[Scan]
initial_time=2016-02-16T03:26:07
final_time=2016-02-16T03:26:30
ip_count=19
run=1030
dataset=8
scan=585
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=8.45778E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.62821E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=1.26665E-9
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.43554E-10
mult1=-1.05591E-8
mult2=-2.9821E-9
rf_tmon=-4.68066E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.49057E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62747E0
bslens_imon=2.48252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19961E1
lens5a_imon=1.99991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53354E1
cs_ef1b_imon=3.06766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02187E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04733E1
cs_ea1_imon=2.19493E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38646E0
lens1_imon=2.64242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=3.00059E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04142E1
cs_ea2_imon=1.56365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.01484E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.70073E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=2.89008E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15108E1
os_ea1_imon=1.87755E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23066E0
cs_ionrep_imon=1.2706E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93396E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01537E1
cs_anode1_imon=3.27722E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.34348E-10
tplens_vset=1.4E-1
tplens_vmon=1.62463E0
tplens_imon=-3.88826E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.5129E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.58902E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98582E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.33834E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30019E0
ionrepsh_imon=2.01138E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.21578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74791E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55586E-1
os_ea2_imon=-4.75731E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06162E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70945E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65172E0
os_ef2alow_imon=-2.34522E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70587E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1062E1
os_restr2_imon=2.87653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.34482E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.29129E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09471E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.72667E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-1.82045E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.32349E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86582E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.9784E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.66439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.26925E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52831E0
defgridb_imon=6.21596E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=5.12697E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70444E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=1.00861E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62742E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20775E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.87156E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70995E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14201E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29603E-3
inlet_lpb_pmon=1.97374E-1
chamber_ion_pmon=1.73292E-7
chamber_cvt_pmon=2.51725E-3
foreline_cvt_pmon=2.51725E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15389E-1
res40_imon=-2.70664E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17728E-1	-7.98273E-1	-9.13124E0	-9.14173E0	5.36442E-3	9.32217E-2	2.73236E1	-3.26868E1	-3.26272E1	2.67854E1	1.73459E-7	2.51603E-3	2.51603E-3	6.29157E-3	1.98229E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.178E-1	-7.98345E-1	-9.13124E0	-9.1419E0	5.55515E-3	9.3174E-2	2.72886E1	-3.26517E1	-3.26229E1	2.67962E1	1.73532E-7	2.51287E-3	2.51287E-3	6.33388E-3	1.974E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17752E-1	-7.98559E-1	-9.13103E0	-9.14185E0	5.26905E-3	9.31501E-2	2.72991E1	-3.26194E1	-3.25779E1	2.6795E1	1.73528E-7	2.50914E-3	2.50914E-3	6.31858E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18014E-1	-7.98416E-1	-9.13126E0	-9.14226E0	5.55515E-3	9.35078E-2	2.7285E1	-3.26638E1	-3.25983E1	2.68134E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17537E-1	-7.98321E-1	-9.13122E0	-9.14235E0	5.31673E-3	9.32932E-2	2.72666E1	-3.26675E1	-3.26182E1	2.67878E1	1.73531E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17776E-1	-7.98249E-1	-9.13122E0	-9.1423E0	5.38826E-3	9.32932E-2	2.72998E1	-3.26585E1	-3.26107E1	2.681E1	1.73454E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17752E-1	-7.98678E-1	-9.13112E0	-9.14218E0	5.14984E-3	9.31025E-2	2.72564E1	-3.26783E1	-3.26524E1	2.68112E1	1.73531E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.178E-1	-7.98583E-1	-9.13124E0	-9.14221E0	5.38826E-3	9.32693E-2	2.72883E1	-3.26344E1	-3.26218E1	2.68016E1	1.73529E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.17871E-1	-7.98702E-1	-9.1311E0	-9.1419E0	5.79357E-3	9.33886E-2	2.72732E1	-3.26785E1	-3.25965E1	2.67798E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17966E-1	-7.9813E-1	-9.13105E0	-9.14207E0	5.38826E-3	9.34601E-2	2.72901E1	-3.26567E1	-3.26326E1	2.67842E1	1.73383E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9731E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17776E-1	-7.98392E-1	-9.13131E0	-9.14195E0	5.29289E-3	9.32217E-2	2.73193E1	-3.26691E1	-3.25924E1	2.68196E1	1.73379E-7	2.51225E-3	2.51225E-3	6.28552E-3	1.96361E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17561E-1	-7.98225E-1	-9.13131E0	-9.14195E0	5.65052E-3	9.33886E-2	2.72702E1	-3.26807E1	-3.25767E1	2.67824E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.98322E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17466E-1	-7.97963E-1	-9.13093E0	-9.14183E0	5.17368E-3	9.34601E-2	2.72841E1	-3.26735E1	-3.26567E1	2.68256E1	1.73605E-7	2.52154E-3	2.52154E-3	6.31288E-3	1.98161E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17633E-1	-7.9844E-1	-9.13124E0	-9.14192E0	5.24521E-3	9.36031E-2	2.73252E1	-3.26732E1	-3.26826E1	2.67938E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.1749E-1	-7.98559E-1	-9.13131E0	-9.14226E0	5.4121E-3	9.34601E-2	2.73051E1	-3.26422E1	-3.26518E1	2.68016E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9883E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.17776E-1	-7.98535E-1	-9.13105E0	-9.14216E0	5.29289E-3	9.34362E-2	2.72933E1	-3.2652E1	-3.25546E1	2.6807E1	1.73529E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17561E-1	-7.98488E-1	-9.13103E0	-9.14183E0	5.50747E-3	9.36985E-2	2.72978E1	-3.26756E1	-3.26083E1	2.68076E1	1.73531E-7	2.51203E-3	2.51203E-3	6.28592E-3	1.98661E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17704E-1	-7.98059E-1	-9.13105E0	-9.14247E0	5.53131E-3	9.34124E-2	2.73233E1	-3.26954E1	-3.26306E1	2.68175E1	1.73605E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.98872E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17466E-1	-7.98059E-1	-9.13091E0	-9.14211E0	5.55515E-3	9.31263E-2	2.72996E1	-3.25636E1	-3.26884E1	2.67631E1	1.73534E-7	2.51447E-3	2.51447E-3	6.32273E-3	1.98532E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17919E-1	-7.98488E-1	-9.13112E0	-9.14204E0	5.26905E-3	9.377E-2	2.73057E1	-3.26735E1	-3.2641E1	2.6816E1	1.73292E-7	2.51725E-3	2.51725E-3	6.29603E-3	1.97374E-1