[Scan]
initial_time=2016-02-16T03:25:36
final_time=2016-02-16T03:25:59
ip_count=19
run=1030
dataset=8
scan=584
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=8.02922E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.60329E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.26448E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.1455E-10
mult1=-9.83036E-9
mult2=-2.67034E-9
rf_tmon=-5.19376E-3
rf_agc=3.36336E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.49498E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.07316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.20029E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.59328E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.03135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.55172E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=1.909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=1.26377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.27246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.54066E-10
tplens_vset=1.4E-1
tplens_vmon=1.60368E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.60426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98689E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.36695E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=2.02438E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71092E-1
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63059E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45166E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.85908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.28713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72874E1
iondef1_imon=1.12042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90737E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=1.66869E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-1.7241E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.60461E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.57818E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=5.08256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.63226E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66443E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=1.00904E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6284E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.06414E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73529E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34375E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.18038E-1	-7.98583E-1	-9.13086E0	-9.14199E0	5.48363E-3	9.32217E-2	2.73157E1	-3.26343E1	-3.26195E1	2.68076E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17752E-1	-7.98154E-1	-9.13117E0	-9.14207E0	5.17368E-3	9.32693E-2	2.72817E1	-3.26663E1	-3.25888E1	2.68331E1	1.73457E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.18157E-1	-7.98607E-1	-9.13131E0	-9.14204E0	5.19753E-3	9.33409E-2	2.73051E1	-3.26679E1	-3.26319E1	2.67995E1	1.73605E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18133E-1	-7.98774E-1	-9.13122E0	-9.14221E0	5.36442E-3	9.34362E-2	2.73261E1	-3.26969E1	-3.2647E1	2.68022E1	1.73605E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.01219E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18086E-1	-7.98583E-1	-9.13117E0	-9.14218E0	5.126E-3	9.31263E-2	2.72901E1	-3.26518E1	-3.2632E1	2.68022E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18086E-1	-7.98225E-1	-9.1311E0	-9.14226E0	5.65052E-3	9.33886E-2	2.72968E1	-3.26579E1	-3.26089E1	2.68244E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17776E-1	-7.9844E-1	-9.131E0	-9.14216E0	5.74589E-3	9.3174E-2	2.73143E1	-3.26523E1	-3.26511E1	2.6807E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17752E-1	-7.98512E-1	-9.13095E0	-9.14221E0	5.48363E-3	9.34839E-2	2.73175E1	-3.26785E1	-3.26065E1	2.67914E1	1.73605E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.98872E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.178E-1	-7.98464E-1	-9.13119E0	-9.14221E0	5.26905E-3	9.34362E-2	2.73008E1	-3.26615E1	-3.26321E1	2.68382E1	1.73531E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.9968E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17347E-1	-7.98297E-1	-9.13112E0	-9.1423E0	4.91142E-3	9.3174E-2	2.73027E1	-3.26597E1	-3.26368E1	2.6777E1	1.73528E-7	2.51359E-3	2.51359E-3	6.34661E-3	1.98872E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17704E-1	-7.98202E-1	-9.13112E0	-9.1424E0	5.19753E-3	9.36031E-2	2.73057E1	-3.26567E1	-3.26038E1	2.68196E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17752E-1	-7.9813E-1	-9.13079E0	-9.14216E0	5.65052E-3	9.33886E-2	2.72591E1	-3.26526E1	-3.26585E1	2.67879E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.1768E-1	-7.98559E-1	-9.13095E0	-9.14207E0	5.26905E-3	9.33409E-2	2.73057E1	-3.26663E1	-3.26248E1	2.68257E1	1.73531E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00534E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17537E-1	-7.98607E-1	-9.13115E0	-9.14214E0	5.48363E-3	9.29117E-2	2.72751E1	-3.26969E1	-3.2611E1	2.67995E1	1.73451E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.00463E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17728E-1	-7.98059E-1	-9.13105E0	-9.14195E0	5.34058E-3	9.31978E-2	2.73188E1	-3.26294E1	-3.26846E1	2.67856E1	1.73383E-7	2.51847E-3	2.51847E-3	6.28056E-3	1.97984E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17728E-1	-7.98321E-1	-9.13107E0	-9.14187E0	5.34058E-3	9.33647E-2	2.73282E1	-3.2636E1	-3.26379E1	2.67751E1	1.73533E-7	2.5199E-3	2.5199E-3	6.30221E-3	1.9994E-1
2.0E1	0.0E0	1.0E0	8.08E2	5.58E2	-2.09487E0	-8.17513E-1	-7.98392E-1	-9.13107E0	-9.14195E0	5.22137E-3	9.32693E-2	2.73287E1	-3.27021E1	-3.25936E1	2.68256E1	1.73451E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17776E-1	-7.98535E-1	-9.13115E0	-9.14197E0	5.34058E-3	9.32693E-2	2.73045E1	-3.26536E1	-3.26302E1	2.67613E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17466E-1	-7.98225E-1	-9.13112E0	-9.14214E0	5.43594E-3	9.37462E-2	2.72588E1	-3.26909E1	-3.2611E1	2.68268E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17895E-1	-7.98368E-1	-9.1311E0	-9.14202E0	5.43594E-3	9.32217E-2	2.72874E1	-3.26278E1	-3.26296E1	2.6819E1	1.73529E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.99283E-1