[Scan]
initial_time=2016-02-16T03:22:17
final_time=2016-02-16T03:22:46
ip_count=19
run=1030
dataset=8
scan=578
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.19516E-1
ql1_imon=1.67931E-9
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.16305E-10
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=3.77833E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=1.75309E-10
mult1=-9.73579E-9
mult2=-2.75461E-9
rf_tmon=-3.89008E-3
rf_agc=3.32206E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.10743E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.8795E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.06703E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02429E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.18861E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=2.80517E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03319E1
cs_ea2_imon=1.58621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.03748E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=3.22688E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.87386E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=1.93059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.28217E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=3.28003E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.22821E-10
tplens_vset=1.4E-1
tplens_vmon=1.65618E0
tplens_imon=-9.71409E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.53701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=2.80881E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=2.03288E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73451E-1
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00863E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65222E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10667E1
os_restr2_imon=2.88611E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.32937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.29398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.7886E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=1.43409E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10551E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.30565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.48427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60045E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=5.50302E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49121E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66611E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=1.00877E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66195E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66227E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22274E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.19707E-1	-7.98082E-1	-9.13086E0	-9.1419E0	5.60284E-3	9.30786E-2	2.73033E1	-3.26531E1	-3.26419E1	2.67931E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.19874E-1	-7.98225E-1	-9.13076E0	-9.14171E0	5.45979E-3	9.32455E-2	2.72889E1	-3.26639E1	-3.2614E1	2.6786E1	1.73235E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.19683E-1	-7.98345E-1	-9.13117E0	-9.14171E0	5.19753E-3	9.30071E-2	2.72757E1	-3.26327E1	-3.26211E1	2.67764E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.19635E-1	-7.98583E-1	-9.13057E0	-9.14176E0	5.19753E-3	9.30786E-2	2.73086E1	-3.26537E1	-3.26573E1	2.6807E1	1.73379E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.19945E-1	-7.98035E-1	-9.13069E0	-9.14173E0	5.48363E-3	9.31978E-2	2.72919E1	-3.26849E1	-3.26032E1	2.68112E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00192E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.19826E-1	-7.98535E-1	-9.13057E0	-9.14195E0	5.55515E-3	9.29594E-2	2.73009E1	-3.26206E1	-3.26296E1	2.67758E1	1.73605E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.00996E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.19778E-1	-7.98297E-1	-9.1306E0	-9.1418E0	5.24521E-3	9.30548E-2	2.72889E1	-3.26669E1	-3.26194E1	2.68094E1	1.73531E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.19898E-1	-7.98535E-1	-9.13041E0	-9.14199E0	4.8399E-3	9.31978E-2	2.73081E1	-3.26266E1	-3.2593E1	2.67974E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.19802E-1	-7.98702E-1	-9.13043E0	-9.1419E0	5.07832E-3	9.32455E-2	2.72702E1	-3.26494E1	-3.25888E1	2.68136E1	1.73379E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.19564E-1	-7.98655E-1	-9.13038E0	-9.14195E0	4.88758E-3	9.29594E-2	2.72784E1	-3.26706E1	-3.2648E1	2.68041E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.19373E-1	-7.98249E-1	-9.13026E0	-9.14183E0	5.24521E-3	9.2864E-2	2.73339E1	-3.26699E1	-3.26428E1	2.67794E1	1.73457E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9968E-1
1.5E1	1.0E0	2.0E0	6.06E2	4.11E2	-2.09456E0	-8.19516E-1	-7.98559E-1	-9.13064E0	-9.14226E0	5.07832E-3	9.27448E-2	2.72618E1	-3.26927E1	-3.26482E1	2.67998E1	1.73529E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.19731E-1	-7.9844E-1	-9.13055E0	-9.14187E0	5.26905E-3	9.31978E-2	2.72696E1	-3.26705E1	-3.265E1	2.681E1	1.73309E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.19445E-1	-7.98559E-1	-9.13062E0	-9.14218E0	5.26905E-3	9.34124E-2	2.73204E1	-3.2685E1	-3.2606E1	2.67956E1	1.73454E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.19731E-1	-7.98464E-1	-9.13064E0	-9.14192E0	5.45979E-3	9.31025E-2	2.7299E1	-3.26707E1	-3.26144E1	2.67962E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.19707E-1	-7.9844E-1	-9.13062E0	-9.14218E0	5.17368E-3	9.31263E-2	2.72939E1	-3.26667E1	-3.25965E1	2.67722E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.97731E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1954E-1	-7.9875E-1	-9.13038E0	-9.14211E0	5.05447E-3	9.34362E-2	2.73141E1	-3.26494E1	-3.26308E1	2.6814E1	1.73379E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.19707E-1	-7.98845E-1	-9.13048E0	-9.1423E0	4.95911E-3	9.35316E-2	2.73099E1	-3.26512E1	-3.26488E1	2.68052E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98075E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.19588E-1	-7.98178E-1	-9.13038E0	-9.14216E0	5.34058E-3	9.32932E-2	2.72986E1	-3.26897E1	-3.26408E1	2.68178E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98153E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.19516E-1	-7.98512E-1	-9.13064E0	-9.14195E0	5.67436E-3	9.29594E-2	2.73216E1	-3.26425E1	-3.26001E1	2.6819E1	1.73531E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.9968E-1