[Scan]
initial_time=2016-02-16T03:27:09
final_time=2016-02-16T03:27:31
ip_count=19
run=1030
dataset=8
scan=587
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=7.96962E-10
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.96462E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=1.0323E-9
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=4.40216E-10
mult1=-1.06434E-8
mult2=-2.74256E-9
rf_tmon=-3.88757E-3
rf_agc=3.32134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.52418E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.63174E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19588E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.08295E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.18012E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37964E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.98322E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.58479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=3.0277E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.74639E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.87653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15524E1
os_ea1_imon=1.9044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.29456E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93689E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01549E1
cs_anode1_imon=3.28452E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.93023E-10
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.5947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.9859E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.70872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=2.01377E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73609E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74631E-1
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.19347E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64303E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60741E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.87931E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.28434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72702E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.0819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88267E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.52092E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-2.02202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55965E1
einzel_imon=7.82685E-6
window_vset=0.0E0
window_vmon=1.88725E-1
window_imon=-8.71708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86593E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.66832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.75515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=5.04588E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83187E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66483E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=1.00829E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62997E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6662E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.16117E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6243E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27904E-1
cs_fil2_imon=-2.28112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29236E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22367E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72731E-1
res40_imon=-2.58848E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17895E-1	-7.98488E-1	-9.13088E0	-9.14235E0	5.31673E-3	9.33886E-2	2.73163E1	-3.26425E1	-3.26496E1	2.6807E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9883E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17728E-1	-7.98631E-1	-9.13088E0	-9.1419E0	5.17368E-3	9.34601E-2	2.73259E1	-3.26701E1	-3.26425E1	2.68022E1	1.73309E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17823E-1	-7.98702E-1	-9.13064E0	-9.14195E0	5.53131E-3	9.34601E-2	2.73775E1	-3.2648E1	-3.25965E1	2.67966E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.17919E-1	-7.98631E-1	-9.13069E0	-9.14207E0	5.24521E-3	9.34839E-2	2.73135E1	-3.26849E1	-3.26122E1	2.68126E1	1.73493E-7	2.51701E-3	2.51701E-3	6.3074E-3	1.98029E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17537E-1	-7.98249E-1	-9.13103E0	-9.14204E0	5.38826E-3	9.35078E-2	2.7332E1	-3.26774E1	-3.25979E1	2.68274E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17871E-1	-7.98035E-1	-9.13122E0	-9.14209E0	5.48363E-3	9.31025E-2	2.73004E1	-3.26685E1	-3.25735E1	2.6804E1	1.73605E-7	2.51581E-3	2.51581E-3	6.29624E-3	1.97294E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1799E-1	-7.9782E-1	-9.13086E0	-9.14226E0	5.65052E-3	9.35555E-2	2.73081E1	-3.26296E1	-3.26212E1	2.6813E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.96638E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.1768E-1	-7.98297E-1	-9.13124E0	-9.14209E0	5.55515E-3	9.32693E-2	2.73201E1	-3.27143E1	-3.26296E1	2.68082E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.97216E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17609E-1	-7.98583E-1	-9.13079E0	-9.14164E0	5.31673E-3	9.34124E-2	2.72558E1	-3.26831E1	-3.2635E1	2.67644E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.97731E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17871E-1	-7.9782E-1	-9.13115E0	-9.1419E0	5.48363E-3	9.33886E-2	2.72949E1	-3.26867E1	-3.26116E1	2.67992E1	1.73303E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.97731E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1749E-1	-7.98178E-1	-9.13117E0	-9.14211E0	5.17368E-3	9.3174E-2	2.73157E1	-3.26785E1	-3.26319E1	2.67662E1	1.73454E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.97559E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17704E-1	-7.98202E-1	-9.13088E0	-9.14192E0	5.55515E-3	9.35793E-2	2.73302E1	-3.2697E1	-3.25893E1	2.68082E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9951E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.17537E-1	-7.98273E-1	-9.13086E0	-9.14173E0	5.76973E-3	9.33886E-2	2.72821E1	-3.26661E1	-3.26661E1	2.67908E1	1.73379E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17513E-1	-7.98321E-1	-9.13064E0	-9.14216E0	5.67436E-3	9.35316E-2	2.73219E1	-3.26909E1	-3.25936E1	2.67842E1	1.73529E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.00673E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17323E-1	-7.9875E-1	-9.13088E0	-9.14211E0	5.45979E-3	9.36508E-2	2.73357E1	-3.26579E1	-3.26543E1	2.68064E1	1.73605E-7	2.50898E-3	2.50898E-3	6.33486E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17418E-1	-7.98726E-1	-9.13072E0	-9.14178E0	4.95911E-3	9.31978E-2	2.73027E1	-3.26561E1	-3.25785E1	2.68106E1	1.73454E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17299E-1	-7.98488E-1	-9.13136E0	-9.14204E0	5.19753E-3	9.34362E-2	2.73135E1	-3.26867E1	-3.26524E1	2.681E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17418E-1	-7.98678E-1	-9.13117E0	-9.14192E0	5.22137E-3	9.32217E-2	2.73063E1	-3.26208E1	-3.26104E1	2.67978E1	1.73454E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17537E-1	-7.98488E-1	-9.13093E0	-9.14223E0	5.17368E-3	9.33409E-2	2.72991E1	-3.27197E1	-3.26188E1	2.67908E1	1.73532E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.00064E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.1768E-1	-7.9875E-1	-9.1311E0	-9.14204E0	5.31673E-3	9.35078E-2	2.72702E1	-3.26512E1	-3.262E1	2.67986E1	1.73454E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1