[Scan]
initial_time=2016-02-16T03:23:31
final_time=2016-02-16T03:23:54
ip_count=19
run=1030
dataset=8
scan=580
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.18181E-1
ql1_imon=1.17499E-9
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.54929E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=2.27039E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.54195E-10
mult1=-1.04569E-8
mult2=-2.82909E-9
rf_tmon=-4.24992E-3
rf_agc=3.38046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.33297E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63178E0
bslens_imon=2.61652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19982E1
lens5a_imon=1.98685E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.07676E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02411E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04921E1
cs_ea1_imon=2.1738E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38235E0
lens1_imon=2.62754E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03837E1
cs_ea2_imon=1.59494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.02234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.72422E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.89657E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14865E1
os_ea1_imon=1.87556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27475E0
cs_ionrep_imon=1.26878E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93718E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.28399E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.16169E-10
tplens_vset=1.4E-1
tplens_vmon=1.57287E0
tplens_imon=-2.63092E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26065E1
iondef3_imon=1.50716E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.60192E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.06892E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25087E0
ionrepsh_imon=2.02064E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33884E1
lens5b_imon=2.2131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75088E-1
os_ea2_imon=-7.40579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00876E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71642E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.89044E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31508E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.28822E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73482E1
iondef1_imon=1.07815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.85866E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.64609E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92705E3
multa_neg_imon=7.37301E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93782E3
defgrida_imon=7.17467E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.96804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47097E0
defgridb_imon=6.19032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.33484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33504E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6657E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30773E1
cs_fil1_imon=1.00902E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66357E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29199E-2
os_fil2_imon=-2.29356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57463E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.14262E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18825E-1	-7.97987E-1	-9.13064E0	-9.14166E0	5.31673E-3	9.32693E-2	2.72892E1	-3.26567E1	-3.25959E1	2.6825E1	1.73451E-7	2.51359E-3	2.51359E-3	6.3074E-3	1.99931E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.19063E-1	-7.97677E-1	-9.13072E0	-9.14197E0	5.43594E-3	9.33886E-2	2.73082E1	-3.26566E1	-3.26187E1	2.67902E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00705E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.19254E-1	-7.98273E-1	-9.13076E0	-9.14171E0	4.91142E-3	9.31978E-2	2.72847E1	-3.26772E1	-3.26321E1	2.67858E1	1.73528E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18968E-1	-7.98321E-1	-9.1305E0	-9.14164E0	5.24521E-3	9.3317E-2	2.73515E1	-3.26597E1	-3.26095E1	2.67957E1	1.73605E-7	2.5165E-3	2.5165E-3	6.29211E-3	1.99983E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.19039E-1	-7.97987E-1	-9.13081E0	-9.14161E0	5.14984E-3	9.35078E-2	2.72901E1	-3.26759E1	-3.26134E1	2.68226E1	1.73448E-7	2.50818E-3	2.50818E-3	6.3245E-3	2.00064E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18777E-1	-7.9782E-1	-9.13072E0	-9.14183E0	5.53131E-3	9.36747E-2	2.73157E1	-3.26396E1	-3.2626E1	2.67884E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31288E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.18729E-1	-7.98154E-1	-9.13067E0	-9.14178E0	5.05447E-3	9.36031E-2	2.73255E1	-3.26488E1	-3.2605E1	2.67968E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.19206E-1	-7.98392E-1	-9.13084E0	-9.1418E0	5.126E-3	9.377E-2	2.73472E1	-3.26585E1	-3.2584E1	2.6786E1	1.73454E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.19135E-1	-7.98273E-1	-9.13079E0	-9.1419E0	5.60284E-3	9.33886E-2	2.72793E1	-3.26518E1	-3.26314E1	2.67649E1	1.73303E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99803E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.19111E-1	-7.98512E-1	-9.13067E0	-9.14176E0	5.19753E-3	9.33409E-2	2.72805E1	-3.26693E1	-3.26134E1	2.67968E1	1.73454E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.18825E-1	-7.98082E-1	-9.13067E0	-9.14185E0	5.38826E-3	9.32693E-2	2.73556E1	-3.26921E1	-3.26392E1	2.67637E1	1.73529E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.19087E-1	-7.9844E-1	-9.13079E0	-9.14168E0	4.98295E-3	9.29594E-2	2.73261E1	-3.26729E1	-3.25858E1	2.68136E1	1.73454E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.18777E-1	-7.98702E-1	-9.13067E0	-9.1418E0	4.93526E-3	9.30071E-2	2.73195E1	-3.26801E1	-3.2587E1	2.67956E1	1.73309E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9951E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.18634E-1	-7.98368E-1	-9.13069E0	-9.14204E0	5.14984E-3	9.35555E-2	2.73375E1	-3.26319E1	-3.26201E1	2.67926E1	1.73529E-7	2.51552E-3	2.51552E-3	6.28006E-3	1.9911E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.18801E-1	-7.98821E-1	-9.131E0	-9.14187E0	5.14984E-3	9.32932E-2	2.73069E1	-3.26404E1	-3.26176E1	2.68022E1	1.73531E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9985E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.18658E-1	-7.98583E-1	-9.13086E0	-9.14204E0	5.14984E-3	9.29832E-2	2.73375E1	-3.26458E1	-3.25846E1	2.67932E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18515E-1	-7.97701E-1	-9.13079E0	-9.14185E0	5.22137E-3	9.33409E-2	2.73169E1	-3.26502E1	-3.26767E1	2.68232E1	1.73605E-7	2.52362E-3	2.52362E-3	6.30182E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1861E-1	-7.98655E-1	-9.13086E0	-9.14192E0	5.29289E-3	9.3317E-2	2.73116E1	-3.26614E1	-3.26254E1	2.67976E1	1.73531E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.00363E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18157E-1	-7.97963E-1	-9.13074E0	-9.14168E0	5.31673E-3	9.33409E-2	2.73207E1	-3.26795E1	-3.26446E1	2.67911E1	1.73457E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.18181E-1	-7.98416E-1	-9.13095E0	-9.14199E0	5.45979E-3	9.31978E-2	2.73482E1	-3.26691E1	-3.26065E1	2.6807E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9951E-1