[Scan]
initial_time=2016-02-16T03:25:05
final_time=2016-02-16T03:25:28
ip_count=19
run=1030
dataset=8
scan=583
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=9.22442E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.81918E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=1.52643E-9
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=4.01366E-10
mult1=-9.51162E-9
mult2=-2.64675E-9
rf_tmon=-4.54847E-3
rf_agc=3.31473E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.84927E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05245E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.19746E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.76978E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.58974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8395E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.82614E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15589E1
os_ea1_imon=1.90723E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.27509E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=3.29444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.69265E-10
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.6131E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98611E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.54791E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22496E0
ionrepsh_imon=2.02049E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74988E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43956E-1
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66063E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.88359E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.27344E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.90696E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.94983E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.75681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.21882E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33936E1
os_fil1_imon=4.6621E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81557E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66422E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=1.01024E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62348E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66636E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.17343E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00407E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74959E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73531E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18062E-1	-7.98345E-1	-9.13115E0	-9.14202E0	5.65052E-3	9.31978E-2	2.73213E1	-3.26849E1	-3.26122E1	2.68052E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.178E-1	-7.98202E-1	-9.13112E0	-9.14192E0	5.126E-3	9.3317E-2	2.73051E1	-3.2648E1	-3.25972E1	2.68328E1	1.73679E-7	2.50989E-3	2.50989E-3	6.29665E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.17704E-1	-7.98345E-1	-9.13088E0	-9.14202E0	5.26905E-3	9.30786E-2	2.73381E1	-3.26741E1	-3.26277E1	2.67944E1	1.73528E-7	2.51359E-3	2.51359E-3	6.34099E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1799E-1	-7.98273E-1	-9.13112E0	-9.14185E0	4.86374E-3	9.31025E-2	2.73129E1	-3.26284E1	-3.26362E1	2.67972E1	1.73531E-7	2.51739E-3	2.51739E-3	6.34518E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18086E-1	-7.98106E-1	-9.13117E0	-9.14166E0	5.14984E-3	9.31978E-2	2.72587E1	-3.26544E1	-3.26579E1	2.67833E1	1.73605E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.97984E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17966E-1	-7.98368E-1	-9.13086E0	-9.14178E0	5.36442E-3	9.31025E-2	2.73187E1	-3.26679E1	-3.25924E1	2.68052E1	1.73495E-7	2.51564E-3	2.51564E-3	6.31274E-3	1.98443E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18133E-1	-7.98416E-1	-9.13084E0	-9.14159E0	5.17368E-3	9.3174E-2	2.73252E1	-3.26738E1	-3.26071E1	2.68028E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17943E-1	-7.98202E-1	-9.13086E0	-9.14159E0	5.24521E-3	9.3317E-2	2.72727E1	-3.26732E1	-3.2629E1	2.67781E1	1.73529E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17847E-1	-7.98082E-1	-9.13095E0	-9.14171E0	5.55515E-3	9.32932E-2	2.72941E1	-3.26272E1	-3.26132E1	2.68034E1	1.73532E-7	2.51393E-3	2.51393E-3	6.30212E-3	1.99061E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17895E-1	-7.98464E-1	-9.13074E0	-9.14161E0	5.48363E-3	9.33886E-2	2.73027E1	-3.2644E1	-3.2638E1	2.68214E1	1.73605E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99401E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17943E-1	-7.9813E-1	-9.13067E0	-9.14185E0	5.67436E-3	9.32455E-2	2.73027E1	-3.2647E1	-3.2623E1	2.67932E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.98764E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18038E-1	-7.98655E-1	-9.13126E0	-9.14178E0	5.45979E-3	9.33886E-2	2.73016E1	-3.26573E1	-3.25888E1	2.68148E1	1.73529E-7	2.51334E-3	2.51334E-3	6.28552E-3	1.97216E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.18014E-1	-7.98059E-1	-9.13107E0	-9.14202E0	5.45979E-3	9.35078E-2	2.72999E1	-3.27042E1	-3.26127E1	2.68522E1	1.73531E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.98153E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18276E-1	-7.98011E-1	-9.13117E0	-9.14173E0	5.65052E-3	9.3627E-2	2.73111E1	-3.26278E1	-3.26326E1	2.678E1	1.73532E-7	2.51393E-3	2.51393E-3	6.31798E-3	1.99394E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.18062E-1	-7.98512E-1	-9.13093E0	-9.14178E0	5.36442E-3	9.33409E-2	2.73027E1	-3.26482E1	-3.26524E1	2.67872E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.17823E-1	-7.98249E-1	-9.13105E0	-9.14216E0	5.45979E-3	9.34839E-2	2.73069E1	-3.26548E1	-3.26493E1	2.68148E1	1.73529E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.17847E-1	-7.98225E-1	-9.13107E0	-9.14197E0	5.43594E-3	9.34601E-2	2.72733E1	-3.26218E1	-3.26621E1	2.67193E1	1.73451E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99224E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17966E-1	-7.98082E-1	-9.13091E0	-9.14176E0	5.6982E-3	9.36508E-2	2.72915E1	-3.26726E1	-3.26596E1	2.68899E1	1.73529E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17895E-1	-7.98249E-1	-9.13124E0	-9.14211E0	5.62668E-3	9.32693E-2	2.7324E1	-3.26596E1	-3.26178E1	2.6759E1	1.73457E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17919E-1	-7.98655E-1	-9.13126E0	-9.14173E0	5.67436E-3	9.29832E-2	2.73093E1	-3.26897E1	-3.26038E1	2.68214E1	1.73531E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1