26307E1	2.6813E1	1.73531E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00021E-1
1.4E1	6.95E2	1.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80018E1	-4.76837E-5	-8.80004E1	5.48363E-4	5.38826E-3	9.33886E-2	2.73117E1	-3.26494E1	-3.26633E1	2.67938E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98764E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80018E1	-1.19209E-4	-8.80007E1	9.05991E-4	5.31673E-3	9.34839E-2	2.72751E1	-3.2675E1	-3.26076E1	2.67662E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98937E-1
1.6E1	3.14E3	2.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80018E1	-1.66893E-4	-8.80004E1	3.33786E-4	5.67436E-3	9.33647E-2	2.7308E1	-3.26461E1	-3.26231E1	2.67884E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98764E-1
1.7E1	3.8184E4	1.9E1	6.87E2	4.7E2	-7.37103E-2	-8.80021E1	-1.66893E-4	-8.80004E1	2.86102E-4	5.4121E-3	9.34362E-2	2.73087E1	-3.26627E1	-3.26284E1	2.68186E1	1.73529E-7	2.50789E-3	2.50789E-3	6.3074E-3	1.99283E-1
1.8E1	1.68447E5	1.0E2	7.27E2	5.0E2	-7.3401E-2	-8.8002E1	-5.72205E-4	-8.80003E1	1.90735E-4	5.57899E-3	9.35555E-2	2.73105E1	-3.26861E1	-3.26128E1	2.68001E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
1.9E1	2.297E3	2.0E0	7.68E2	5.29E2	-7.35556E-2	-8.8002E1	-1.66893E-4	-8.80009E1	6.19888E-4	5.4121E-3	9.31978E-2	2.73147E1	-3.26711E1	-3.26158E1	2.68053E1	1.73379E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.9911E-1
2.0E1	3.54E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.8002E1	-1.43051E-4	-8.80007E1	3.8147E-4	5.38826E-3	9.35793E-2	2.72868E1	-3.26472E1	-3.26077E1	2.68076E1	1.73605E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.98247E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80021E1	-5.72205E-4	-8.80009E1	5.96046E-4	5.67436E-3	9.33409E-2	2.73135E1	-3.26536E1	-3.26482E1	2.68088E1	1.73383E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9985E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80018E1	-5.48363E-4	-8.80009E1	4.52995E-4	5.4121E-3	9.33647E-2	2.73109E1	-3.26393E1	-3.26463E1	2.67746E1	1.73379E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98419E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80018E1	-4.76837E-4	-8.80008E1	5.24521E-4	5.34058E-3	9.35316E-2	2.73486E1	-3.26787E1	-3.26242E1	2.68462E1	1.73533E-7	2.51162E-3	2.51162E-3	6.3126E-3	1.99283E-1