[Scan]
initial_time=2016-02-16T03:26:38
final_time=2016-02-16T03:27:01
ip_count=19
run=1030
dataset=8
scan=586
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=8.05867E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=3.06344E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=1.15473E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.61972E-10
mult1=-9.93304E-9
mult2=-2.82241E-9
rf_tmon=-4.53045E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=3.74496E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6202E0
bslens_imon=2.75208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.06205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.18472E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38436E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64706E1
os_ef1alow_imon=2.98597E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04575E1
cs_ea2_imon=1.57842E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83872E1
cs_ef1a_imon=3.01852E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.84843E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.113E1
os_restr1_imon=2.89751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14739E1
os_ea1_imon=1.90157E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63562E1
os_ef1bup_imon=3.0854E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28395E0
cs_ionrep_imon=1.26058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93774E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=3.27718E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.30534E-10
tplens_vset=1.4E-1
tplens_vmon=1.59011E0
tplens_imon=-4.0153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.53347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.59187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.42202E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24384E0
ionrepsh_imon=2.00846E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34112E1
lens5b_imon=2.20312E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74725E1
cs_ef2b_imon=3.1406E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52805E-1
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.19934E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65403E0
os_ef2alow_imon=-2.57717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28621E-1
os_ef2bup_imon=-5.369E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.89432E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.32264E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0224E1
cs_anode2_imon=2.30199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.08547E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.88256E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.42186E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07942E0
cs_ionaccel_imon=-1.86949E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55804E1
einzel_imon=7.84353E-6
window_vset=0.0E0
window_vmon=1.48813E-1
window_imon=-1.10518E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82556E2
mask1_imon=2.39431E-4
mask2_vset=0.0E0
mask2_vmon=-1.87028E1
mask2_imon=-6.38108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93661E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.8101E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3395E1
os_fil1_imon=5.67132E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91822E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66672E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=1.00912E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66419E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.33145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-2.62632E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1716E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03184E-1
res40_imon=-2.53471E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.17895E-1	-7.98464E-1	-9.131E0	-9.14204E0	5.29289E-3	9.32932E-2	2.73541E1	-3.27192E1	-3.25906E1	2.67752E1	1.73531E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.97647E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17752E-1	-7.9844E-1	-9.13081E0	-9.14195E0	5.29289E-3	9.36508E-2	2.7291E1	-3.26909E1	-3.25734E1	2.68208E1	1.73457E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17871E-1	-7.98678E-1	-9.13072E0	-9.14202E0	5.17368E-3	9.34124E-2	2.73187E1	-3.26667E1	-3.26183E1	2.67956E1	1.73605E-7	2.5147E-3	2.5147E-3	6.30182E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.18062E-1	-7.98416E-1	-9.13126E0	-9.14197E0	5.126E-3	9.34601E-2	2.72925E1	-3.26314E1	-3.26008E1	2.678E1	1.73459E-7	2.51393E-3	2.51393E-3	6.32328E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.1768E-1	-7.98464E-1	-9.13115E0	-9.14218E0	5.60284E-3	9.32217E-2	2.72762E1	-3.26667E1	-3.26343E1	2.68186E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18038E-1	-7.98345E-1	-9.1311E0	-9.14176E0	5.79357E-3	9.32693E-2	2.73219E1	-3.26915E1	-3.26464E1	2.6825E1	1.73529E-7	2.51607E-3	2.51607E-3	6.31014E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17633E-1	-7.98535E-1	-9.13098E0	-9.14187E0	5.24521E-3	9.34839E-2	2.72781E1	-3.26825E1	-3.26272E1	2.67974E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.17871E-1	-7.98583E-1	-9.13081E0	-9.14178E0	5.126E-3	9.32217E-2	2.73375E1	-3.26693E1	-3.26194E1	2.67914E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.17657E-1	-7.98368E-1	-9.1311E0	-9.14192E0	5.60284E-3	9.3317E-2	2.72702E1	-3.26524E1	-3.2635E1	2.67854E1	1.73379E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.17704E-1	-7.98082E-1	-9.13072E0	-9.14197E0	5.34058E-3	9.32455E-2	2.73098E1	-3.26431E1	-3.26437E1	2.67692E1	1.73529E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.17418E-1	-7.9844E-1	-9.1311E0	-9.14218E0	5.36442E-3	9.33409E-2	2.73108E1	-3.26317E1	-3.26368E1	2.68093E1	1.73383E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.1749E-1	-7.98416E-1	-9.13124E0	-9.14209E0	5.43594E-3	9.32217E-2	2.73204E1	-3.26871E1	-3.26088E1	2.67621E1	1.73462E-7	2.51162E-3	2.51162E-3	6.30221E-3	1.99611E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17728E-1	-7.98249E-1	-9.13129E0	-9.14185E0	5.60284E-3	9.3317E-2	2.73165E1	-3.2641E1	-3.25942E1	2.67908E1	1.73488E-7	2.51652E-3	2.51652E-3	6.30458E-3	1.99105E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.17847E-1	-7.98178E-1	-9.13141E0	-9.14221E0	5.50747E-3	9.32217E-2	2.73201E1	-3.26747E1	-3.26356E1	2.67776E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17657E-1	-7.97796E-1	-9.13122E0	-9.14197E0	5.24521E-3	9.31263E-2	2.73196E1	-3.26585E1	-3.26191E1	2.68012E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17752E-1	-7.97486E-1	-9.13112E0	-9.14199E0	5.14984E-3	9.3174E-2	2.73186E1	-3.27093E1	-3.25801E1	2.6792E1	1.73314E-7	2.51287E-3	2.51287E-3	6.3074E-3	1.99061E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17442E-1	-7.98106E-1	-9.13107E0	-9.14199E0	5.29289E-3	9.32455E-2	2.73167E1	-3.26306E1	-3.26334E1	2.68073E1	1.73528E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.99754E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.17895E-1	-7.98297E-1	-9.13088E0	-9.14228E0	5.26905E-3	9.32217E-2	2.73021E1	-3.26446E1	-3.26434E1	2.68322E1	1.73546E-7	2.51709E-3	2.51709E-3	6.31163E-3	1.99595E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.17728E-1	-7.98464E-1	-9.13086E0	-9.14185E0	5.22137E-3	9.32932E-2	2.72868E1	-3.26874E1	-3.26231E1	2.67746E1	1.73457E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.98153E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.1749E-1	-7.98273E-1	-9.13103E0	-9.14202E0	5.22137E-3	9.32455E-2	2.73135E1	-3.26849E1	-3.265E1	2.67884E1	1.73454E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1